10

Bore size [mm] B TA TL TU TC TX TE TO TR TT TS TH TF Z TDH10 Bore size [mm] Z MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 32 92 40 96 50 109 63 109 80 134 100 134 125 163 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15

CLS

60 67 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 19 19 19 24 24 29 14 20 20 25 25 30 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 145 136 115 90 90 90 115 115 140 16 58 110 M14 x 1.5 110 190 100 230 Up to 1400 1401 to 1600 3 5 30 46 114 161 78 18 160 110 146 128 212 16 64 110 M14 x 1.5 112 255 Up to 1400 1401 to 1600 130 182 95 23

Cylinder with Lock

E2 TA TC TD TF TH TL TO TR TS TT TU TX TY TZ UW XV Z 32 MB-S03 47 62 62 12 +0.070 0 47 35 45 12 7 10 13 8.5 50 71 74 49 131 153 40 MB-S04 54 80 80 16 +0.070 0 60 45 60 17 9 12 17 10 63 77.5 97 58 150 174 50 66 80 92 16 +0.070 0 60 45 60 17 9 12 17 10 75 91 109 71 166 198 63 MB-S06 77 100 110 20 +0.084 0 80 60 70 20 11 14 22 15 90 103 130 87 179 211 80 99 100 130 20 +0.084 0 80 60 70 20 11

Cylinder with Lock

Bore size B TA TL TU TC TX TZ TO TR TT TS TH TF TY1 TY2 Z TDH10 32 151 40 169 50 187 63 199 80 247 100 266 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 49 71 148 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 58 77.5 166 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 71 91 183 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 87 103 195 20+0.084 0 80 95

Air Cylinder Series MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35 45 45 60 60 75 85 89

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW Width across flats KA LZ PH GB Width across flats B1 MM E RY BF FY D e C B N BN H1 C B RT AL A K FT ZZ + l + Stroke h + l FX FZ S + Stroke M H ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 71 96 1/4 1/4 44 16 32 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 Up to

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

SMC

70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 149 MXS Air slide table 1322Dimensions / MXS25 1322Axial piping (25) MXS25-P 132280.7 Maximum 11.5 35.5 Operating port 2-Rc, G, NPT1/8 40 18 20 Other dimensions are the same

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

D-F6N/D-F6P/D-F6B

Applicable model: D-A73, A73H, A73C, A93, A93V, A53, A54, B53, B54, C73, C73C, E73A, Z73, D-R73, R73C, 97, 93A, A33, A34, A33A, A34A, A44, A44A 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed. 1. Keep wiring as short as possible.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Clean Rodless Cylinder Series CYP

Provides high linearity and high precision. 1 Series CYP How to Order CYP 15 Z73 200 Clean rodless cylinder Cylinder bore size Number of auto switches 15 32 15mm 32mm 2 pcs. 1 pc. n pcs. Nil S n Standard stroke Standard stroke (mm) 100, 150, 200, 250, 300 350, 400, 450, 500, 600, 700 Bore size (mm) Type of auto switch 15, 32 Nil Select auto switches from the table below.

Turntable Cylinder Series MGT

Electrical entry Wiring (output) Special functions 0.5 (Nil) 3 (L) 5 (Z) Applicable load Indicator light Type Electrical entry direction DC AC Vertical Horizontal IC circuit Z76 3 wire 5V Grommet Yes Reed switch Z73 24V 12V 100V Relay PLC 2 wire 5V 12V 100V or less IC circuit Z80 No 3 wire (NPN) IC circuit 3 wire (PNP) Y7PV Y7P Y59A Y69A 5V 12V IC circuit Lead wire indicator symbol

Compact Guide Cylinder End Lock Type SeriesMGP

Without auto switch Bore size 32 40 50 63 32mm 40mm 50mm 63mm Lead wire length (m) Auto switch model Electrical entry direction Type 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line Z76 P P Cylinder stroke mm Reed switch Z73 Refer to the standard stroke table.

Brake mechanism added

, 16 ) Note 2) 90 + 40 (n 4) 2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 15 + 40 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 60 65 70 D-M9V D-M9WV (n 2) 2 10 55 55 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

60 1.

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Pneumatic Transfer System Series MF

From back 2 x 2-M8 x 1.25, thread depth 16 14 56 12 (Max. 35) 94 82 43 (body width) 4 2-M10 x 1.0 Adjustment bolt 78 60 8 90 24 86 85 60 80 15 12 (absorber stroke) 2-RB1412 shock absorber M14 x 1.5 2-Rc(PT) 3/8 Cylinder port 129 Note) 244 + Stroke 7 7 134 2-10 through 12 110 48 43 75.5 11.5 21 87 85 65.5 75 55 SMC Body (Support bracket) (MY-S32A (B)) Note) The dimension can be adjusted to

Slider Type/Ball Bushing Bearing

20 40 0 60 20 40 0 60 80 CY1F Moment (Nm) Moment (Nm) Moment (Nm) Note) Indicates the displacement (rigidity) on the slide table from the position where the reaction force is generated when the torque is applied to the slide table.

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke