AMP

CAT.ES13-7 A Exhaust Cleaner for Clean Rooms Series AMP An exhaust cleaner that can be used inside a clean room. Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the operating conditions.)

3M/SMseries

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

AMPSeries

When selecting an exhaust cleaner, refer to the selection method shown below, as the selection method will differ for exhaust from actuator drive systems, etc., and exhaust from ejectors, etc.

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TYPe d beains 3 tandard s 'qo ' okd ( fYnI ro r r 2.9r 2 3 . 40' I lo , ?

CDQ2BP series

JIS cass 2 Standad @w $enhs C[028 Distance From Auto Switch Side Face e1 ili-l ffi 7T\ '1 (f|/ l r : 1 1 Distance From Auto Switch Top Face : t l . : : : : : : : . . 9 ^ ^ .9 o t2 ,r,rl fl^l rtu 1 0 : : : : : : : : : , : : azw, 7 Sg|'ies C[028P flislr ilrulrtric rierd Rt$i$h Through Hole Mount:CDQ2BPtrnDM-n I Note Eemale lhredd and rod drmensrons are the same as for clevis and head llange

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

ISO Interface

C (F) note 2 -5~+50 (+23~+122) -20~+60 (-4~+140) Max.

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|\,4ili srze d32.64. d6. d8 lnch size 6'i 6r-,6'r lrregular shape ensures Copper-lree applications Tubs of dilterent srzes can be used Two types are available, 10 or 20 connectors. Rectanoular Multi-Connector Series KDM Parts No.

Cooling Capacity: 030 [Cooling Capacity: 2500/2900 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: BV (B + V)

Cooling Capacity: 030 [Cooling Capacity: 2500/2900 W (50/60 Hz)], Pipe Thread: NPT with PT-NPT Conversion Fitting Set, Option: B + V

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: None

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: NPT with PT-NPT Conversion Fitting Set, Option: None

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

Description Material 20 PDU-8Z 25 PDU-10Z 32 PDU-12LZ 40 PDU-14LZ !

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Note 2) Impact resistance: No malfunction resulted during an impact test using a drop impact tester. The test was performed one time each in the axial and right angle directions of the main valve and armature for both energized and deenergized conditions. Vibration resistance: No malfunction resulted during an one-sweep test between 8.3 and 2000Hz.

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Note 2) Impact resistance: No malfunction resulted during an impact test using a drop impact tester. The test was performed one time each in the axial and right angle directions of the main valve and armature for both energized and deenergized conditions. Vibration resistance: No malfunction resulted during an one-sweep test between 8.3 and 2000Hz.

NAIV

2 M4f.7 optr-8 1.57 (40) 276 o0) 0.13 (x2l 0.79 (m) 0.79 \20) 6.95 076.5) 'Remove drain cock to obtain 1/4 pipe lhread (220 only) Typical Applications r t l -i-E-:I I I ; | | | ' \t/ H World Wide ?gtC Support... United States Branch Offices Europe ENGLAND SMC Pneumatics (U.K.)

LEC-OM02704CN

3() PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6 .10 7.7 .14 7.7.1 JOG .14 7.7.2 .17 7.7.3 .19 7.7.4 (DO) .20 7.7.5 1 .22 7.8 .24 7.8.1 .24 7.8.2 .25

LEC-OM02904

DC24V 2. 20 3. 4. 5. 6. 7. 8.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

In Japan, according to METI, pipe thread (Rc, R, NPT etc) should not be used as connections of piping, ttings, and valves installed in gas systems.

AKH/AKB Series

Inch Size R, NPT> Applicable tube O.D.