VQ4000

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 3 position exhaust center 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) 2 position double (Metal) (A) 4 (B) 2 (A) 4 (B) 2 100 VAC Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) Power consumption (Current) 110 VAC Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 1 (P) 5 (R1) 3 (R2) 200 VAC Inrush 2.4 VA (12 mA), Holding 2.4

Table of Contents

Load weight W (kg) MX 3. Operating pressure P (MPa) P 0.7 MPa MTS 4.

REC

Lead wire length* (m) Load voltage Auto switch model Electrical entry Indicator Wiring (Output) 3 (L) 5 (Z) Applicable load Special function Style 0.5 () (N) AC DC P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P C76 IC circuit P P P P P p p p P p p p p p p p P P P P P P P P 3 wire (Equiv. to NPN) 5V Yes C73 100V 12V Relay PLC C80 IC circuit No 100V

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

Intrinsically Safe Valve

Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series

ARM10/11

t y w F.R.L.

ARM10/11

t y w F.R.L.

Vacuum Unit

2 p. 31 ZK2 VA A A A K 5 L ZK2 FC A Port for the pressure switch or sensor q w e r t Symbol Port for the pressure switch or sensor Filter case color P With port (type with pressure switch or sensor) Smoke T Without port (type without pressure switch or sensor) Clear q Applicable system w Valve type e Rated voltage A Ejector system K Supply valve: N.C., Release valve: N.C. 5 24 VDC 6 12 VDC

-fl Seies

W-rth std. gauge. An individualSUP spacer on manifold block can form individual P oort for the valve. ffi I NWFgTOOO| NWF9+oOOtP-{)0T-1 P-ff]T-2 %% Nore) Fd prssr|e center Vpe valves, use p/n NAFBF3000.

E-P HYREG

Tank 1(P) 989 E-P HYREG VY1 Series How to Order Made to Order X39 Low wattage specification P.1003 E-P HYREG Maximum operating pressure: 0.9 MPa Pilot type 0 1 Internal pilot External pilot Note 1) Note 1) Except body size D 0 1 01 0 VY1 Thread type Nil F N T Rc G(2) Symbol Power source voltage DC Command signal DC Input impedance Power source/Command signal NPT NPTF Nil 1 to 5 V 10 k 67

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

W-rth std. gauge. An individualSUP spacer on manifold block can form individual P oort for the valve. ffi I NWFgTOOO| NWF9+oOOtP-{)0T-1 P-ff]T-2 %% Nore) Fd prssr|e center Vpe valves, use p/n NAFBF3000.

VK3000

) 4 W (Standard), 2 W (Low wattage) Power consumption (DC) W/o indicator light W/ indicator light AC DC AC DC Body ported Surge voltage suppressor Neon bulb LED Symbol Body ported Base mounted Indicator light At the rated voltage (B) 2 (A) 4 (B) 2 (A) 4 Flow Rate Characteristics/Weight 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R) Flow rate characteristics Operating pressure range (MPa) Weight (g) 4/2

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VF 74.5 VFR 39.5 VP7 VP4 Individual SUP spacer VVQZ1000-P-5-M5 VVQZ2000-P-5-01 VVQZ3000-P-5-02 M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VQ VQ4 B VQZ Used to form a separate supply port for an interior manifold station or stations.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

VK3000

direction 01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (

Series KP/KPQ/KPG

P Polyolefin P White, Black Red, Blue Yellow, Green 20 P P 100 TPS P P P Soft Polyolefin P P 1ft = 0.3048 1in = 25.4mm 3 Series KP Clean One-Touch Fittings Recommended Applicable Tubing Polyolefin: Series TPH Soft polyolefin: Series TPS Tubing material 4, 6, 8, 10, 12 Tubing O.D.

Series KP/KPQ/KPG

P Polyolefin P White, Black Red, Blue Yellow, Green 20 P P 100 TPS P P P Soft Polyolefin P P 1ft = 0.3048 1in = 25.4mm 3 Series KP Clean One-Touch Fittings Recommended Applicable Tubing Polyolefin: Series TPH Soft polyolefin: Series TPS Tubing material 4, 6, 8, 10, 12 Tubing O.D.

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.