Series VQ Base Mounted Metal Seal/Rubber Seal VQ1000 Series P.1.10-124 P.1.10-128 P.1.10-132 Plug-in Plug lead VQ2000 Series P.1.10-124 P.1.10-128 P.1.10-132 VQ0 Series P.1.10-170 P.1.10-174 VQ1000 Series P.1.10-170 P.1.10-174 P.742 1.10-114 Manifold Variations T L C S Port size SUP EXH port Cylinder port kit kit kit Lead wire Direct electrical entry style Serial transmission unit Terminal box (Terminal block) SY P, R A, B Enables single-wire
1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5 19.5 G 3/8 Electrical entry 39.1 5 x 1/4" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 43.8 53.6 < >: AC Note) When using this valve for IP65, mount a seal connector to the electrical entry. 560 VQ1000/2000 1021Semi-standard Different Number of Connector Pins F and P kits with the following number of pins are available besides the standard number (F = 25P
1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5 19.5 G 3/8 Electrical entry 39.1 5 x 1/4" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 43.8 53.6 < >: AC Note) When using this valve for IP65, mount a seal connector to the electrical entry. 560 VQ1000/2000 1021Semi-standard Different Number of Connector Pins F and P kits with the following number of pins are available besides the standard number (F = 25P
100 80 63 P=0.5MPa P=0.5MPa 100 50 50 40 25 20 10 40 20 30 Load weight m (kg) Load weight m (kg) 32 2 3 4 5 25 20 16 10 5 4 16 2 3 1 1 0.2 0.3 0.4 0.5 0.5 0.2 0.3 0.4 0.1 10 100 0.1 10 100 20 30 40 200 50 50 200 20 30 40 Eccentric distance l (mm) Eccentric distance l (mm) Over 50 stroke Over 100 stroke P=0.5MPa 100 80 63 P=0.5MPa 20 100 25 50 Load weight m (kg) 10 Load weight m (kg) 40 32
2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.
The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) L (7.5) VZ3000-123-1A 8 Label for EXH block disk Label for SUP/EXH block disk Label for SUP block disk (35) (25) P R P R P R P R P R 5.5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors [Rail mounting pitch
(17.5) 1/2 40 37 128 41 60 30 50 3 14 14 100 71 16 110 M12 x 1.75 10 With Rod Boot (mm) (mm) With Air Cushion (mm) Bore size Rc, NPT port WA WB W WH GA GB P 20 12 10 (12) M5 x 0.8 16 15 (16) 25 1.5 25 12.5 10 (12.5) M5 x 0.8 16 14.5 (16) 25 1.5 32 12 10 (12) 1/8 16 14 (16) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20
Holding voltage is 25% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.)
Holding voltage is 25% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.)
Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080
A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture
25 25 1 l/min (ANR) {In the case of Inlet air pressure 0.7 MPa} Bracket Assembly (Accessory) Part No.
IA8X 1 y ZPR400 40 43 29 42.5 G H G I H 15 79.5 10 ,p mm Applicable tube ZPR25D 25 28 20 35 48~ 636 25 89.5 .6 AppHcabfe'l\Jbe O.D Q R ~S Appllcabfe tube (mm) I 24.3 16.8 6 12.8 A:PPlicab~ )iJ~ 0.0 ;P Q R _ .SI 8 . 2$.,2,; 18.7 . 15.2 . 8 ;' 4 23.3 15.8 1 0.4 .6 6 24.3 '16.8 12.8 I ~8 8 26.2 18.7 15.2 18 Vacuum Entry HorizC?"
Q Note) CE-compliant Note) DIN terminal D only for 100 VDC XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve (Bellows pressure balance, 2-stage voltage switching type) Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 5 100 VAC 200 VAC 24 VDC Control power supply P With control power supply Note) There are no CE-compliant
) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable pad form Connection/Thread dia.
VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.
3/8 3/8 1/2 1/2 15 18 25 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 84 90 98 116 126 94 100 108 126 136 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 Double Clevis Style: CA2DQ 2-P (Rc, NPT, G) 4-J Shaft diameter: CDd9 Hole diameter: CDH10 MM Width across flats KA G G D E Width across flats B1