REA/REB Model REAH25 REAHT25 REATH32 REAH15 REAH20 REAH10 Screw size M5 x 0.8 l-8 M8 x 1.25 M6 x 1.0 l-9 M4 x 0.7 l-7 Bolt dimensions l-12 Dimension t Max.
Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 4.5 29 18 3.1 2 9 40 22 32 12 A D L MM N R W Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 10 15 M5 x 0.8 7 12 6 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order CG5 L N 25 S R 100 Without Auto Switch
distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 300 300 200 200 80 80 100 100 Load weight m (kg) Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-52 MGPS50/80 (5) l = 50 mm, V = 200 mm/s (6) l = 100 mm, V = 200 mm/s 100 80 50 80 80 80 40 Load weight m (kg) 30 50
MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.
MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.
A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).
Silencer for EXH port Blanking plate Name plate One-touch fitting Inch size Double check block VQC SQ VQ0 VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Except S kit Except S kit Except S kit Except S kit Except L kit Except L kit Except L kit Except
Ml0 X l ' It ~jath across fl ats 14 I W\dt~ acro ss fl ats 12 \lj ~ I W ,r~ --~ o ,..---. NM iniature tube fitling (Serie s M5) Width across flats 7 ~ ~~~S~ _ M5 ) 0 , >.2:1 'B ~ ~ ,...!
ZZ S ZZ S ZZ S ZZ S ZZ 20 87 141 112 166 137 191 25 87 145 112 170 137 195 32 89 147 114 172 139 197 164 222 40 113 179 138 204 163 229 188 254 213 279 Symbol Symbol Bore size Bore size Female Rod End (mm) Stroke A1 H MM 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 S ZZ S ZZ S ZZ S ZZ S ZZ 20 8 20 M4 x 0.7 87 120 112 145 137 170 25 8 20 M5 x 0.8 87 120 112 145 137 170 32 12 20 M6
(kg) 25 25 20 20 16 16 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 63 1 2 25mm stroke V = 400mm/s 1 3 Over 25mm stroke V = 400mm/s 50 50 63 63 50 50 Load weight m (kg) Load weight m (kg) 10 10 40 40 5 5 32 32 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL80, 100 1 4 V = 400mm/s Note: 1kg = 2.2046 lb
Vacuum pressure L Vacuum pressure L Vacuum pressure S ZF Attachment Nozzle diameter 07 ZP Ejector Specifications Valve specifications ZCU AMJ Nozzle diameter 10 Misc.
Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.
7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions
L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.
Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate
S L Please use the applicable pressure gauge depending on the fluid used.
RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight
RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight
X 0.8 20 Type How to Order Applicable solenoid valve SYJ512-l-M5 SYJ512M-l-M5 SYJ522-l-M5 SYJ522M-l-M5 SS3YJ5--20-05 Stations Applicable blank plate ass'y SYJ500-10-1A 2 stations 02 P Port Rc(PT)1/8 .. .. 20 stations 20 R Port Rc(PT)1/8 Note) If more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40 Type Applicable solenoid valve SYJ514-l SYJ514M-l
Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated