KQ2

Bulkhead Male Elbow: KQ2LE Model H1 (width across flats) KQ2LE04-00 H2 (width across flats) 14 17 Applicable Effective area (mm2) Nylon Urethane Applicable tubing Note) Mounting T (M) Mass (g) B E D M tubing O.D.

SI Unit for Vacuum Manifold

Hysteresis H2 10988 10P2-P1 10P2-P1 100 Setpoint P1 11989 H1+1P2-H2 H1+1P2-H2 600 Hysteresis H1 10988 10P1-1 10P1-1 50 Setpoint P3 312000 H3+12000 H3+11000 40 Hysteresis H3 101999 10P3-1 10P3-1 10 Caution The Pressure parameters should be set so that each value meets the above conditions. The condition of P3 differs depending on the Pressure range parameter. -20No.EX-OMY0014-A 4.1.6.

Precautions 1

(mm) HX H2 Q H1 NN F H MM ZZ QY I K N NA S AL D A B2 B1 Eh8 Bore size (mm) 20 25 32 40 Stroke range 0 0.033 20 8 5 13 41 116 14 28 5 15 24 62 8 18 26 Up to 300 13 19.8 65.3 15.5 M8 x 1.25 M20 x 1.5 0 0.033 26 8 6 13 45 120 14 5.5 15 30 62 22 10 22 32 Up to 300 17 70.5 33.5 19.5 M26 x 1.5 M10 x 1.25 0 0.033 26 8 6 13 45 122 16 5.5 15 64 12 22 32 Up to 300 17 76.5 37.5 25.8 34.5 19.5 M26 x

Battery-less

10 2 x 5 14.5 0.2 0.2 24 +0.033 0 26H8 ( ) 114.2 3 3 127 133 240 (Motor cable entry: Basic type) 230 (Motor cable entry: Entry on the left side) Dimensions [mm] 5H8 ( ) depth 5.5 24 Model H1 H2 H3 LER50 16 5.5 15.5 LERH50 26 15.5 25.5 +0.018 0 2 x M10 x 1.5 x 20 2 30 163 Controllers JXCm Series For details, refer to page 182 and onwards.

CL

Style (B) CLM2B Bore size Stroke Basic style Rc BP locking port for pressurizing (Plug cap with breathing port at spring lock) Rc BP unlocking port Unlocked when pressurized Rod side cylinder port Rc P Manual unlocking cam Lock nut Width across flats B2 Width across flats B1 Head side cylinder port Rc P S + Stroke ZZ + Stroke Boss-cut With rod boot e ZZ + Stroke 9 9 l f h A BP D E BZ GA H2

CL

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S + Stroke ZZ + Stroke Boss-cut With rod boot e ZZ + Stroke 9 9 l f h A BP D E BZ GA H2 I H1 AL B2 B1 BN BC F BQ 1/8 1/8 1/8 1/8 GC GB GK GD GQ GL H GR Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/8 8 20 20 8 80 18 55 13 26 5

LEC-OM038xx

CN Cables, PLC and power supply are prepared by 5. 3 CN1: CONT connector Connect the gateway unit and the controller (LEC) to communication cable (LEC-CG-). Gateway Controller input power supply 24V DC unit CN Terminating Resistor (120 1/4W) CN4 CN4 CN4 Controller (LEC) Controller (LEC) Controller (LEC) 21 - * Refer to section 8.

LEC-OM036xx

Gateway Unit Power supply DC24V Power supply line CN Cables, PLC and power supply are prepared by customer) * Refer to 6. CN4: Power supply connector 5. 2 CN3: Bus connector Connect the DeviceNetTM line and the controller (LEC) with the communication cable (LEC-CG-) Gateway Unit PLC DeviceNetTM line. CN Cables, PLC and power supply are prepared by customer) * Refer to 7.

