0.4

The power supply for the unit should be 0 V as the standard for both power supply for output as well as power supply for control/input. VQZ SQ VFS +24 V +24 V Power supply for output Power supply for output VFR 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V VQ7 4. Do not install a unit in a place where it can be used as a foothold.

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

•

Bellows type Bellows type Width aefOSS flats 6 1 Xl daptor plate Miniature tube fitting (Series MS} (m m) mm " EAI taptar plate : Provided as standard ;g Model "'I tB .c 0 E ZPY20B 20 22 23.5 33.5 53.5 F G H ,K ,t V ' V .K .c 64.5 79.5 89.5 12.4 25 10.5 3.3 4 2.5 11 4.7 55 .as 99 li5.6 28 lct.1I ZPY25B 25 'E1 H 34 ' 54 ZPY32B 32 34 29 39 59 70 93 110 18.9 37 14 I lube I I tub!'

Vacuum

FVano tFv3(tro Bracket P53801018 P53802016 Ps3803013 Pressure qauqe GZs3,K-01 G243-K-01 GZ43-K-01 * pressure gauge accuracy:13% (tu span) '144 Atmospheric air + Alrnospl^redc air tRV2000 tRV1000 ]rring principle (tor lRVl000) -then the knob is turned to the right, the adjusting spring's generated force pushes down the diaphragm and the main valve.

Vacuum

FVano tFv3(tro Bracket P53801018 P53802016 Ps3803013 Pressure qauqe GZs3,K-01 G243-K-01 GZ43-K-01 * pressure gauge accuracy:13% (tu span) '144 Atmospheric air + Alrnospl^redc air tRV2000 tRV1000 ]rring principle (tor lRVl000) -then the knob is turned to the right, the adjusting spring's generated force pushes down the diaphragm and the main valve.

Fieldbus System

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA EX600-AMB Max. rated input signal 22 mA Note 2) 15 V 250 100 k Input impedance 0.05% F .S.

VS 8-2/VS 8-4

There is a danger of malfunction or damage to the reduced wiring system or input/output equipment. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

AC Servo Motor Driver (CC-Link Type ）

370 V TND10V-221KB (360[V]) Note 1.

I

01) and oilfree air supplied to the pilot port. 8. M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

0.55

Output circuit Surge voltage 24 V 0 V Polarity protection diode Diode sol.1: Energized 60 V R Internal circuit Internal circuit Surge voltage Red (+) Coil 0 V PWM circuit sol.2: Deenergized 60 V R Surge voltage 24 V 0 V LED Large capacity load: Energized Black () 60 V R Relay There is no S option, since a rectifier prevents surge voltage generation.

Digital Pressure Switch

or less T: Analogue output 1 to 5 V Output impedance 1 k V: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -V/-T (Auto-shift input mode) With auto-shift switch output PNP open collector output type-2 output Max. 80 mA Residual voltage 1 V or less -Y (Copy function switch output) PNP open collector output

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported

Compact Vacuum Unit

A 0.087 0.14 V port At least 0.04 V port A Proper tightening torque inIb (Nm) 0.66 to 0.85 (0.075 to 0.096) Spacer (Flat washer, etc.)

VEX1

DXT170-176-2-01 DXT170-176-2-02 100 V 200 V 100 VAC 200 VAC Lead wire length Symbol Lead wire length (L mm) DXT170-176-2-03 110 V 110 VAC DXT170-176-2-04 220 V 220 VAC Nil 300 240 V 6 VD 12 VD 24 VD 48 VD DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 6 10 15 20 25 30 600 6 VDC 12 VDC 24 VDC 48 VDC 1000 1500 2000 2500 3000 Connector with light circuit

TABLE OF CONTENTS

H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

CATALOG VC10

H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

LEC-OM02904

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

KJ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03

Modular Type Regulator Series AR

Back flow mechanism Nil K Without back flow mechanism With back flow mechanism Thread type Nil N F Rc NPT G Optional specifications Port size Applicable model AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) Symbol 1 Note 2) N R Y Z Note 3) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Body size Port size