MG

MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 75 to 200 st 250 to 400 st 25 st 75 to 200 st 250 to 400 st 50 st 32 40 50 63 97 102 140 17.5 55.5 127 12.5 42.5 20 97 102 140 11 49 127 6 36 20 106.5 118 161 21 64 131.5 9.5 34.5 25 106.5 118 161 16 59 131.5 4.5 29.5 25 MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 25 st 125 to

MGP

29.5 123 115.5 38.5 32 30.5 25.5 31 24.5 62 57 20 20 25 25 16 16 20 20 97 91 98 127 123 115.5 106.5 97 114 131.5 127.5 159 106.5 102 114 131.5 127.5 159 3.17-25 Series MGP MGPM, MGPL(With air cushion) 80/100 Dimension of T slot 4-YY depth YL 6H7 depth 10 b a 6H7 c d X0.02 X 7 e 6H7 5 10 XX details e 22.5 30 Bore (mm) 80 100 a 13.3 15.3 b 20.3 23.3 c 12 13.5 d 8 10 WB XX section Z WA HA:

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E E D C Center of F.R.L. body Center of F.R.L. body B C B EE (Except Y300T-D) Part no.

LEC-OM02704CN

DEL (3) 03132ASCII 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 ASCII 0 1 2 3 4 5 6 7 8 9 A B C D E F 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 ASCII G H I J K L M N O P Q R S T U V 0"(1)1630H (4) a b c d e f ASCII a b c d e f * a1661H 14 6 14 14.3.3 1 [A] [a] [B] [b] [C] [c] [D] [d] [E] [e] [F] [f] 14.3.4 ETX(STXSOH)ASCII 162ASCII16 S T X E T X [0] [A] [1] [F] [5] [2] [5]

C85

screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

C x 200 (= D) 25 LZ Note 1) Distance within which the table can move when it returns to origin.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

E 4 A 3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

102 19 42 22 44 44 3/4 75 192 20 50 40 40 316 84 50 25 100 19 15 25 to 1800 Rod series Tolerances (mm) CD B series rod C series rod Bore size (mm) Bore size (mm) H9 f8 E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 250 0.016 0.043 +0.043 0 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 255 M16 x 1.5 25 22 18 7 14 55 250 0.025 0.064 0.020 0.053 +0.052

Proposals for Energy Saving

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 59 71 82 46 55 66 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 4 5 5 16 16 16 12 15 15 44

CL

70 80 11 11 14 17 17 M10 X 1.25 M12 X 1.75 M12 X 1.75 Trunnion/CLAWT (mm) Stroke range A Bore (mm) 40 50 63 80 100 D LZ BP E BN K C KA B GC B1 GD F AL BQ GA GB J H1 GL GR W/o rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 W/ rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 96 108 115 129

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRQ2 Angle adjusting screw Angle adjusting screw Angle adjusting screw MSQ MRQ 0 A R R 9 n Dot ot gl e A e n at at v n io a o gl io io ct dj o e re u n n gr a st di dj ra ra in y g u g 20in n n e st di st g k g in re u e e g of dj ct a di of of io e re e n gl ct n g k A k io n e e n ra y y gr n gr io o o at o o ot v v R e e 9 9 0 0 The rotation range under the adjustment of an angle at 60

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

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A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction. 11-7-42 Angle adjusting screw Angle adjusting screw 0 A R R 9 n ot ot gl e e n at at v io a o io io ct dj o re u n n gr st di ra ra in y g g in n n e di st g k g re u e e of dj ct a of of io e e n gl n g k A k n e e ra y y gr n gr io o o at o o ot v v R e e 9 9 0 44 Series CRA1