Display Pressure: 0.4MPa, Connection Thread: R 1/8, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/8, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/4, Attachment: Clear Cover Removable, Wrench Tighten

Table of Contents

+ PA &) Connection # % 7 7 # 7 7 # 7 7 # & 0 0 PAX PB (VXFC10) Operation sequence diagram & & % 7 17-3-79 10 The VX series will be revised shortly. Series VXF Precautions Be sure to read before handling.

Electric Actuator/Slider Type

0 #3 @3 @6 @7 @9 @4 #8 o t @0 @2 !6 !5 w r e #7!3!4 !7 #1 !8 #0 @5 @1 @8 !9 #6 #5 #2 Motor details Component Parts No. Description Material Note No.

1

Note 7 NCA Non-rotating rod type Lateral load resisting type r, !1, !6, !7, !8, !9, @0, @1, @2, @3, @6, @9, #0, #1, #3, #4, #5, #6, #7 20, 25, 32, 40, 50 !9 is type L only. -XC6A r, !0, !5, !6, !7, !8, !9, @0, @1, @3, @4, @7, @8, @9, #1, #2, #3, #4, #5, #9, $0 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. Dr, !1, !

Air Fittings & Tubing

L B D E F 6.5 8.5 2.1 4.0 2.5 3.7 MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 Hose elbow: MS-5HLH-4, -6 lB Effective area (mm2) Weight (g) Part No.

HRX-OM-W002

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

Electric Actuators

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

CXS

D-F9PW D-F9NWV D-F9NW Main circuit of switch OUT Black [White] 7 7 7 Lead wire length: 0.5m 7 7 7 32 32 34 Lead wire length: 3m 34 34 34 DC() Blue [Black] Dimensions D-F9PW(V) D-F9NW, D-F9PW, D-F9BW DC(+) Brown [Red] M2.5 x 4 Slotted set screw Main circuit of switch Main circuit of switch Indicator light 2 2.7 OUT Black [White] DC() Blue [Black] 22 2.8 2.6 4 D-F9BW(V) Most sensitive position

SMC Basic Pneumatics

I 2 1 ../ p : (bar) lq 7. 5. 7 7-, 15{)00 -t-.-71--Z -_ 500 400 300 ?

%silltr

I 2 1 ../ p : (bar) lq 7. 5. 7 7-, 15{)00 -t-.-71--Z -_ 500 400 300 ?

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B 2.2 J X C *3 I/O 1) I/O 1 1.5m 2 1.5m DIN 7 NPN 3 3m 8 PNP 4 3m DIN 4 5 5m 6 5m DIN 7 8 DIN 1)I/O (1.5m~5m) I/O 2 LEY Series LEYG Series LEF Series LES/LESH Series 2) LER Series LEPY/LEPS Series 2 3 LEH Series 2) 360 8 No.SFOD-OMT0009CN-B 2.3 1) PLC I/O 2) :JXC-C2-* DC24V 1) I/O ENC : LE-CP-*-* LE-CP-*-*-S USB MOT JXC-W1-1 CI 2) ()

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

Rotary Actuator/Vane Type

) 7 to 20 10-(20-X) to (X-1.5) 30 10 to 22 12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.

Vacuum Unit

stations Release valve 9 10 5 stations Release valve 18 Supply valve Supply valve 6 11 12 6 stations Release valve 6 stations 19 Release valve 7 Supply valve 13 14 Supply valve 20 7 stations Release valve 7 stations Release valve 8 15 16 Supply valve Supply valve 21 8 stations Release valve 9 8 stations Release valve 17 18 22 Supply valve Supply valve 10 19 20 9 stations Release valve 9 stations

Slider Type Ball Screw Drive/11-LEFS Series

1050 11-LEFS40ll-1000l 1414.5 1444.5 1006 1178 16 7 1050 526

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification . 4 1.1 LECS series driver . 4 1.1.1 How to order . 4 1.1.2 Specification . 4 1.2 LECY series driver . 7 1.2.1 How to order . 7 1.2.2 Specification . 8 1.3 Construction . 9 2.