Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire length symbols: 0.5 m Nil(Example) Y59B 3 m L (Example) Y59BL 5 m Z (Example) Y59BZ Z76 5 V IC circuit Reed switch Solid state switch Yes 100 V Z73 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less No 5 V, 12 V Z80 IC circuit Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7P 3-wire (PNP) Y59B 2-wire 12 V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Y7NW Diagnostic indication (2-color

CY1

Reed switch Solid state switch Z76 5V IC circuit Yes Grommet 12V 5V, 12V 100V Z73 Relay PLC 2 wire 24V 100V or less No IC circuit Z80 3 wire (NPN) 3 wire (PNP) Y59A Y69A 5V, 12V IC circuit Y7P Y7PV Yes 2 wire Relay PLC 12V 24V Y59B Y69B Grommet Diagnostic indication (2 color indicator) 3 wire (NPN) Y7NW Y7NWV 5V, 12V IC circuit 3 wire (PNP) 2 wire Y7PW Y7PWV 12V Y7BW Y7BWV Note 1)

MB1

switch model Indicator light Wiring (output) Special function Type Electrical entry Electrical entry direction Applicable load 0.5 (Nil) 3 (L) 5 (Z) AC DC Vertical Lateral Z76 3 wire 5V IC circuit Reed switch 24V Yes Grommet Z73 100V Relay PLC 2 wire Z80 No IC circuit 100V or less 5V, 12V Y59A Y69A 3 wire (NPN) IC circuit 5V, 12V Solid state switch Y7P Y7PV 3 wire (PNP) Y59B

Square Tube Type Air Cylinder Series MB1

voltage Auto switch model Indicator light Wiring (output) Special function Type Electrical entry Electrical entry direction Applicable load 0.5 (Nil) 3 (L) 5 (Z) AC DC Vertical Lateral Z76 3 wire 5V IC circuit Reed switch 24V Yes Z73 Grommet 100V Relay PLC 2 wire Z80 No IC circuit 100V or less 5V, 12V Y59A Y69A 3 wire (NPN) IC circuit 5V, 12V Solid state switch Y7P Y7PV 3 wire (PNP) Y59B

REA/REB

wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) CC 2-wire 12 V RB For 25, 32, 40 Lead wire length (m) Load voltage Indicator light J Pre-wire connector Special function Type Electrical entry Wiring (Output) Applicable load AC DC Auto switch model 0.5 (Nil) 3 (L) 5 (Z) D3-wire Z76 5 V IC circuit Yes Yes Grommet (NPN equivalent) 100 V 24 V 12 V Z73 Y59A Y7P Y59B

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Table of Contents

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage Seal material Leakage rate (Water) Note 1) Fluid temperature (C) Ambient temperature (C) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 1 to 60 Note) 20 to 60 NBR (FKM) Note 2) 0.2 cm3/min or less 1 cm3/min or less Note) No freezing External Leakage Seal material Leakage rate (Water) Note 1) VXD23 to 26 (8A to 25A) VXD27

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Air Slide Table

For details, refer to page 126. 46 MXQA Series Dimensions: MXQ 25A [Standard] MXQ 25A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

2/3 Port Valve

Note 4) 32A to 50A are 80oC. q 32A to 50A 15A to 25A Stainless steel FPM/EPR Bonnet w 32A to 50A O ring e Stainless steel, FPM, 15A to 25A Stainless steel, Brass, NBR Stainless steel, EPR Diaphragm assembly r Stainess steel, Brass FPM/EPR 32A to 50A Valve spring Stainless steel t Stainless steel Copper NBR Polyacetal PTFE Class B molded Stainless steel, Silver FPM/EPR, PTFE 15A to 25A

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 10 M G F 63 50 Y59B Number of auto switches 2 pcs. 1 pc. n pcs. 10 Clean series Relief type Nil S n Bore size (mm) Port type Auto switch Type Rc NPT G Bore size Symbol Nil TN TF Z73 Nil Without auto switch Reed switch 40, 63, 100 Solid state Y59A,Y59B The minimum stroke for auto switch mounting and operating range are the same

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Copper, fluorine and silicon-free + low particle generation Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol Nil 21 22 Relief type Vacuum suction type CXSL CXSM,CXSL TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Applicable load Tie-rod mounting Band mounting 0.5 (Nil) 3 (L) 5 (Z) AC DC D3-wire (NPN equivalent) IC circuit Grommet Z76 5 V -X Z73 A54 A33 A34 A44 Reed switch Solid state switch 100 V Relay, PLC PLC 100 V, 200 V 20Yes Yes 12 V Terminal conduit 24 V 2-wire 100 V, 200 V Data DIN terminal Relay, PLC Diagnostic indication (2-color indication) Grommet A59W 3-wire (NPN) Y59A Y7P J51 Y59B

70astamb1

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Pre-wire connector Special function Type Electrical entry Wiring (Output) Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire IC circuit Reed switch Solid state switch Z76 5 V (NPN equivalent) Grommet Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC Y69A Y7PV

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z76 5 V IC circuit Yes Grommet Z73 12 V 100 V Relay PLC 24 V 2-wire No 5 V, 12 V Z80 100 V or less IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7PV Y7P 3-wire (PNP) Y69B 2-wire Y59B 12 V Relay PLC Grommet Yes 24 V Y7NWV 3-wire (NPN) Y7NW IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Y7PWV 3-wire (PNP) Y7PW Y7BWV Y7BW 2-wire 12 V Improved water resistance

5

Without indicator light Reed D-B35 Grommet (In-line) D-A53/A56/Z73/Z76 D-A67/Z80 Without indicator light D-M9NV/M9PV/M9BV D-Y69A/Y69B/Y7PV D-M9NWV/M9PWV/M9BWV Diagnostic indication (2-color indicator) D-Y7NWV/Y7PWV/Y7BWV Grommet (Perpendicular) D-M9NAV/M9PAV/M9BAV Water resistant (2-color indicator) D-P4DW Magnetic field resistant (2-color indicator) D-F59/F5P/J59 Solid state D-Y59A/Y59B

mb1

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Pre-wire connector Special function Type Electrical entry Wiring (Output) Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire IC circuit Reed switch Solid state switch Z76 5 V (NPN equivalent) Grommet Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC Y69A Y7PV

Series 10-MGF Guide table ø40, ø63, ø100

Series 10-MGF Guide table 40, 63, 100 How to Order 10 M G F 63 50 Y59B Number of auto switches 2 pcs. 1 pc. 10 Clean series Relief type Nil S Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Bore size Type Rc NPT G Symbol Nil TN TF 40, 63, 100 Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action