LEC-OM034xx

Gateway Unit Power supply 24 VDC Power supply line CN Cables, PLC and power supply are prepared by customer) * Refer to 6. CN4: Power supply connector 5. 2 CN3: Bus connector Connect the Profibus line and the controller (LEC) with the communication cable (LEC-CG-) Gateway Unit PLC Profibus line. CN Cables, PLC and power supply are prepared by customer) * Refer to 7.

LEC-OM032xx

HUB CN Cables, PLC and power supply are prepared by 5. 3 CN1: CONT connector Connect the gateway unit and the controller (LEC) to communication cable (LEC-CG-). Gateway Controller input power supply 24 VDC unit CN Terminating Resistor (120 1/4W) CN4 CN4 CN4 Controller (LEC) Controller (LEC) Controller (LEC) 21 - * Refer to section 7.

Air Slide Table Series MXJ

(Not plugged in the case of the clean series) 17 12 5 37 43 3 +0.03 0 depth 1.5 11 17 17 A D14 -X 3 2.5 2.5 3.5 A 4.8 Individual -X 3 +0.05 0 depth 1.5 4 x M3 x 0.5 A-A 177 Series MXJ Dimensions With stroke adjuster With adjuster on both ends MXJ4-CN With adjuster on extension end MXJ4-CSN 8 End plate 0.5 Note) Width across flats 4.5 Max. 6.5 3 With adjuster on retraction end MXJ4-CTN 4 8

SMC Electronic Switch Series Variations

ISA Plug (without lead wire) CN ZSE1 ISE1 Output specifications ZSE2 ISE2 14 NPN Open Collector 1 output w/o analog output, 3 revolution adjustment With Connector/How to Order 15 NPN Open Collector 1 output w/o analog output, 200 revolution adjustment ZSP IWithout lead wire (Connector 1 pc., Socket 4 pcs.)

Ejector Valve Unit Series ZYY/ZYX 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Y3 SY3000 Rated voltage DC specifications 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Wiring specifications (Vacuum switch) Lead wire length 0.6 m Nil L C CL CN Grommet type AC specifications (50/60 Hz) Lead wire length 3 m 1 2 3 4 100 VAC 200 VAC 110 VAC

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Ejector Valve Unit, Series ZYY/ZYX

. + vacuum ejector) Series ZYX3000 Series ZYY3000 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Connector box type LOU Lead wire/Voltage suppressor specification L Z 5 LOU 10 Y3 ZY S 15 Wiring specifications (Vacuum switch) Lead wire length 0.6m Lead wire length 3m Lead wire length 0.6m Lead wire length 3m Connector type Nil L C CL CN Grommet type Series Y3 SY3000

Ejector Valve Unit Series ZYY/ZYX

ZYY3000 (Solenoid valve: SY3000) HEP Related Equipment 1081 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Lead wire/ Voltage suppressor specifications Connector box type LOU L Z 5 LOU 10 Y3 ZY S 15 Series Y3 SY3000 Rated voltage DC specifications 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Wiring specifications (Vacuum switch) Lead wire length 0.6 m Nil L C CL CN

PFxx-OMJ0005CN

) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -

CL

to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 64.5 83.5 0.033 0 0.033 0 0.033 26 64.5 70 83.5 100.5 90.5 32 Boss cut (mm) MM Bore 20 25 32 40 N 15 15 15 NA 24 30 S 127 137 139 167 Bore ZZ 168 182 184 217 H1 5 6 6 8 K 5 5.5 5.5 7 PL 20 24 24 24 PW 38 41 41 41 I 28 H 41 45 45 50 PH 19.5 24 24 24 ZZ 181 195 197 233 P Z 37 41 41 45 GR 4 7 7 7 PG 22 27 27 29 GQ 4 7 7 8 GL 6 9 9 11 NN H2

CLQ

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

Compact Cylinder with Lock Series CLQ

L1 X C1 H2 Rod end nut Dimensions for cylinders with a rubber bumper are the same as the standard type above.