Parallel Style Air Gripper Series MHZ

S C S C S C 0.016 0.043 MHZL2-10 K 12f8 62.8 11 7 15 End boss assembly Applicable tubing Plug 0.016 0.043 MHZL2-16 K 16f8 66.4 15 10 20 H G Note 1) 0.020 0.053 MHZL2-20 K 20f8 81.7 19 12 22 D2 0.020 0.053 Other dimensions and specifications correspond to the standard type.

Electric Grippers

C [mm] [mm] Model A B C MM LEHZ10(L)K2-4A LEHZ16(L)K2-6A LEHZ20(L)K2-10A LEHZ25(L)K2-14A LEHZ32K2-22A LEHZ40K2-30A Model A B H LEHZ10(L)K2-4B LEHZ16(L)K2-6B LEHZ20(L)K2-10B LEHZ25(L)K2-14B LEHZ32K2-22B LEHZ40K2-30B 3 4 5 6 7 9 3 4 5 6 7 9 5.7 7 9 12 14 17 5.7 7 9 12 14 17 2 2.5 4 5 6 7 2.9 3.4 4.5 5.5 6.6 9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Flat Fingers (C) F C W J K

Lightweight and Compact

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling

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[L] Cooled substance specific heat C : 1.0 x 103 [cal/(kgfC)] Cooled substance temperature when cooling begins T0 : 30 [C] Cooled substance temperature after t hour Tt : 20 [C] Cooling temperature difference iT : 10 [C] (= T0 Tt) Cooling time it : 15 [min] Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860 [(cal/h)/W] * Refer to the following for the

C76

: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting

C76

: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type

AW

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

CQS

No option Rubber bumper Rod end male thread C M Rubber bumper (Standard equipment for long stroke model) C Rubber bumper & Rod end male thread CM * "C" and "M" can be combined.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Flow Characteristics SJ2000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b b Cv 0.04 0.55 0.13 0.13 0.50 0.04 C2 C8 0.08 0.16 0.33 0.36 0.13 0.08 C4 0.52 0.06 0.18 0.20 0.29 M3 0.06 SJ3000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b 0.04 0.56 C2

Refrigerated Air dryer Series IDU/IDF

(C) 35 40 45 50 30 Outlet air pressure dew point (C) Ambient temp.

REA/REB

C D Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

ZP3

Lock ring Adapter z c x Pad 165 A

Cylinder with Lock

Width across flats KB B C V MM BH1 BH2 BH3 TX D E B1 C B ZZ + Stroke S + Stroke H A K BN N1 N MA MB F AL H1 TT B C B1 C B TY With rod boot d e 10.2 f h 10.2 l [mm] Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4

Table of Contents

Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !

Series AK1000

Option Material Code Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) 5) Ports Diaphragm Nozzle Code Body Brass Poppet No code Material Code S, SH V V V V B S SH Ports 316 SS Hastelloy C-22 Hastelloy C-22 B 316 SS HR Hastelloy C-22 2P 3P 4PL 5PC Refer to the following porting configurations.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

M/C M/C Flow control for each branch line Applications For the control of metal wire tension For air blow For flow control of N2 gas to prevent lead frame oxidation Detection camera N2 blow prevents the distortion of camera images due to air turbulence.

LEC-OM071xx

D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H /EXT1

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C d9 (Shaft dia.)

LEH_C

c. 8.4 ! ! (LEHZJ ) 24 - 9.