Rotary Actuator

Additionally, do not mount the foot bracket with the pressure applied to the port. y A port B port 0 a 1 w y y a e k w of y e e g k n ra of n e io at g ot R n R ra +4 0 n ot io 0 at at ot R 8 io 1 R n y +4 0 ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e k of 189 CRA1 Series Dimensions/Basic Type: ClRA1BS Size: 30 Single shaft: ClRA1BS 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite

5 Port Solenoid Valve Series SV1000/2000/3000/4000

S Z NS NZ r Pilot type Nil R Internal pilot External pilot Only Nil is available for M5. !

MY1

Mass m X-axis Y-axis Z-axis Z 20 W 20mm 30mm 50mm 2kg 50 Y 30 3 Calculation of load factor for static load m: Mass m m max (from 1 of graph MY1B/m = 27 (kg) Load factor = m/m max = 2/27 = 0.07 X M: Moment m M max (from 2 of graph MY1B/M) = 13 (Nm) M = m x g x X = 2 x 9.8 x 20 x 10= 0.39 (Nm) M Load factor = M/M max = 0.39/13 = 0.03 M: Moment Y M max (from 3 of graph MY1B/M) = 1.6 (Nm

Basic type / Direct mount type Series CY3B/CY3R

7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 <M5 type> <M5 type> -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Modular F.R.L. Unit

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H J

Vacuum System Peripherals:

suppressor Nil F S Manifold block Z Nil None With manifold block MN (20 stations maximum) Number of ejector/valve stations Alignment (for special specifications) n r e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

ZP

Applicable pad B04MB Applicable pad B06MB/B08MB Applicable pad B10MB/B15MB Applicable pad B20MB M5 x 0.8 2.5 M5 x 0.8 2.5 R R 4 5.5 2.5 2 R 1 R 2 9.5 4 1.2 1.5 7 2 4 6 Width across flat 3 (Hexagon) Width across flat 3 (Hexagon) 3 2 Note) R part has to be smooth with no corners.

Valve Single Unit

A: Orange B: Green SX M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

Hydraulic

5D (M) 100D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l

0.55

, 3(R) port 1/8 1/2 5(R), 3(R) port 5/3(R) port 1/4 1/8 1(P) port 3/8 5(EA), 3(EB) port M5 x 0.8 1(P) port 5(R), 3(R) port 3/8 1/8 EXH Common EXH Individual EXH Common EXH Common EXH Common EXH port type VF3;30 VF3;33 VF5;20 VF5;23 VF1;30 VF1;33 Applicable valve model Applicable 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations stations Manifold base W = 29n + 21 W = 51n

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) R Attached from bottom: MD Body B (mm) A B C F (1) HA HB L LA MM MD M PA R (2) W Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Rotary Actuator

3 o r !3 w !4 r w !5 !4 !1 !1 y u i Component Parts Description Material Description Material No. No.

Compact Rotary Actuator Series CRQ2

2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.

•

Ml0 X l ' It ~jath across fl ats 14 I W\dt~ acro ss fl ats 12 \lj ~ I W ,r~ --~ o ,..---. NM iniature tube fitling (Serie s M5) Width across flats 7 ~ ~~~S~ _ M5 ) 0 , >.2:1 'B ~ ~ ,...!