SMC

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

Round Type Hydraulic Cylinder

Mounting correctly Mounting incorrectly Solid state D-G59, D-G5P, D-K59, D-G5BA D-G59W, D-G5PW, D-K59W D-G59F, D-G5NT, D-G5NB Solid state D-H7A1, D-H7A2, D-H7B, D-H7BA D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW Reed D-C73, D-C76, D-C80, D-C73C, D-C80C Reed D-B53, D-B54, D-B64, D-B59W Auto switch Auto switch Auto switch mounting screw M3 x 0.5

CLQ

Hs A B A B Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BA D-F7W D-F7F D-J79W D-F7WV D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-A73C D-A80C D-F7V D-F7WV D-J79C D-A79W D-A7 D-A80 Bore size (mm) D-A7/A80 D-A79W Bore size (mm) Hs Hs Hs Hs Hs Hs 20 B A B A B A A B 25 20 32 34 35 38 32.5 38.5

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 20 16 20 16 20 Mounting position Mounting position 16 A 90 70 93 73 94 A A 74 B 110 90 107 87 106 B B 86 Operating range Note) 7.5 11 6.5 8.5 6.5 Operating range

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Auto Switch Mounting Height (mm) Auto switch model Band mounting D-C7m/C80 D-H7m/H7mW D-H7NF D-H7BA D-M9mV D-M9mWV D-M9mAV D-A9mV D-M9m D-M9mW D-M9mA D-A9m D-C73C D-C80C D-H7C D-A7m D-A80 Hs Hs Hs Hs Hs Hs Bore size 10 17 18 17 19.5 20 16.5 16 20.5 21 20.5 23 23.5 19.5 (mm) Auto switch model Rail mounting D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-A7mH/A80H D-F7m/J79 D-F7mW

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

D-A64/A67 Grommet 2.11-11 Reed switch 2.11-12 D-90/97 D-A90/A93/A96 D-A90V/A93V/A96V 2.11-13 Grommet 2.11-14 D-90A/93A Direct mounting 2.11-15 D-R731/R732 2.11-15 D-R801/R802 MHZ2 2.11-16 D-R731C/R732C Connector 2.11-16 D-R801C/R802C MHZJ2 2.11-17 Grommet Rail D-A79W 2 color indication MHQ Grommet Tie rod 2.11-18 D-A59W 2.11-19 D-F79/F7P/J79 MHL2 Grommet 2.11-20 D-F7NV/F7PV/F7BV Rail Connector

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) D-A90V D-A96V D-A93V 22 Bore size D-M9V D-F9WV D-M9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 32 Mounting pattern q, w 35 Mounting pattern e 20 12 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) D-A90V D-A96V D-A93V 22 Bore size D-M9V D-F9WV D-M9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 32 Mounting pattern q, w 35 Mounting pattern e 20 12 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Nil (Example) A93 3m .

D-F6N/D-F6P/D-F6B

to the D-B53/B54, D-C73(C)/C80C, D-A93(V), D-A73(C)/A80C, DA53/A54, D-Z73, and D-90/97/90A/93A only. 4) For reed auto switches M8 and M12 type with connector, please contact SMC. 5) The standard lead wire length of the trimmer auto switch is 3 m. 6) The standard lead wire length of the solid state auto switch with the timer except for the D-P3DW and D-M9A (V), water-resistant 2-color

3-Position Rotary Table

(Make sure that there is no rotation backlash in the table.) 3 Tighten both adjustment bolts c and d to approx. 45. Note 1) Tighten both adjustment bolts c and d to approx. 45. Note 1) 4 Lock adjustment bolts c and d with fixing nuts. Note 2) Lock adjustment bolts c and d with fixing nuts.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

39.4 (36.9) 36.7 (34.2) 29.6 (27.1) 34.5 (32) 7.6 5 47.9 6.9 10.9 5.9 14.9 22.9 68.4 (65.9) 59.7 (57.2) 57.6 (55.1) 50.5 (48) 11.6 6 41.4 70.4 8.4 28.4 18.4 10.4 20.4 84.7 (82.2) 86.6 (84.1) 83.5 (81) 16.3 7 38.7 61.7 86.7 8.7 28.7 18.7 8.7 13.7 113.6 (111.1) 98.5 (96) 18.9 8 31.6 59.6 88.6 12.6 115.6 32.6 22.6 12.6 17.6 23 8 36.5 52.5 85.5 17.5 100.5 37.5 27.5 17.5 20.5 ( ): denotes D-A93

MXH Series Compact Slide

D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

Smooth Cylinder Series CQSY

How to Order Standard B 20 30 D C CQSY B 20 30 D C F9BW S CDQSY With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

1

/C8 D-H7 A B 11.5 8.5 16 Auto switch D-C7/C8, D-H7 D-B5/B6 D-G5/K5 A 12 14.5 B 24.5 Auto switch D-B5/B6, D-G5/K5 D-B7/B8 D-G7/K7 8.5 A 14.5 B 11 Auto switch D-B7/B8, D-G7/K7 Auto Switch Mounting Position D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C Auto switch model D-C7/C8 D-C73C D-C80C D-G5 D-K5 D-G5NYL D-B59W D-H7 D-H7C D-H7W D-H79F D-H7BAL Bore size (mm

Basic Type/Direct Mount Type

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV