JXCx-OMT0005CN

4) 15 16 L 30.7 (11) 61 - 15.5 LEC W2 1CD-ROM 2 3 4USB USB1.1USB2.0WindowsXPWindows7Windows8PC/AT * WindowsWindowsXPWindows7Windows8 http://www.smcworld.com/ 15.6 P5062-5(0.3m) 15.7 JXC-CPW 15.8 DeviceNet JXC-CD-S JXC-CD-T T DeviceNet V+ DeviceNet (+) CAN_H High Drain / CAN_L Low VDeviceNet (-) 62 - 15.9 LEC T1 -3 G 3m 3 S J G E 2 No (1) LCD (2) (3) 1 4 (4) 5 (5)

3

, T1 = 297 5K, 0.07 bar P 0.14 bar.

Model Selection 1

bar absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

Dedicated Controller Series LC1 Uniaxial Type

Description RUN 15 +24V Common The positive common of the input terminal. (1,14) HOLD 3 (2) Starting preparation The terminal which performs setup operations (actuator starting preparation). SET-UP STOP 16 ALARM RESET 4 The terminal which performs program start. RUN (15) Starting PRO-NO BIT 1 17 Control input (17) The terminal which designates the program to be executed.

Dedicated Controller

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

Angle Seat Valve /

, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C.

LECA6_C

(P.16) 13.P.53 USB LAN 8 - 2.4 () (1) I/O LECA61 1 I/O *(LEC-CN5-) 1 * 1 *(LE-CA--) 1 * (LEC-T1-3G) (LEC-W2) (USB ) 2 3.4 (P14) 3 (CN1~CN5) 4.(P.16) 9 - 4 DC24V LED POWER ALARM LEDPWR LEDALM CN4 I/O 12. (P.48) 5() ()() () 6 10 - 3. 3.1.

LECP6_C

14 18 (6.3) B1 A1 5 6 17.7 14.2 A6 B6 B1 A1 10.2 2 1 B3 A3 (5.7) 15 16 11 30.7 45 - 115 I/O No.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

bar absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1

CQ2

Bore size 12, 16 Bore size Standard stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 80, 100 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 50, 75, 100 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Auto Switch Mounting Bracket Part No.

Made to Order

10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)

Table of Contents

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

•

26 15 15 15 16 .

V

Area Differential MPa Pressure Differential MPa (mm2) MPa Water / Air Oil 0.02 3/8 15 VXD2142-03 4.5 80 0.7 0.6 0.02 1/2 VXD2142-04 15 5.5 100 1.5 0.7 0.6 0.02 3/4 VXD2152-06 20 9.5 170 0.7 0.6 Courtesy of Steven Engineering, Inc. !

V

15 40.5 6.5 3.3 ZPT16 U C 16 18 12.5 17.5 20 38.5 25 43.5 3.5 1.2 ZPT50U C 50 53 19.5 25.5 3 15 51.5 4.5 15 41.5 7.5 3.8 D E E P T Y P E D E E P T Y P E G:M5x0.8 G:M6x1 Model A B C D E F E F Y H:M6x1 H:M6x1 H O W T O O R D E R S E E N E X T P A G E Model A B D E Y C F G C F G ZPT10D 10 12 15 20 20 41 25 46 6 ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT16D 16 18 16 21 20 42 25 47 7 Courtesy

AC

For AF/AL For AFM/AFD For AR B340 B240 Mounting thread Model Applicable model A B C D F H J K L M N R t Bracket/ For AF, AL, AFM, AFD, and AR M4 X 8 l AF2000, AL2000 AFM2000, AFD2000 B240A 18 27 8.4 33 3 2.7 27 26 5.4 40 2.3 4.5 14 (Round head Phillips screw) Model File M4 X 8 l (Hexagon socket head cap screw) SAC2000, #15 SAC2503, #15 SAC4000, #15 SAC4006, #15 SAC5000, #15 B240 B340 B440

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)