C85

J 0.04 J 0.09 J 0.27J 0.4 J Allowable kinetic energy Air cushion/Double rod CS1 Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J C76 Non-rotating accuracy 1 30' 1 30' 1 1 0 42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

ZP

) ZPT F 10-0-A10 (With buffer/One-touch fitting) Applicable tubing O.D.Q Hexagon width across flats 13 Rc 1/8 Hexagon width across flats 8 M5 x 0.8 M14 x 1 6.2 Hexagon width across flats 19 M10 x 1 Hexagon width across flats 14 5 5 D C ZX 3 I I K ZR 3 D C J J H F Hexagon width across flats 8 M5 x 0.8 ZM Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 10 H F Hexagon width

smcmaintenancepartslist

6 Single acting, spring extend Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS Gasket Set of left nos. !4, !5, !6. Replacement Parts: Seal Kit Kit no.

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

Electric Actuator

[mm] Step motor Servo motor Stroke range (mm) C B D EH EV H J K L M O1 R S T U Size A 10 to 100 166.3 167 92 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 35.5 0.5 10 101 to 300 186.3 187 112 15 to 100 195.4 191.6 115.5 25 M8 x 1.25 M5 x 0.8 20 44 45.5 24 17 14.5 34 8 45 46.5 1.5 13 101 to 400 220.4 216.6 140.5 20 to 100 216.9 128 32 M8 x 1.25 M6 x 1 25 51 56.5 31 22 18.5 40 10 60

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

24

[mm] MGPM, MGPL Common Dimensions Bore size [mm] Standard stroke [mm] B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P Nil TN TF 16 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 7 6 30 10.5 7.5 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 20 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 78 62 10 8 8 36 11.5 9 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8

MGP

M5 X 0.8 4.3 5.6 5.6 M5 X 0.8 Rc1/8 Rc1/8 40 16 18 26 8 10 12 64 83 93 8 9.5 9.5 10 8 10 10 M4 M5 M5 4.5 5.5 5.5 19 5 6 6 15 18 21 30 36 42 15 18 21 22 24 30 16 20 25 78 62 10.5 M5 X 0.8 M5 X 0.8 37.5 10.5 25 25, 50, 75, 100, 125, 150, 175, 200 78.5 62.5 11.5 M6 X 1.0 M6 X 1.0 37.5 13.5 28.5 WA WB Bore (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175st 100 to 175st 75st

Dual Rod Cylinder Series CXSJ/CXS

) N Z L V (Opposite side: Same) QQ TT Q T U R UU (Piping port) (Opposite side: Same) Z L I N W G NN (mm) A B C D E G H I J K L M N P NN F Model 2 x 5.5 through 2 x M4 x 0.7 thread depth 6 2 x M5 x 0.8 thread depth 7.5 2 x M5 x 0.8 thread depth 8 CXS20 64 25 62 23 11.5 50 28 6 12 12 30 10 53 2 x M5 x 0.8 2 x 9.5 counterbore depth 5.3 2 x 6.9 through CXS25 80 30 78 28 14 60 35 6 12 12 30 12

CJ5-S

e t q o i r y !

CJ5-S

e t q o i r y !

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

CY1

A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Mounting bolt M3 x 45L M3 x 55L M3 x 60L M5 x 55L M5 x 60L M5 x 65L M5 x 60L M5 x 65L M5 x 70L Mounting bolt M5 x 75L M5 x 80L M5 x 85L M6 x 75L M6 x 80L M6 x 85L RSQB12-10 Note) RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 7 9 Mounting bolt C D 9 Note) When using the through-hole mounting for a size 12 cylinder, be sure to use the flat washer which

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Modular Type Air Filters Series AF

Note 3) Bowl assembly for the AF30 to AF60 models comes with a bowl guard (steel band material). 332 Air Filter Series AF10 to AF60 Dimensions AF10, AF20 AF50, AF60 T N S M J U Bracket (Option) Bracket (Option) D R B C T M J V Q N S IN OUT D U OUT R C 2 x P (Port size) V Q IN OUT o s Clearance for maintenance OUT Drain G A 2 x P (Port size) AF30 to AF40-06 B D J M U N S T Bracket (Option)

Series VQ Base Mounted Metal Seal/Rubber Seal

kit: Terminal block C4 (4) 1 to 16 stations C kit: Individual connector M5(M5 thread) SY S kit: Serial transmission unit SYJ 818 (Single) 885 (Double, 3position) F kit: D-sub connector C8 (8) C3 (3.2) P kit: Flat cable connector Option: built-in silencer (Direct exhaust) C4 (4) VQ110 VQ111 VV5Q12VQ1000 Side T kit: Terminal block 1 to 16 stations SX C6 (6) C kit: Individual connector M5 (M5

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8