REA/REB

F7BWV F7BAV 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) Yes 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With diagnostic output (2-color indication) 5 V, 12 V IC circuit

REA/REB

F7BWV F7BAV 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) Yes 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With diagnostic output (2-color indication) 5 V, 12 V IC circuit

MXW

270.5 290.5 315.5 340.5 365.5 390.5 415.5 Data Solid State Switch: D-M9B(V), D-M9N(V), D-M9P(V) 2-color Indication Solid State Switch: D-F9BW(V), D-F9NW(V), D-F9PW(V) Stroke (mm) Model 25 75 150 175 50 100 200 125 225 250 275 300 A 48.5 23.5 23.5 27.5 23.5 23.5 B 83.5 129.5 204.5 104.5 154.5 179.5 MXW8 W 36.5 11.5 11.5 15.5 11.5 11.5 V 95.5 141.5 216.5 116.5 166.5 191.5 A 27 27

MVGQ

(With indicator light: 1.0) 100 V Apparent power AC (2) 1.0 (With indicator light: 1.1) [1.1 (With indicator light:1.2)] 110 V [115 V] CEP1 M L 20, 30, 40, 50, 75, 100 125, 150, 175, 200 MVGQ 20 (VA) 1.8 (With indicator light: 1.9) 200 V 1.9 (With indicator light: 2.0) [2.2 (With indicator light:2.3)] CE1 220 V [230 V] Intermediate stroke (mm) Diode Surge voltage suppressor As for the intermediate

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

200 V, 12 V, 24 V, 48 V, 110 V, 220 V 240 V With surge voltage suppressor (S) (Grommet type) With light/surge voltage suppressor (Z) (Grommet terminal) (Conduit terminal) (DIN terminal) L plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector

ZP

ZPX40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX80HBNJ25-B01-A18 ZPX 80HBNJ50-B01-A18 75-B01-A18 ZPX100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 418 268 Misc. 40 50 63 80 100 125 0 +10 +1 1 441 289 0 +19 +1 2 684 312 0 +37 +2 3 723 284 0 +61 +2 6 767 305 100-B01-A22 ZPX125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 1 +121

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

Compact Cylinder with Solenoid Valve/

V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Diagnostic indication 2-color indication IC circuit 5 V, 12V 3-wire (PNP) 2-wire 12 V A96 A93 A90 A96V A93V A90V IC circuit 5 V 3-wire (NPN equivalent) Yes 100 V 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less 5 V, 12 V IC circuit Solid state auto switches marked with are produced upon receipt of order.

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

C85

Yes A72H A72 Grommet 200 V Reed switch Solid state switch A73H C73 A73 100 V 12 V A80H C80 A80 IC circuit No 100 V 5 V, 12 V Relay, PLC C73C A73C 2-wire Yes 12 V 24 V Connector C80C A80C IC circuit No 24 V 5 V, 12 V Diagnostic indication (2-color) A79W Grommet Yes F79 H7A1 F7NV 3-wire (NPN) IC circuit 5 V, 12 V F7P H7A2 F7PV 3-wire (PNP) Grommet J79 H7B F7BV 12 V 2-wire

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 V Grommet (NPN equivalent) Yes Yes 100 V 12 V 24 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 12 V 2-wire Grommet 24 V IC circuit 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire Solid state switches marked with are produced upon receipt of order.

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LAT Applicable Stroke Table*4 V: Standard Model Stroke [mm] LZ 200 300 400 500 600 700 800 900 1000 1200 1500 LEJS40 V V V V V V V V V V LEJS63 V V V V V V V V V V LC3F2 *4 Please consult with SMC for non-standard strokes as they are produced as special orders. For auto switches, refer to pages 142 to 144.

CY1

Static moment Investigate Me1, Me3 Memax is the allowable moment for V 3 = Me/Memax 3.

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Table of Contents

(V type) 3-10-31 32 Series VQ7-8 Manifold Option Parts Double check spacer VV72-FPG Silencer box VV72---SB By combining a 3 position exhaust center valve with a double check spacer, an intermediate stopping position of a cylinder can be held for an extended period.

MXW Series Long Stroke Slide Table

395.5 MXW25 10 W 66.5 54.5 24.5 24.5 24.5 24.5 24.5 24.5 24.5 V 228.5 240.5 270.5 290.5 315.5 340.5 365.5 390.5 415.5 Solid state switch: D-F9B (V), D-F9N (V), D-F9P (V) Switch operation range Stroke (mm) Model 300 275 250 225 200 175 150 125 100 75 50 25 A 23.5 23.5 23.5 23.5 27.5 48.5 B 204.5 179.5 154.5 129.5 104.5 83.5 3 (3.5) MXW 8 W 11.5 11.5 11.5 11.5 15.5 36.5 V 216.5 191.5 166.5

Air Cylinder

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAVM9NA v v V v v IC circuit 3-wire (PNP) M9PAVM9PA v v V v v 2-wire 12 V M9BAVM9BA v v V v v Water resistant (2-color indicator) Water resistant type auto switches can be mounted on the above models, but