MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

4 C-9 MYMK-40-Stroke MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYMK-16-Stroke 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 C-6 MYMK-25-Stroke C-7 MYMK-32-Stroke Polyurethane Note) Two types of dust seal bands are available.

REA/REB

4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

VQ5000

metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 C [dm3/(sbar)] 12 12 VQD 4/2 5/3 (A/B EA/EB) 0.14 b 0.14 0.14 2.9 Cv 2.9 2.9 12 C [dm3/(sbar)] 12 12 1 4/2 (P A/B) 0.33 0.33 b 0.33 3.4 3.4 Cv 3.4 2 position rubber seal VQ5 01 1 2 16 16 C [dm3/(sbar)] 16 4/2 5/3 (A/B EA/EB) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

RHC

2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6

RSQ

S CV RSQB-C With cancel cap Dimensions when equipped with cancel cap are the same as the drawing above.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS63S-300656.5 696.5 306 370 6 1 200 180 11-LEJS63S-400756.5 796.5 406 470 8 2 400 80 11-LEJS63S-500856.5 896.5 506 570 8 2 400 180 11-LEJS63S-600956.5 996.5 606 670 10 3 600 80 11-LEJS63S-7001056.5 1096.5 706 770 10 3 600 180 11-LEJS63S-8001156.5 1196.5 806 870 12 4 800 80 11-LEJS63S-9001256.5 1296.5 906 970 12 4 800 180 11-LEJS63S-10001356.5

REA/REB

Speed 600 mm/s Standard Strokes Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) Symbol 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 High Precision Guide Type REBH Order Made

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1/8 1/8 1/4 1/4 1/4 3/8 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56 66 8-25-11 11 Series MGZ With Mounting Bracket Transaxial foot style: (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ LD Y X LH LT LX LY LZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

MTS MY Side support B MY-SB CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable

Series IDG

0.7MPa 20 20 30 30 40 40 50 50 600 0 200 400 800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet

VQ7-6/7-8

Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

MGG

150, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 63 MGGL Ball bush bearing 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 100 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Slider Type Ball Screw Drive/11-LEFS Series

0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !