SMC Corporation of America
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N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

This is a legacy product, and replaced byZH15DLA-N02-N03-N03 ZH VACUUM EJECTOR. VACUUM EJECTOR. VACUUM SERIES. ZH NOZZLE SIZE 1.5. .15873 lb. FD.

Model: 520 (2.0 to 16.0 L/min), Thread Type: N (NPT), Port Size: 03 (3/8), I/O Specifications: A1 (IN1: 1-5 VDC, IN2: External Control Input, OUT1: 1-5 VDC), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: R (with Bracket), Operation Manual: Y (None)

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 0 (Metal Seal), Function: RY (External Pilot, Low Wattage 0.5W), Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 1.5m), Light & Surge Suppressor: E (w/o Light w/Surge Suppressor), Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (Rc3/8)

Body Size: 30, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: RY (R + Y)

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 0 (Metal Seal), Function: RY (External Pilot, Low Wattage 0.5W), Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 1.5m), Light & Surge Suppressor: E (w/o Light w/Surge Suppressor), Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1

Actuation: 2 (2-position Double Metal, Rubber), Seal: 0 (Metal Seal), Function: RY (R + Y), Coil Voltage: 5 (24 VDC), Light/Surge Voltage Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style

Actuation: 3 (3-position Closed Center), Seal: 0 (Metal Seal), Function: RY (R + Y), Coil Voltage: 5 (24 VDC), Light/Surge Voltage Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style

Configuration: 2 (2 Position Double), Sealant: 1 (Rubber Seal), Function: RY (External Pilot, Low Wattage 0.5W), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: B (Locking Slotted Style), 1: 1

;troke RT RY B M FT FX FV FZ faore size rS;'; rang~ f, (mm) w:''';'' I With 40 -::sao lOa 50 _100( rm::lOOi IGA J IK LZ M MM ,n9l" ot A B lOB BN BP BO loc 00 oE GA GB GC GO GL .63 :-;aoo , ..1iinr I -th;~ 27 I 3( 71 160 196 y. y, f44 16 32 IsS 15 26 54 1( X> 35 81 70 loa y, v, ' 52 2( 40 I 95 17 I 27 59 13 10 I M8X .25 6 71 I M41 Xt. 5 12 I M8Xl .25 7 I ao I MlaXt.5 15 IM10XHl I 99 ' 14 I

Stainless steel Body (B) O-ring Carbon steel NBR Vane shaft Stopper seal Special seal NBR Stainless steel Stopper Gasket Special seal NBR Resin Stopper O-ring NBR Stainless steel Stopper O-ring NBR Bearing High carbon chrome bearing steel O-ring Double vane only NBR Back-up ring Stainless steel Parallel keyway White Size 40 only Carbon steel Cover Aluminum alloy For size 40, material for no. ry

I ry M9N IC ,0 . I )wi,. (NPN) ~e~ I. 24V , . 12 V _ M9P Grommet M9B 2wire 'IOOV.2roV J51 1, 12 V ;Terminal 1 3-wire (NPN) G39 11 ,ICc",,"" 12 V K39 11 R,'ay. _ii~t---= -+-; ~ i~ :: -; :.~':+-7--+-: -'~ ~" . PLC 5V, 1 2V ;.c-_~ c~ on ~ d = "~ iI ~.. 2wire . ~ ,<, Diagnostic indication I l ' (2-oolorondicahonl lYe' 13wir. (NPN) 1 5' . 12 V L3w" .

Stainless steel Body (B) O-ring Carbon steel NBR Vane shaft Stopper seal Special seal NBR Stainless steel Stopper Gasket Special seal Resin NBR Stopper O-ring NBR Stainless steel Stopper O-ring NBR Bearing High carbon chrome bearing steel O-ring Double vane only NBR Back-up ring Stainless steel Parallel keyway White Size 40 only Carbon steel Cover Aluminum alloy For size 40, material for no. ry

Stainless steel Body (B) O-ring Carbon steel NBR Vane shaft Stopper seal Special seal NBR Stainless steel Stopper Gasket Special seal Resin NBR Stopper O-ring NBR Stainless steel Stopper O-ring NBR Bearing High carbon chrome bearing steel O-ring Double vane only NBR Back-up ring Stainless steel Parallel keyway White Size 40 only Carbon steel Cover Aluminum alloy For size 40, material for no. ry

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: RY (R + Y)

Pl ease not e t hat t he ri ght angl ed cabl e connect or does not rot at e and i s l i m i t ed t o onl y one ent ry di rect i on. 4 W i ri ng m et hod CAU TI O N Proceed caref ul l y, as i ncorrect w i ri ng can cause dam age. U se D C pow er suppl y w i t h suf f i ci ent capaci t y and a l ow ri ppl e. Turn of f t he pow er suppl y t o rem ove and i nsert t he connect or.

Pl ease not e t hat t he ri ght angl ed cabl e connect or does not rot at e and i s l i m i t ed t o onl y one ent ry di rect i on. 4 W i ri ng m et hod CAU TI O N Proceed caref ul l y, as i ncorrect w i ri ng can cause dam age. U se D C pow er suppl y w i t h suf f i ci ent capaci t y and a l ow ri ppl e. Turn of f t he pow er suppl y t o rem ove and i nsert t he connect or.

Size: 30, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: B (Bracket), Specifications: RY (R+Y), Pressure Unit: ZA (Digital Pressure Switch: w/Unit Coversion Function)

Size: 30, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BE1 (B+E1), Specifications: RY (R+Y), Pressure Unit: ZA (Digital Pressure Switch: w/Unit Coversion Function)

Size: 30, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Accessory: E (Square Embedded Pressure Gauge w/Limit Indicator), Specifications: RY (R+Y), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)