Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 2) Splash proof specification is not available for F and T1.

Compact

T1 = V/a1 = 1000/2500 = 0.4 [s], T1 T2 T3 T4 11LEJS T3 = V/a2 = 1000/2500 = 0.4 [s] L: Stroke [mm](Operating condition) V: Speed [mm/s](Operating condition) a1: Acceleration [mm/s2](Operating condition) a2: Deceleration [mm/s2](Operating condition) T = T1 + T2 + T3 + T4 [s] L 0.5V(T1 + T3) V 25AT2 = T1: Acceleration time and T3: Deceleration time can be obtained by the following equation

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Applicable up to 17 solenoid valves.) ... ... One-touch fitting for 4 One-touch fitting for 4 ... ... 08 SY3000 8 stations SY3000 One-touch fitting for 6 Mixed One-touch fitting for 6 Mixed 17 17 stations M This also includes the number of blanking plate assemblies. Two stations are necessary for the double, 3 position (Dual body type).

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Table of Contents

Manifold VCS20/30/40 17-2-42 Single unit N.C. 17-2-46 VV2CS2/3/4 2 port N.C. Manifold Direct operated 17-2-52 VCW20/30/40 N.C./N.O. Single unit VV2CW2/3/4 17-2-57 N.C./N.O. Manifold 17-2-64 VDW10/20/30 Single unit N.C. 17-2-68 VV2DW1/2/3 N.C. Manifold Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit VVX21/22/23 17-3-25 N.C./N.O.

Environment

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Vacuum

E55: 3 wire (note 3) E16/17, E18/19:4 wire Types E16/17 3% F.S. or less (fixed). Lighting under ON condition (outpui 1: rd, output 2: green). Type E16/17 only. E14, E15, E55 types with plug connector do not utilize while wire.

Vacuum

E55: 3 wire (note 3) E16/17, E18/19:4 wire Types E16/17 3% F.S. or less (fixed). Lighting under ON condition (outpui 1: rd, output 2: green). Type E16/17 only. E14, E15, E55 types with plug connector do not utilize while wire.

VQ5000

L n Dimensions 11 527 547 L1 L2 10 486 506 9 445 465 8 404 424 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 12 568 588 2-6-17 Base Mounted 18 Series VQ5000 Kit (Individual terminal block kit) T1 Manifold Specifications When the junction cover on the manifold is opened, terminal box is installed in the manifold block.

Environment

L Speed: V [mm/s] Cycle time T can be found from the following equation. a1 a2 T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 = V/a1 [s] T3 = V/a2 [s] T1 T2 T3 T4 T2: Constant speed time can be found from the following equation.

Table of Contents

RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed. Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)

Proposals for Energy Saving

17 17 22 22 26 26 10 10 12 12 12 14 14 17 17 17 17 17 19 19 19 24 24 27 27 27 27.7 30.1 30.8 31.5 33.8 34.6 35.6 36.3 37.1 29.5 27.7 40.4 41.3 31.2 40.1 38.4 45.6 43.9 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 KN-04-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16

JXCx-OMT0028CN

LEC 2)LEC LEC ID (LEC-T1-) 1)LEC SET SET (TB =) 1 1 2)ID SET 1 [1]ID ID [2]SET IO 3)LEC LEC ID 17 - (2)(LEC-W2) 1)LEC Normal HELP -Password password OK password OK 2)[1] 3:++ [2] LEC 3)-LEC [1] [2] 5(115.2kbps) (230.4kbps) [3] LEC 18 - 4)LEC LEC 5)-1 [1] 1:++ [2] LEC 6)LEC LEC (LEC-T1-) 1)LEC TB SET TB (TB =) 1 TB TB 2)SET [] LEC TB Ver 1.76

Vacuum Equipment

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation T1: Outlet Thermo-chiller temperature amount Customer equipment T = T2 T1 7325 [W] = 7.3 [kW]

OMU0023

response Start ID Note 2) Error function Check Details of sum End code error ) T1-T2-T3-T4 1 byte 1 byte 1 byte 2 bytes T1-T2-T3-T4 The MSB of the function code is Problems 3.5 character code Note 5) CRC 3.5 character times Note 1) 01 FF times Note 1) changed to 1.

RLQ

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.

Compact Cylinder with Air Cushion and Lock Series RLQ

T1 Approx. Max. T1 Approx. Max. T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1