Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) ( ): Denotes without sub-plate. 10-SV3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (g) Note 2) Flow rate characteristics Note 1) Port Valve model Actuation type M12 waterproof connector (Cable length 300 mm) size C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv Single 250 (121) 4.1 0.41 1.1 4.1 0.29 1.0 2 position Double 253 (124) 10-SV300--02 Closed center 3.0 0.43 0.80 2.6 0.41 0.72

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

5

Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

300 L M9N Number of auto switches Guide type C Cam follower guide 2 pcs. 1 pc. n pcs.

VFS

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Bag Filter

T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

Series AK1000

22 Hastelloy C-22 Hastelloy C-22 PCTFE 80 0.55 316 SS PCTFE (Option: Vespel) 70 0.48 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 Dimensions inch (mm) 50 0.34 AK1400T 40 0.28 30 0.21 2.12 (53.8) 20 0.14 10 0.07 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P or BP) 0 0.00 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) AK1400T 80 psig (0.55 MPa) Inlet pressure

0.5

600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R

Industrial Filters

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)

SMC Basic Pneumatics

C"=l C'=l C;l C,=l C;l C;l C"=t Flg. 7.28.1 In Series circuit, all devices having a C" of 1 and the resulting impact on the circuit,s ovsrall C, \i_ --+ C,-=t c,=1 .4 C,=1.4 C,=1.73 c"=1 .73 C"=1.73 C"=2 C"=2 C,=2 Q,=2 =.x><+<_= _><_><_# -..>---.> G".v"=1'0 C,*=1.0 C"-=1.0 c,=1 C,=3 c,=4 C-"=r C*"=0.9g C"*=o.06 C,"r.=0.84 C",l/|=0.89 C*=0.82 Flg. 7.28.2 Orifices in series connection and resulting

%silltr

C"=l C'=l C;l C,=l C;l C;l C"=t Flg. 7.28.1 In Series circuit, all devices having a C" of 1 and the resulting impact on the circuit,s ovsrall C, \i_ --+ C,-=t c,=1 .4 C,=1.4 C,=1.73 c"=1 .73 C"=1.73 C"=2 C"=2 C,=2 Q,=2 =.x><+<_= _><_><_# -..>---.> G".v"=1'0 C,*=1.0 C"-=1.0 c,=1 C,=3 c,=4 C-"=r C*"=0.9g C"*=o.06 C,"r.=0.84 C",l/|=0.89 C*=0.82 Flg. 7.28.2 Orifices in series connection and resulting

240

) Lead 10 (LEPY10LJ) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 LEPY10 (Motor size: Basic) Horizontal Vertical 7 3 Lead 5 (LEPY10K) 6 2.5 5 2 Work load [kg] Work load [kg] 4 Lead 5 (LEPY10K) 1.5 3 1 2 Lead 10 (LEPY10J) Lead 10 (LEPY10J) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 Note) The maximum value of the work load for the positioning

Modular Design with Uniform Body Style

AD27-D With bowl guard AD27-C-D AD37m-D AD47m-D Normally open (N.O.)