Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

box [-S ] For exhaust cleaner mounting [-C ] Interface Regulator ARBQ5000-00-A-5 B-1 P Release valve spacer VVQ5000-24A-5D D U D U (see p. 36~39) See pages 31 through 40 for detailed dimensions of each option.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80

JXCx-OMU0004

P.50 34 No.JXC-OMU0004-A 7.3 SW (A) (B) PLC PLC SW (C) A,B,C A B C I/O I/O I/O 35 No.JXC-OMU0004-A A e i j PLC h 15 8.1 P.40 8.4 P.43 36 No.JXC-OMU0004-A B PLC I/O PLC PLC PLC PLC 3 i j 3 PLC PLC PLC PLC I/O g 7 LED f L L (1) 7 LED f (2) (3) 3 k n c 37 No.JXC-OMU0004-A C h [15] g 2 i j i h j g i 2 j i i h [0] j j 3 g 3 i OFF j 3 2 e h 0 h i g 3 j

Compressed Air Preparation Filter

C O N T E N T S Modular Connection Type Compressed Air Preparation Filter AFF/AM/AMD/AMK Series Compressed Air Preparation Filter AFF/AM/AMD Series Activated Carbon Filter AMK Series How to Order p. 6 How to Order p. 18 Line Filter AFF Series Standard Specifications p. 7 Flow Rate Characteristics p. 8 Mist Separator AM Series Standard Specifications p. 9 Flow Rate Characteristics p.

MG

E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50 st Over 50 st B C DA DB FA FB G GA GB GC H HA J K L 25, 50 st Over 50 st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RB RR RL QA QB RA P PA PB

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

R port) (Pitch)P=17.5 12 2.5 2.5 12.5 30 46.8 14.6 18.5 10 45.4 0.8 2-One-touch fitting (A, B port) Applicable tube C4: T0425 C6: T0604 15.2 16.5 R R P R R P 123 23.5 49 16 B A B A B A B A B A 16.516.5 77.6 77 82.8 C4: (3) C6: (3.2) 52.8 Triangle mark B Side 50 20 5.8 24.3 28.5 Polarity indication Applicable connector: 26-pole MIL type (Conforms to MIL-C-83503) Stations L1 L2 6 129.5 111.5

Tie-rod Type Hydraulic Cylinder

strokes FZ (mm) Bore size (mm) A B C a B E D d F FD G GA J K M MA MM NA P FT FX FY FZ H 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 60 44 18 25 9 14 17.5 M8 x 1.25 18 16 20 M14 x 1.5 30 1/4 10 77 44 95 66 50 19 50 25 9 73 73 53 20 28 11 17 17 M10 x 1.5 20 22 22 M16 x 1.5 30 3/8 10 95 53 115 73 63 21 55 28

•

(;le';'C. 0 CaQter trunnion: 44 96 83 106 T C,O 73 71 76 61 II> ~ 102 59 62 50 135 44 11 9 147 ~... > C .. S ' 101 73 111 89 74 102 84 91 Rod flange: Head llange: 301 267 44 330 Foot: L,.

Cylinder with Lock

200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa

Prevents Micro-Bubbles

Dimensions Y 4-Mounting hole for W LLHA--C Stations K A N G L3 L2 L1 Non-locking type Locking type 60 (H2) (H1) C U E R Pitch = B A (OUT) port n-P P (IN) port 2-P (mm) Dimensions (mm) B C E G H1 H2 K N P R U W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 50 31 65 20.5 10 85.5 87 18 27 Rc1/4, NPT1/4 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 37 90 25.5 19 112.5 114.5 39 37 Rc3/

MXQ

Bore size/Stroke (mm) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) Adjuster option FP Nil

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. + P.627 10-SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 23 (AR) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P.604 10-SYJ500 Push-turn locking lever type DIN terminal 1.2 23 (AR) 1/8 (SYJ500, 700 only) P.615 10-SYJ700 M8 connector 2.7 23 (AR) 1/8, 1/4 P.627 Note) All AC voltage models have built-in

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Switch Stop switch, Enable switch (Option) Cable length [m] 3 Enclosure IP64 (Except connector) Operating temperature range [C] 5 to 50 Option Enable switch is provided.

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/10mm stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 13 140 18.5 39 51.5 118 136.5 5 12.5 20 22 40 43 13 13 137 15.5 36 50 115 13 133.5 12.5 52.5 50 48.5 ZPT25F10-0-A14 ZPT50F10-0-A14 141 19.5 40 119 137.5 6 13.5 25 28 50 53 ZPT32F10-0-A14 135.5 16 36.5 115.5 134 13 32 35 49 Additional dimensions by stroke(mm

NCA1

Note 2) Refer to p.5.3-5 for lead wire length.

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

ZX

Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)