Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.

ARM10/11

Common supply block type Nil 3 S P V W 1 2 None Common supply block Bottom Oil-free Common supply block with pressure switch Top 3-way valve common supply block Note) The oil-free type has non-greased fluid contact areas. 3-way valve common supply block + Pressure switch block Note) The oil-free specification is not available for P and W types of common supply blocks (types with pressure

ARM10/11

Common supply block type Nil 3 S P V W 1 2 None Common supply block Bottom Oil-free Common supply block with pressure switch Top 3-way valve common supply block Note) The oil-free type has non-greased fluid contact areas. 3-way valve common supply block + Pressure switch block Note) The oil-free specification is not available for P and W types of common supply blocks (types with pressure

REC

90 0.5 W W W 0.5 F 117 108 95 76 0.7 C J G5-S 0.1 0 500 1000 1500 81 75 66 51 0.3 CV G 60 55 49 37 0.5 Cylinder stroke (mm) The above curve in the graph refers to P = 0.5 MPa of supply pressure.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

5 V 5 P 1 1 P V 1 P 3 E V 1 P 3 E 12 Individual SUP spacer (For DIN rail mounting) (7.5) Individual EXH spacer L Dimension n: Stations L n 2 160.5 150 104.4 13.5 80 3 173 162.5 120.4 12 96 4 198 187.5 136.4 16.5 112 5 210.5 200 152.4 14.5 128 6 223 212.5 168.4 13 144 7 248 237.5 184.4 17.5 160 8 260.5 250 200.4 15.5 176 9 273 262.5 216.4 14 192 10 285.5 275 232.4 12 208 11 310.5 300 248.4

REA/REB

D 2.8 x P First tentative bore size determination 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure (Refer to page 25 for vertical operation.)

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

CYPSeries

No IC circuit P P Y59A Y69A 3 wire (NPN) IC circuit p P P 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) p P P Y59B Y69B 12V 2 wire p P P Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes p P P 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) p P P Y7BW Y7BWV 12V p 2 wire P P Lead wire length symbols: 0.5m .

CYPSeries

No IC circuit P P Y59A Y69A 3 wire (NPN) IC circuit p P P 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) p P P Y59B Y69B 12V 2 wire p P P Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes p P P 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) p P P Y7BW Y7BWV 12V p 2 wire P P Lead wire length symbols: 0.5m .

ZP

(for Heavy-duty) Buffer assembly model Applicable pad model Series ZP Page ZP40H ZP50H ZP40HB ZP50HB P. 80 P. 81 ZPB-T1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 80 P. 81 ZPB-T2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB P. 80 P. 81 ZPB-T3 (J/JB/JF)01 ZP40H ZP50H ZP40HB ZP50HB P. 82 P. 83 ZPB-X1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 82 P. 83 ZPB-X2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB

VFS

Manifold Option Parts Interface regulator: ARBF2000-00-P-1 (Plug-in type) ARBF2000-00-P-2 (Non plug-in type) Individual SUP spacer: VVFS2000-P-01 02-1 (Plug-in type) VVFS2000-P-01 02-2 (Non plug-in type) Individual SUP spacer Interface regulator SUP port Individual EXH spacer: VVFS2000-R-01 02-1 (Plug-in type) VVFS2000-R-01 02-2 (Non plug-in type) Air shutoff valve spacer: VVFS2000-21A-1

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

VXA21/22

VX t Vaccuum pressure (Torr) The absolute pressure is expressed. 0 Torr=Absolute pressure 0.760 Torr=Atmospheric pressure (Gauge pressure 0 Kgf/cm2) (1 torr=1.33 X 102 Pa) VNl VQ Electrical Terms q Volt-ampere(VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W=V/A cos.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

NCQ8

Solid state switch Reed switch Yes 5 V A96V A96 Grommet A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V IC circuit Relay, PLC No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet 12 V 2-wire

HRX-OM-X084

Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-A -20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type