42

External pilot supply port Indicator light Connector entry direction D side U side Connector entry direction D side U side D0 D1 D2 D3 Type of connection IP65 compatible U0 U1 U2 U3 Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m F Kit F Kit L Kit L Kit Cable length 0.6 m Cable length 1.5 m Cable length 3 m D0 D1 D2 U0 U1 U2 1 to 12 stations 1 to 12 stations S T Kit (Terminal

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Series VQ Base Mounted Metal Seal/Rubber Seal

unit (3) S kit P kit F kit T kit Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and w P kit (20 pin).

ISO Cylinder

C85 Series: 8, 10, 12, 16 [cm] 10.0 Mounting Applicable maximum stroke according to buckling strength Operating pressure [MPa] Nominal symbol C85 Support bracket nominal symbol and schematic diagram 8 10 12 16 20 25 Foot: M Rod flange: G Head flange: G Lateral load applied to the rod end fR [N] 0.3 26 38 18 36 24 48 M 1.0 G G N U U M 0.5 19 29 14 27 18 36 W W W C8516 Rod (side) 0.7 16 23

1

e, r, t, y q, w, t, y t Hexagon socket head plug r Plate mounting bolt MB Specifications and external dimensions other than above are the same as standard type.

Battery-less

5 r t w q y !6 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

0.4

1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 537 Connector Type Manifold VQC1000/2000 Series IP67 enclosure compatible Dust-tight, Immersion-proof (Based on IEC60529) (S/T/L/M kit) Power saving Standard: 0.4 W (Reduced by 60% compared to current model) High-pressure (1 MPa, Metal seal): 0.95 W Accommodates gateway-type serial wiring.

REA/REB

12.5 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8

Air Fittings & Tubing

<M5, M6> D P M Part No.

Air Cylinder

Clevis Pivot Bracket Pin (For CM2E(V)) Trunnion Nut/Material: Carbon steel (mm) (mm) H Material: Carbon steel B d D m m L2 C D t t L1 d Part no. Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(For type 20 manifold) 10 M 1 SYJ3 2 5 M M3 Body ported 10 M SYJ3 4 5 M 1 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only. Coil type Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available for W type.

Aluminum High Vacuum Angle Valve

indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9/

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

HB HT HC N X A W K 2-plug H HA CB T 4-counterbore dia.