46.5 30 50 60 46.5 30 30 50 60 Angle adjuster 30 203 47 90 150 203 30 47 90 150 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).
46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).
C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications
25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69
Female thread MM 3.5 H ZZ+1.2 0 + Stroke (mm) Bore size A AL B1 CD CI CL CX CZ D E F FL G H H1 I K KA L MM NA NN P RR S U Z ZZ 20 18 15.5 13 9 24 25 10 19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033
Body Material Bronze p. 34 JSX20 Port Size 1/8 Body Material Stainless Steel p. 15 JSX20, 30 Port Size 1/4, 3/8 Body Material Stainless Steel p. 17 JSX20, 30 Port Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20, 30 Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Bracket Options p. 23 Zero Differential Pressure Type Pilot Operated 2-Port Solenoid Valve JSXZ Series p. 35 How
-3. 10 15, 30, 45, 60 16 15, 30, 45, 60 JIS symbol Mounting Accessories/Refer to p.1.3-12 for details.
port size P Spring extend One-touch fitting port size P Spring return H1 H G F D CX MM AL CI L NA A CD I B1 E K N NN P RR U Bore size (mm) 0 0.033 20 41 8 13 8 10 24 30 18 9 5 9 14 15.5 13 5 28 M8 x 1.25 15 24 M20 x 1.5 1/8 20 0 0.033 25 45 8 13 10 10 30 30 22 9 5.5 9 14 19.5 17 6 33.5 M10 x 1.25 15 30 M26 x 1.5 1/8 26 0 0.033 32 45 8 13 12 10 30 30 22 9 5.5 9 14 19.5 17 6 37.5 M10 x 1.25
When P port is largely restricted Universal When using A port for atmospheric release while blowing, etc.
(mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.
3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 Blanking plug LQ3-P-1 P.937 Tubing plug LQ3-P-2 P.937 Nut LQ3-N P.937 872 A Needle Valve /Bore Through Connector /High Purity Fluoropolymer Tubing LVN/LQHB Series/ / / TL TIL TD TID TH TIH Needle Valve P.938 Tubing O.D.
(accessory) A D C L OUT IN G Pressure gauge (accessory) B Pressure gauge port size M N Bracket (accessory) Q K P F E J Standard specifications Accessory specifications Model Port size With pressure gauge Bracket mounting size Panel mount A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46
LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15
Do not use a load that generates surge voltage.
m (kg) 30 16 20 12 10 *When requiring a bracket with a longer l dimension select a bore size large enough to accommodate the additional moment.
) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57
20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model
a model with 30 stroke or less.
D-H7l D-H7C D-G5l/K59 D-G5lW/K59W D-G59F D-G5NT D-G5BA D-C7l D-C80 D-C73C D-C80C D-B5l D-B64 D-B59W D-A9l D-A9lV Bore size A B A B A B A B A B A B A B 20 33 24 (32) 29 20 (28) 28.5 19.5 (27.5) 29.5 20.5 (28.5) 25 16 (24) 23.5 14.5 (22.5) 26.5 17.5 (25.5) 25 32.5 24.5 (32.5) 28.5 20.5 (28.5) 28 20 (28) 29 21 (29) 24.5 16.5 (24.5) 23 15 (23) 26 18 (26) 32 34 25 (33) 30 21 (29) 29.5 20.5 (28.5
36 + Stroke 20 + Stroke 77 + 2 x (Stroke) 16 to 32 Port size 2-M5 x 0.8 [32: Rc 1/8] 2-P through Use series ZP pad CG + Stroke Vacuum port size d Through d Through d Through Width across flats L 2-P through 4-T counterbore SA + Stroke S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 Note) ZC