Environment

Work load [kg] Work load [kg] 40 30 Lead 8: LEY32DB Lead 10: LEY32B 30 20 24 19 Lead 16: LEY32DA 20 Lead 20: LEY32A 10 12 9 10 0 200 400 600 800 1000 1400 1200 0 0 200 400 600 800 1000 1200 0 Speed [mm/s] Speed [mm/s] LEY63 (Motor mounting position: Top/Parallel, In-line) 120 Lead 2.86: LEY63L (Top/Parallel type only) 100 Lead 5: LEY63C Work load [kg] 80 Area where the regeneration option

Compact Electric Actuator Series LG1

-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100 1200 1300 1500 50 150 250 350 450 550 650 750 850 1050 70 170 270 370 470 570 670 770 870 1070 Note) Dimensions inside ( ) are for a 100mm stroke. 4 Series LG1H High Rigidity Direct Acting Guide Type LG1H20: Without Coupling / Construction

CG5-S

Double acting single rod Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa Minimum operating pressure 0.05MPa Without auto switch: 10 to 70C, With auto switch: 10 to 60C Ambient and fluid temperature Cushion Rubber bumper, Air cushion 50 to 1000mm/s 20 to 63 Piston speed 80, 100 50 to 700mm/s Thread tolerance JIS class 2 +1.4 0 +1.5 0 +1.4 0 +1.5 0 20 to 63 to 1000 mm, to 1200

CJ5-S

35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 130 201 100 Up to 1500 40 37 41 19 M12 x 1.75 24 60

CJ5-S

35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 130 201 100 Up to 1500 110 40 37 41 19 M12 x 1.75 24

RHC

RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke), even they are available.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost

Thermo-con/Rack Mount Type

1600 1600 Ambient temperature 15C 1400 1400 Cooling capacity [W] Cooling capacity [W] 1200 1200 Ambient temperature 25C Ambient temperature 25C 1000 1000 800 800 600 600 400 400 Ambient temperature 35C 200 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR008-A Circulating fluid: Tap water Circulating fluid: Ethylene

CG5-S

109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 167 63 to 1200 109 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 167 80 to 1400 130 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 201 100 to 1500 110 M12 x 1.75 depth 23 131 40 37 41 19 M12 x

Auto Switch Guide

RZQ Auto Switch Internal Circuit D-Z73 MI W S LED Brown OUT (+) Brown CEP1 Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode CE1 Weight OUT () Blue Blue CE2 (g) D-Z76 Auto switch model D-Z73 D-Z76 D-Z80 ML2B 10 9 7 0.5 DC (+) Brown LED Lead wire length (m) 55 49 31 3 (+) C J G5-S Resistor 50 5 Load Reed switch OUT Black Reverse current prevention diode DC power supply

Auto Switch Guide

C76 Auto Switch Internal Circuit D-Z73 C85 LED Brown OUT (+) Brown C95 Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode CP95 Weight OUT () Blue Blue NCM (g) D-Z76 Auto switch model D-Z73 D-Z76 D-Z80 NCA 10 9 7 0.5 DC (+) Brown LED Lead wire length (m) 55 49 31 3 (+) DResistor 50 5 Load Reed switch OUT Black Reverse current prevention diode DC power supply -X () Dimensions

Auto Switch Guide

Auto Switch Internal Circuit D-Z73 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode Weight OUT () Blue Blue (g) D-Z76 Auto switch model D-Z73 D-Z76 D-Z80 10 9 7 0.5 DC (+) Brown LED Lead wire length (m) 55 49 31 3 (+) Resistor 50 5 Load Reed switch OUT Black Reverse current prevention diode DC power supply () Dimensions DC () Blue D-Z73 D-Z76

Auto Switch Guide

Data Auto Switch Internal Circuit D-Z73 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode Weight OUT () Blue Blue (g) D-Z76 Auto switch model D-Z73 D-Z76 D-Z80 10 9 7 0.5 DC (+) Brown LED Lead wire length (m) 55 49 31 3 (+) Resistor 50 5 Load Reed switch OUT Black Reverse current prevention diode DC power supply () Dimensions DC () Blue D-Z73

Auto Switch Guide

MLGP Auto Switch Internal Circuit D-Z73 RLQ LED Brown OUT (+) Brown MLU Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode ML1C Weight OUT () Blue Blue D(g) D-Z76 Auto switch model D-Z73 D-Z76 D-Z80 -X 10 9 7 0.5 DC (+) Brown LED Lead wire length (m) 55 49 31 3 (+) 20Resistor 50 5 Load Reed switch OUT Black Reverse current prevention diode DC power supply Data () Dimensions

Auto Switch Guide

Data Auto Switch Internal Circuit D-Z73 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode Weight OUT () Blue Blue (g) D-Z76 Auto switch model D-Z73 D-Z76 D-Z80 10 9 7 0.5 DC (+) Brown LED Lead wire length (m) 55 49 31 3 (+) Resistor 50 5 Load Reed switch OUT Black Reverse current prevention diode DC power supply () Dimensions DC () Blue D-Z73

Auto Switch Guide

Data Auto Switch Internal Circuit D-Z73 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode Weight OUT () Blue Blue (g) D-Z76 Auto switch model D-Z73 D-Z76 D-Z80 10 9 7 0.5 DC (+) Brown LED Lead wire length (m) 55 49 31 3 (+) Resistor 50 5 Load Reed switch OUT Black Reverse current prevention diode DC power supply () Dimensions DC () Blue D-Z73

CXS

Dimensions inside ( ) are for D-Z73.

LJ1H

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 250 5.4 3.0 1.0 0.6 0.5 500 3.1 1.9 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

Gun Type Ionizer

900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance

MGG

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.