MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

7 t CY3R15/20 CY3R15 Component Parts No. Description No.

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

Smooth Cylinder/Low Speed Cylinder

D C Clevis Pin (For CM2E) H B (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no. SN-020B SN-032B SN-040B Material: Carbon steel 26 30 25.5 M20 x 1.5 8 Dd9 d 32 37 31.5 M26 x 1.5 8 41 47.3 40.5 M32 x 2.0 10 m m t t L L1 (mm) Trunnion Nut Applicable bore size (mm) 20, 25 32, 40 Applicable retaining ring part no. Dd9 d L L1 m t Part no.

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 19 Not included for Option Z (Removed parts) 20 Not included for Options Z and Z1 (Removed parts) 15 Thermo-chiller/Rack Mount Type HRR Series Specifications: 200 to 230 VAC Water-cooled Refrigeration Model HRR012-W-20 HRR018-W-20 HRR024-W-20 HRR030-W-20 Cooling method Water-cooled refrigeration Refrigerant R410A

REA/REB

Note 2) 15 has internal magnets in the body. 10-2-20 20 Sine Rodless Cylinder Basic Type Series REAR Construction: 20 to 40 @3 q @1 y u e t r @2 !1 !2 i o !3 @0 !8 !4 @5 RE A B REC CX CY MQQ M !5 @8 @9 !9 #0 @6 !0 @4 w @7 !7 !6 RHC MK(2) Component Parts Material No. Description No.

REA/REB

/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm)

SQ1000/2000

COM COM 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM 25 26 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM T kit Terminal block (SQ2000 only) J kit Flat ribbon cable connector

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

Vacuum

Rolled steel WCS4 x 0.7 WCSs x 0.8 WCSG x 1 WCSS x 1 WCS10 x 1 20+Slroke s16-a32 ) 26 1 4 M4 x O.7 5 M5 x 0.8 6 1 8 4 12 40 1 9 . 5 7.6 Depth 12.5 1 5 . 5 85.5 29 1 6 M4 xO.7 M 6 x 1 O 8 20 5.5 9 t o 46 9.5 Deplh 8 13.5 19.5 96 ) 20 M5 x 0.8 A M8 x 1.25 10 28 5.5 9 20 50 9.5 Deplh I 1 9 24.5 104 42 24 N,l5 x 0.8 1 0 [,110x 1.25 32 6.6 13.5 24 52 1'l Depth 1 1 . 5 21 30.5 I t o ' shorrer DdRle

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Vacuum

Rolled steel WCS4 x 0.7 WCSs x 0.8 WCSG x 1 WCSS x 1 WCS10 x 1 20+Slroke s16-a32 26 1 4 M4 x O.7 5 M5 x 0.8 6 1 8 4 12 40 1 9 . 5 7.6 Depth 12.5 1 5 . 5 85.5 29 1 6 M4 xO.7 M 6 x 1 O 8 20 5.5 9 t o 46 9.5 Deplh 8 13.5 19.5 96 20 M5 x 0.8 A M8 x 1.25 10 28 5.5 9 20 50 9.5 Deplh I 1 9 24.5 104 42 24 N,l5 x 0.8 1 0 [,110x 1.25 32 6.6 13.5 24 52 1'l Depth 1 1 . 5 21 30.5 I t o ' shorrer DdRle

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

Table of Contents

Unit Series AC10 to 60 Dimensions Pressure gauge port size AC10/20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) F.R.L.

7

Grommet Port size P A B C E F I J K L D M T T T 55 (61) 126.5 (134.5) 74.5 (82.5) 82.5 (90.5) 69 (77) U 68.5 (74.5) U V U 107.5 (113.5) 29 60.5 (66.5) 5 C VXD2 3/4 27 64.5 52.5 30 30 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 1 29.5 67 55 32.5 33 35 95 22 4.5 20 59.5 45.5 49.5 42 Model Mounting bracket dimensions Port size P a b d e f 3/4 1 50.5 55.5 77.5 85.5 74 81 51 58 45.5 49.5 VXD2 VXD2

5

Applicable bore size B C D d H SN-020B 20 26 30 25.5 M20 x 1.5 8 Material: Carbon steel Dd9 d SN-032B 25, 32 32 37 31.5 M26 x 1.5 8 SN-040B 40 41 47.3 40.5 M32 x 2.0 10 m m t t L1 L2 (mm) Trunnion Nut Part no.

CJ2

Bore size (mm) 10 16 Z 93 S 65 WW 4.5 WB 13.5 WA 14.5 NB 20 NA 21 GB 6.5 GA 7.5 FB 14.5 C 17 B 15 94 66 5.5 13.5 14.5 20 21 6.5 7.5 19 20 18.3 6-3-9 10 10 Series CJ2 Double Clevis Style (D) CJ2D Bore size Stroke Z + Stroke S + Stroke +0.030 0 Rod end nut CDH9 Clevis pin (cdd9 ) Piping port 2-M5 x 0.8 0.030 0.060 T-bracket For details, refer to page 6-3-11.

Table of Contents

Applicable shaft type: K Applicable shaft types: J, K, T (mm) X L3 max W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = 10 10 0.5 to 2 4.5 to 14 0.5 to 2 Y 1 L2 1 6.5 to 14 L1-1 X 3 L4 = 15 15 0.5 to 2.5 Y = 5.5 to 18 0.5 to 2.5 Y 1.5 L2 1 8 to 18 L1-1 X 4 L2 = 20 20 6 to 20 0.5 to 3 0.5 to 3 Y 1.5 L2 1 9 to 20 L1-1 X 4.5 X = 8.5 to 22

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: K Applicable shaft types: J, K, T (mm) X L3 max W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = 10 10 0.5 to 2 4.5 to 14 0.5 to 2 Y 1 L2 1 6.5 to 14 L1-1 X 3 L4 = 15 15 0.5 to 2.5 Y = 5.5 to 18 0.5 to 2.5 Y 1.5 L2 1 8 to 18 L1-1 X 4 L2 = 20 20 6 to 20 0.5 to 3 0.5 to 3 Y 1.5 L2 1 9 to 20 L1-1 X 4.5 X = 8.5 to 22