Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

125

Aluminum alloy 1728 3 Port 3 Position Valve VEX3 Series Working Principle Fig. (1) A R Fig. (2) Closed center Fig. (3) P A 3(R) 3(R) 3(R) 2(A) 2(A) 2(A) 1(P) 1(P) 1(P) This is a 3-port switch valve in which the shaft 7 extending from the driving piston 3 opens/closes a pair of poppet valves 6.

HRX-OM-X037

P.5-12 (16) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (17) Operation mode P.5-12 Common or serial communication ( mode). (18) Operating condition display It indicates the run and stop status of the product. P.5-12 (19) Run/Stop To run/stop the product.

0.5

distance [mm] wStatic Neutralization Range IZF10 IZF10-L 300 mm 300 mm 8 s 8 s 4 s 4 s 0 0 2 s 6 s 2 s 6 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation distance [mm] IZF10R (Air flow level: 4) IZF10R (Air flow level: 1) 300 mm 300 mm 6 s 2 s 8 s 6 s 4 s 2 s 8 s 0 0 4 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

R ports) Applicable tube O.D.: 8 24 13.3 (Pitch) P = 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 PE 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 43.7

7

.) dimensions. 139 VXD Series For Air/Water/Oil 3 A Dimensions/VXD2 Body Material: Aluminum, C37, Stainless Steel Grommet 3 A VXD2 Port size 04 (1/2) (With bracket) 300 U E C 7.5 1.6 7.5 1.6 5.5 T A b a B 5.5 OUT IN OUT IN M b a OUT IN 18 2 x P Port size d e (D) L K f J F I f 2 x P Port size d e Grommet (with surge voltage suppressor) C 300 U E A B T OUT IN M I J F 2 x P Port size L K (

ZP

P. 29 Bellows Series ZP Common adapter With pad Single unit Attachment Sponge Pad For adsorption of work pieces with bumps P. 30 4, 6 8, 10 15 Single unit S Sponge P. 31 With adapter Heavy-duty Pad 32, 300 340 Heavy-duty (Flat with rib) For heavy or large work pieces P. 33 H Heavy-duty (Thin flat with rib) P. 33 HT 150, 250 32, 150 Heavy-duty (Bellows) P. 35 HB Heavy-duty (Oval) 30 x 50

Slider Type/Ball Bushing Bearing

Note 2) Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 1529.) (For intermediate stops, refer to page 1527.)

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

Aluminum High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

Basic Type/Direct Mount Type

size determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Determination of allowable load mass & pressure (Refer to page 1466 for vertical operation.)

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Cushion needle Q + Stroke PG MY1B P P (MY1HG) MY1H MY1H (Hexagon socket head taper plug) 1 (Hexagon socket head taper plug) QQ SS RR YH MY1B PP QQ RR SS A B H NE NH NF MY1M P P (MY1HG) P (Port) P (Port) PP (Hexagon socket head taper plug) (Hexagon socket head taper plug) G G MY1C TTT UU UU TT A N Z + Stroke MY1H P MY1 HT P (Port) (Hexagon socket head taper plug) MY1 W MY2C P P (Port) (Hexagon

SZ3000

R ports) Applicable tube O.D.: 8 24 13.3 (Pitch) P= 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 PE 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 43.7

Refrigerated Air Dryers

VAC specification] Power cable outlet (17) Drain tube (O.D. 10, length approx. 0.8 m) Dimensions [mm] Model Port size A B C D E F G H L M N P Q IDU8E Rc3/4 270 485 859 31 90 365 130 230 300 80 300 328 15 IDU11E 909 IDU15E1 Rc1 300 620 960 79 54 425 93 258 330 66 470 358 16 24 Refrigerant R407C (HFC) High Inlet Air Temperature IDUlE Series 22E, 37E, 55E, 75E (Inlet air temperature: 55C, Outlet

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

ZP

P. 29 Bellows Series ZP Common adapter With pad Single unit Attachment Sponge Pad For adsorption of work pieces with bumps P. 30 4, 6 8, 10 15 Single unit S Sponge P. 31 With adapter Heavy-duty Pad 32, 300 340 Heavy-duty (Flat with rib) For heavy or large work pieces P. 33 H Heavy-duty (Thin flat with rib) P. 33 HT 150, 250 32, 150 Heavy-duty (Bellows) P. 35 HB Heavy-duty (Oval) 30 x 50

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(kg) 100 63 63 400 80 300 50 50 60 200 40 40 40 32 25 20 32 100 20 0 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 1 100 50 1000 Operating pressure P (MPa) Operating pressure P (MPa) Operating pressure P (MPa) Graph (6) up to 700 mm/s Selection Example: Load Extended Horizontally 400 80 350 w Selection conditions Mounting: Horizontal extrusion Maximum speed

Series AP500

Refer to gauge guide (P.94).

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.