Refer to page 449 for details of the replacement. 10 Straight type Elbow type Fitting size One-touch fittings for centralized supply block Straight R 3 3 5 Elbow S 12.5 12.5 13.5 Elbow T 19 19 21 Elbow U 35.5 35.5 38.5 4, 5/32 6 1/4 8, 5/16 R S T Note) The O-ring is attached. Refer to page 449 for details of the replacement.
B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 MRQ CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10, 15-D Double vane type CDRBU2WU20, 30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator 2 x R 2 x R 2 x R Cover Angle adjuster Angle adjuster Angle
Ml0 X l ' It ~jath across fl ats 14 I W\dt~ acro ss fl ats 12 \lj ~ I W ,r~ --~ o ,..---. NM iniature tube fitling (Serie s M5) Width across flats 7 ~ ~~~S~ _ M5 ) 0 , >.2:1 'B ~ ~ ,...!
(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.
(Example) For M5: L1 = 10 Applicable shaft types: S, W Equal dimensions are indicated by the same marker.
Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.
, 16 Mounting nut Piping port M5 x 0.8 Rod end nut Piping port 2 x M5 x 0.8 Cover surface B 0 -0.3 Mounting hole Port location on head cover: Axial location (R) S + Stroke Z + Stroke For details of the mounting nut, refer to page 1250.
F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16
How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !
Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13
R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].
, Pressure control equipment Air preparation equipment Relief port 2-M5 x 0.8 2-P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2-P through A 4-T counter bore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 GA A Bore size B C D E P R T GB GC H J MM 10 7 13 22 3 23 3.2 7 31 16 15 13 10 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89 80 85 90
Body size Port size M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK2P-M5M -01MS KK3P-01MS -02MS -03MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK2S-M5M -01MS KK3S-01MS -02MS -03MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type
Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.
[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.
(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine
VQ4 Type D side End Plate Ass'y U side End Plate Ass'y Kit Common exhaust type VVQ0-3A-4-P VVQ0-2A-4-R F, P, S Kit VQZ Built in silencer, direct exhaust VVQ0-3A-4-P VVQ0-2A-4-S Common exhaust type VVQ0-3A-4-P VVQ0-2A-4-R VQD C Kit Built in silencer, direct exhaust VVQ0-3A-4-S VVQ0-2A-4-S VZS U Side End Plate Assembly VFS u VVQ0-2A-4VS Option S: Built-in silencer
Note 2) For one-touch fittings for P/R port and silencer part no., refer to page 978. 5 1 15 VQ5 3 P 4 1/8 [1(P) port] G1/16 [5(R1), 3(R2) port] VQC VQZ VQZ2 2 (R)-G1-M5 1 8 9 M-type plug connector (M): VQZ2 2 (R)-M1-C4, C6 0 1 1 8 9 0 1 SQ Approx. 300 (Lead wire length) VFS 83.7 [85.9] M5 x 0.8 4(A), 2(B) port 78.7 VFR 12 VQ7 25 40.1 [47.1] Unless otherwise indicated, dimensions are the
x 0.8 thread depth 10 2 x 2-M5 x 0.8 (Hexagon socket head cap plug) 2-M5 x 0.8 Cylinder port 4-4.3 through 4-8 counterbore depth 4.5 2 x 2-M5 x 0.8 Thread depth 10 2-M8 x 1.0 RB0805 Shock absorber 2 x 2-5H7 depth 6 +0.012 0 8-26-18 17 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 16 With End Lock: CXWM16Stroke/50 to 200 R 2 x 2-M5 x 0.8 thread depth 10 2 x 2-5H7 depth
[mm] Step motor Servo motor Stroke range (mm) C B D EH EV H J K L M O1 R S T U Size A 10 to 100 166.3 167 92 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 35.5 0.5 10 101 to 300 186.3 187 112 15 to 100 195.4 191.6 115.5 25 M8 x 1.25 M5 x 0.8 20 44 45.5 24 17 14.5 34 8 45 46.5 1.5 13 101 to 400 220.4 216.6 140.5 20 to 100 216.9 128 32 M8 x 1.25 M6 x 1 25 51 56.5 31 22 18.5 40 10 60