100

0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value) *1 Silencer exhaust specification The graph shows the

PFxx-OMJ0005CN

8 Ar 90CO2 10 1 Ar 80CO2 20 Ar 70CO2 30 Ar 60CO2 40 2 1[8.2] 2[oFF][F_3] <> [F97] [F97] -75No.PF-OMJ0005CN-I Ar CO2 Vmax lmax 92% 8% 90% 10% PFM710 80% 20% 0.27.0 L/min 0.27.4 L/min 07.4 L/min 3.80 V 15.2 mA 70% 30% 60% 40% 92% 8% 0.525.0 L/min 0.526.3 L/min 026.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.520.0 L/min 0.521.0 L/min 021.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.050.0

Type: General-Purpose/Standard Pressure Gauge, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 37.5, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/8, Option: None, Size: 37.5, Transparent cover material: Polycarbonate, Special Configurations: None, Unit Specifications: MPa

Type: General-Purpose/Standard Pressure Gauge, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 37.5, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/8, Option: With M5 (female thread), Size: 37.5, Transparent cover material: Polycarbonate, Special Configurations: None, Unit Specifications: MPa

IR1000/2000/3000

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

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Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

NARM Series

-P10-N01 Blanking plate kit 136114A 136214A (plate, screws, and o-ring) Manifold base, 13612-*-N 13622-*-N Common IN (A1, A2) Manifold base, 13613-*-N 13623-*-N Individual IN (B1, B2) * Denotes number of stations: 2~10 available. 10 10 station NARM2000-4B2 Note1) In case of A1 and B1, a pressure gauge or a plug is mounted at the body side, while in case of A2 and B2, at the manifold side.

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Pressure Gauge: ø37.5 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, 150PSI, Connection Thread: 1/8 NPT, Option: Nickel Plated

Pressure Gauge: ø37.5 Outside Diameter, Back Side Thread, Display Pressure: 0.2MPa, 30PSI, Connection Thread: 1/8 NPT, Option: Nickel Plated

Pressure Gauge: ø37.5 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: 1/8 NPT, Option: Nickel Plated

Size: 36 (37.5 O.D.), Display Pressure: 2 (0.2MPa), Connection Thread: N01 (NPT 1/8)

Size: 36 (37.5 O.D.), Display Pressure: 4 (0.4MPa), Connection Thread: N01 (NPT 1/8)

Pressure Gauge: ø37.5 Outside Diameter, Back Side Thread, Display Pressure: 0.2MPa, 30PSI, Connection Thread: 1/8 NPT, Option: X4 [Oil-free (Wetted Parts Degrease Washing)

Pressure Gauge: ø37.5 Outside Diameter, Back Side Thread, Display Pressure: 0.7 MPa, 100PSI, Connection Thread: 1/8 NPT, Option: Both MPa and PSI

Pressure Gauge: ø37.5 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, 150PSI, Connection Thread: 1/8 NPT, Option: Both MPa and PSI

Pressure Gauge: ø37.5 Outside Diameter, Back Side Thread, Display Pressure: 0.2MPa, 30PSI, Connection Thread: 1/8 NPT, Option: Both MPa and PSI

Pressure Gauge: ø37.5 Outside Diameter, Back Side Thread, Display Pressure: 0.4 MPa, 60PSI, Connection Thread: 1/8 NPT, Option: Both MPa and PSI

Size: 37.5 O.D., Display Pressure: 0.2MPa, Connection Thread: NPT 1/8, Clear Cover Material: -, Attachment: -, Option: -