Slide Tables MX Series

In case slide table is stopped at intermediate position by external stopper then forwarded to the front, after slide table is returned to the back for just a moment to retract the stopper, supply pressure to the opposite port to operate slide table. 3.Do not apply excessive force and impact. l l l Bolt used Max. tightening torque Nm(kgf/cm) Max. screw-in depth l (mm) Type 3.Do not apply excessive

Ejector Valve Unit, Series ZYY/ZYX

up when ON (OUT1: red, OUT2: green) Setting trimmer rotation angle 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees 200 degrees 17mA or less (when 24VDC is ON) 25mA or less (when 24VDC is ON) 17mA or less (when 24VDC is ON) Current consumption 0.2MPa {2.1kgf/cm} Max. operating pressure Note 1) When using an ejector, there is no problem if pressure of 0.5MPa {5.1kgf/cm} is applied

Sine Rodless Cylinder Series REA

4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500 200 300 300 200 Usable range 100 100 Usable range 20 30 40

HRX-OM-W069

Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication . 3-1 3.2 Connected explanation . 3-1 3.3 Communication specification . 3-2 3.4 MODBUS communication function . 3-3 3.5 Precautions for communication . 3-4 3.5.1 Precautions after wiring and before communication . 3-4 3.5.2 Precautions for communicating . 3-4 3.6 Setting method . 3-5 3.7 Communication sequence . 3-

7.4

)5 S07A5 2(B) 4(A) 2 (B) 3 (R2) 1 (P) 4 (A) 5 (R1) y t 4-Position Dual 3-Port Valve 5(R1) 3(R2) u r e w q 1(P) N.C. + N.C.

ZR

(Refer to page 13-3-37.)

IDX-OM-W032

i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3

ML2B

3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

ML2B

3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

PSxx-OMU0008CN

12 V 300 24 V 600 DC(-) 50 DC(+) -V/-T () OUT1 PNP 2 OUT2 Max.80 mA 1 V DC(-) DC(+) -Y () -V/-T () OUT1 PNP 2 OUT2 Max.28 V80 mA 1 V DC(-) -23No.PS-OMU0008CN-D [] 3 0.2 [] / / OUT1 OUT1 OUT2 OUT2 [F10]30 () 1 3 1 3 5 (63 ) (3 ) () () (26 ) (28 ) (30 ) 3 () 3 -24No.PS-OMU0008CN-D ON OFF ON P_1 H_1 ON OFF [] ISE20C [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [

PSxx-OMU0002CN

-) 12 V 300 24 V 600 50 DC(+) -V/-T () OUT1 PNP 2 OUT2 Max.80 mA 1 V DC(-) DC(+) -Y () -V/-T () OUT1 PNP 2 OUT2 Max.28 V80 mA 1 V DC(-) -21No.PS-OMU0002CN-D [] 3 0.2 [] / OUT1 OUT1 OUT2 OUT2 [F10]30 () 1 3 1 3 5 (61 ) 3 () () (24 ) (26 ) (28 ) 3 () 3 -22No.PS-OMU0002CN-D ON OFF ON P_1 H_1 ON OFF [] ISE20A [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [H_1] OUT1 0.050

Transfer

0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

PSxx-OMS0006CN

OUT1 -50.5 kPa [H_1] OUT1 5.1 kPa ZSE20F [P_1] OUT1 50.0 kPa [H_1] OUT1 5.0 kPa 1 -21No.PS-OMS0006CN-G 3 3 3 () <> 3() 3(P_1n_1)(H_1) () () 1 1 1[-]( (50)) -22No.PS-OMS0006CN-G (P1LP1H) 22P1L()P1H()WH1() (n1Ln1H) 31 [F 1]OUT1// -23No.PS-OMS0006CN-G <> () ,() 13[SEt] [SEt] ()[P_1][n_1] ()( ) ()( 50) ( )(50 ) 2OUT1 (2P_1) 1 2 2 3(29)OFF ([SEt]) -24No.PS-OMS0006CN-G 24 P1L()

PSxx-OMU0005CN

OUT2 5.0 kPa 1 -24No.PS-OMU0005CN-C 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () () 1 1 1[-](( 62)) -25No.PS-OMU0005CN-C (P1LP1H) 25P1L()P1H()WH1() (n1Ln1H) 34 OUT2 [F 1]OUT1[F 2]OUT2// -26No.PS-OMU0005CN-C <> () ,() 13[SEt] [SEt]()[P_1][n_1]() () ()( 62) ( )(62 ) 2 (2OUT2) 1 2 2 3(32)OFF ([SEt]) 4OUT2OUT2[P_2][n_2] -27No.PS-OMU0005CN-C 27 P1L()P1H()WH1() dt1() (n1L n1H) 34 OUT2

NVZseies

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

3 Way,3 Port Solenoid Valve NVZ Series

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

PSxx-OMR0005CN

Err, 1 () 2 mmHg PSI Pa InHg bar kgf/cm 5 29.530 1bar 1 1.020 750.062 14.50 110 2 0.981 1 735.559 14.217 9.80710 4 28.959 1kgf/cm -3 1.35910 -3 1 1.93310 -2 1.33310 2 3.93710 -2 1mmHg 1.33310 3 2.037 1PSI 0.069 0.070 51.715 1 6.89510 -5 1.01910 -5 7.50110 -3 1.4510 -4 1 2.95310 -5 1Pa 110 -2 3.45310 -2 2.54010 1 4.90910 -1 3.38510 3 1 1inHg 3.38810

Table of Contents

3 3 3 MHY MHW MRHQ Direct mounting type Misc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 !

DOC1003626

Message frame . 3-7 3.9 Function code . 3-9 3.10 Checksum calculation method . 3-9 3.10.1 LRC(ASCII) . 3-9 3.10.2 CRC(RTU) .3-10 3.11 Explanation of function codes . 3-12 3.11.1 Function code: 04 Reading multiple registers .3-12 3.11.2 Function code: 06 Writing registers.3-13 3.11.3 Function code: 16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18