V100

Note) When placing an order for body ported solenoid valve as a single unit, mounting bolt for manifold and gasket are not attached. Order them separately, if necessary. (For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500

Table of Contents

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Battery-less

5 r t w q y !6 !

Table of Contents

160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMH250 1 2 3 8 1 2 , AMH350 3 4 1 2 3 4 , AMH450 1 1 1 1 AMH550 AMH650 3 4 1 2 , , 14-20-34 6 Micro Mist Separator with Prefilter Series AMH AMH850 Dimensions Accessory D: With auto-drain (N.O.) for AMD850 female thread Option T: With element service indicator Courtesy of Steven Engineering

smcmaintenancepartslist

6 Single acting, spring extend Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS Gasket Set of left nos. !4, !5, !6. Replacement Parts: Seal Kit Kit no.

Table of Contents

Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

15

Lead 20: LEYG32A 30 30 20 20 0 0 0 200 600 1000 1400 1200 Speed [mm/s] 0 200 600 1000 1400 Speed [mm/s] 866 A Model Selection LEYG Series Motorless Type * These graphs show an example of when the standard motor is mounted.

ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

size A B C D E F I J K L M Grommet Grommet with PCB T U T U 50 3/4 110.6 29 36 71 18 4.5 17 51 32.5 38.5 35 51.9 28.5 57.6 38 60 1 131 33 42 95 21 4.5 20 59.5 45.5 49.5 42 60.4 31.1 66 41 Specific Product Precautions Size Port size Conduit DIN terminal DIN terminal without connector M12 connector Bracket mount dimensions T U T U V T U T U a b d e f 50 3/4 59.2 48.9 60.7 55.3 67 60.7 31.3

Compact 5-Port Solenoid Valve

Input block stations (Sm) Refer to page 77. 21 For 20 output points(T) For 18 output points (PG/PGC) Symbol Stations Note 02 2 stations Double wiring1 Symbol Stations Note 02 2 stations Double wiring1 26 pins PGC 20 pins PHC 10 pins TC Spring type terminal block box 43 T Terminal block box L1 Lead wire 34 cores 55 L2 17 cores L3 9 cores S6m 09 9 stations 02 2 stations Specified layout2

HRX-OM-W002

(High pump head Rated current of leak voltage x size [Optional]) current (A) [mA] HRR012-A/W-101-phase AC100V (50/60Hz) 15 30 1-phase HRR018-A/W-10AC115V (60Hz) HRR012-A/W-2010 30 HRR018-A/W-203 cores x 14AWG HRR024-A/W-20(3 cores x HRR030-A/W-20HRR012-A/W-20-T 2.0mm2) 1-phase HRR018-A/W-20-T HRR024-A/W-20-T HRR030-A/W-20-T (including 200-230V AC ground) (50/60Hz) 15 30 HRR012-A/W-20-T1 HRR018

Free Mount Cylinder

S T S T S T S T S T C(D)UK6C(D)UK10C(D)UK16C(D)UK20C(D)UK25C(D)UK32For the auto switch weight, refer to page 68 to 72.

Proposals for Energy Saving

Bore size 10 10mm 16 16mm 20 20mm 25 25mm 32 32mm For detailed specifications of an auto switch unit, refer to page 3.9-5 of "Best Pneumatics No. 3."

Made to Order

63 80 100 46.5 10 4.5 T 51.5 10 5 54 10 7 61 17 28 F 67.5 18 35 5 L 73 18 35 L Bore size 20, 25 A + Stroke 83.5 20 43 A + Stroke 98 22 59 Please contact SMC for bore size 20 to 32 with both ends tapped and mounting brackets.

SMC Basic Pneumatics

as an exhaust flow Fig. 5.6 Relieving Function I Path. 4 2 P N E U M A T I c T E C H I t o L o G Y Wilh vry high llow rates the valve is wide open.

%silltr

as an exhaust flow Fig. 5.6 Relieving Function I Path. 4 2 P N E U M A T I c T E C H I t o L o G Y Wilh vry high llow rates the valve is wide open.

AC

T Type Interface: (T) M5 X 0.8, 1/8, 1/4, 3/8, 1/2 Makes it easy to diverge air out with T type interface.

Hydraulic

160 42 9 174 174 140 45 100 38 17 36 22 M16 x 2 28 34 38 M33 x 2 40 3/4 43 20 205 140 240 108 (mm) Bore size (mm) ZZ R S T V W 40 246 37 114 11 7.5 8 50 262 43 116 11 10 9 63 280 47 120 11 12 10 80 312 57 132 11 16 13 100 340 66 140 12 20 16 125 340 77 140 12 20 16 160 375 94 159 12 24 20 110 Series CHAW Dimensions Center trunnion type: CHAWT ZZ + 1/2 stroke 2-Rc P T T 4-J Cushion adjustment