PFxx-OMK0003CN

PF-OMK0003CN-E A 1L(2) L () M315L L () / ZS-36-A1 1 L (2 ) (M315 L)2 ZS-36-A2 2 L (2 ) (M325 L)2 ZS-36-A3 3 L (2 ) (M335 L)2 ZS-36-A4 4 L (2 ) (M345 L)2 ZS-36-A5 5 L (2 ) (M355 L)2 -11No. PF-OMK0003CN-E DIN -12No. PF-OMK0003CN-E F 15[V]F.S.=5-1=4[V] (1%F.S.=40.01=0.04[V]) F.S. (full spanfull-scale) 90 -13No. PF-OMK0003CN-E 3%F.S.

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

C95Series

Bore si~e ~ Standard stroke (mm) .

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

CS1

Eliminate the unnecessary parts. 1.10-13 Series CS1 Front Flange/CS1F Lube (CS1F), Non-lube (CS1FN), AIr-hydro (CS1FH) Long stroke With auto switch/CDS1F (mm) Stroke range (mm) W/o rod boot With rod boot Style Bore (mm) J FT FX FD S AL B E F FA KA M MM H A D EA FY FZ G K N P B C h ZZ e f l ZZ1 125 140 160 180 200 250 300 115 1/2 M30 X 1.5 145 75 40 145 190 100 230 M14 X 1.5 110 238 133 261

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F = degrees Fahrenheit S = SeCOndS NUmin = Normal liters per mlnute World Wide QS\E Support...

Air Cylinder CLA Series Fine Lock Model

Vertical downward mounting (use Spring lock-up) ON OFF Locking ON Extend up E E OFF Lockinq As compared wilh Diagram 3, this circuit employs 5-port instead A and s-port 3 position solenoid valve (pressure center) instead of Sol As compared with Diagram 2, this circuit employs 3-port 2 position solenoid valve inslead of s-port 3 position solenoid valve leaving the others unchanged.

CEx-OMG0106

Allowable Kinetic Energy E max=0.43 (J) V=Vax1.4=350x1.4=490mm/s W 30 xV2= x0.492=0.36 (J) Ev= 2g 2x9.8 Load Rate a5= E = 0.36 =0.84 Emax 0.43 3. Examination of Load Rate a = 0.84 1 OK With above allowable value, there is no problem on the selection.

Cylinder with Lock Series MNB

1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

3r#0q u @9#2 e y!6#1@8t!2w#3!5 !7 !8 @1 @6 14A !9 @0 CJ1 CJP @7 i o CJ2 80, 100 CM2 C85 !0 !1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

LEC-T1_C

L E C T 1 3 J G S 1 S 1 2 J 2 E 2 3m 1 6.43 2 6.3 9 TB 12 - 3. 3.1 (1) TB Ver.5.11 TB Ver2.1LECPA No.0 1 LECPA TB Ver2.1LECPA No. 1 ) TB Ver1.** TB Ver2.**/ / (2)Tree TB Ver.5.11 MENU Data No. 2 Data Monitor JOG Test Alarm Setting Ver1.** Ver2.** 12 TB Ver2.1*LECPANo.0 Monitor No. 2 JOG Test 1 LECPATB Ver2.1*LECPA Alarm Setting Ver1.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

6ui e!5 CJ1 CJP CJ2 CM2 C85 !

Cooling Capacity: 006 (510 W), Type: Standard, Power Supply: A5 (100 to 240 VAC), Pipe Thread: N (NPT), Feet: E (w/Feet and No Rack Mounting Brackets)

Cooling Capacity: 510 W, Power Supply: 100 to 240 VAC, Pipe Thread: NPT, Feet: w/Feet and No Rack Mounting Brackets, Flow switch: -, High-pressure pump: -

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Connector Type: S (M12 connector type), Bracket: A5 (Bracket E for M12 Connector Type), Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT 1/8), Connector Type: S (M12 connector type), Bracket: A5 (Bracket E for M12 Connector Type)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT 1/8), Connector Type: S (M12 connector type), Bracket: A5 (Bracket E for M12 Connector Type), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)