(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L1 + (3 x P) (mm) (mm) Q1 Q2 Q1 = M L1 = Shaft type Shaft type S Y S Y Size Size 10 10 Not available Not available L2 + (3 x P) 15 15 M3 M3 20 20 M3, M4 M3, M4 L2 = Q2 = M 30 30 M3, M4, M5 M3, M4, M5 Symbol: A33 Machine female threads into the long shaft. Symbol: A34 Machine female threads into the short shaft.
y y e e r r r u u u Drain Drain Drain Parts list Material No.
Rc1/8 XLFV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLF 0.29 0.49 1.2 1.9 3.3 5.7 XLFV 0.34 0.54 1.3 2.0 3.4 5.8 1 Conductance is the value for the elbow with the same dimensions. *2 A coating of vacuum grease [Y-VAC2] is applied to the seal-material sliding portion of the vacuum part.
P.7 KQ2H Use to connect tubing in the same direction. KQ2D Use to branch tubing at three right angles. P.15 P.17 KQ2U Different Diameter Straight Double Branch Y Branch Y P.7 KQ2H Use to connect tubing of different sizes. KQ2UD-G Use to four-branch a female thread in the same direction. P.16 KQ2U-G Use to branch a female thread in the same direction.
m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236
Grease pack part no.: GR-S-010 (10 g) Basic Style (B) 20 P 20 25 Bore size Stroke P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 H1 Width across flats B1 32 to 40 H2 Width across flats KA P E (Head side pressure port) I G G NA D Q MM NN AL N ZZ + Stroke S + Stroke N F K H A P QY
SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7
Bore 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A NTJ-015A 10 16 M5 X 0.8 Refer to p.1.3-12 for details of the mounting nut.
Applicable shaft type: W L1 (3 x P) Q1 = M C2 = C Y = DC1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 L2 max Y Y D2 L1 max X 2 X 2 L2 max Y Y Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 319 CRQ2X Series (Size: 10, 15, 20, 30, 40) Simple Specials: -
(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine
GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 13 14 8 29 8 12 2 35 5 26 M4 x 0.7 5 6 14 M8 x 1.25 24 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 16.5 10 33 10 14 2 40 6 31 M5 x 0.8 5.5 8 16 M10 x 1.25 29 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 20 12 40 12 18 2 40 6 38 M5 x 0.8 5.5 10 20 M10
A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5
A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4
Nil : : P R 20 20 stations A A S + + + + P, R port thread type R port A port size R P A port M5 x 0.8, C4 P port 1/8 Nil Rc M5 M5 x 0.8 P port F G A 1/8 1/8 C4 One-touch fitting for 4 N NPT R port N3 One-touch fitting for 5/32" A port M5 x 0.8, C4 1/8 T NPTF Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port. 667 Manifold specifications
(A) 2 (A) 2 12 12 Standard 1 (P) 3 (R) 1 (P) 3 (R) (A) 2 For vacuum 12 1 (P) 3 (R) 1(P) 3(R) For vacuum u y t r e w q 2(A) 12 1(P) 3(R) Component Parts Bracket Assembly Part No. No. Description Material Note Description Part no.
orifice P G F H2 D I B LH 2 x LC 4 x LD Width across flats B2 MM Width across flats NA LT Y X S + Stroke Z + Stroke X Y Width across flats KA LX LZ LS + Stroke ZZ + 2 x Stroke (mm) Bore size A AL B B1 B2 D F G H H1 H2 I K KA LC LD LH LT LX LZ MM NA P X Y Z 20 18 15.5 40 13 26 8 13 8 41 5 8 28 5 6 4 6.8 25 3.2 40 55 M8 x 1.25 24 1/8 20 8 21 25 22 19.5 47 17 32 10 13 8 45 6 8 33.5 5.5 8 4
/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67 Guide Rod Type
O.D.: 3.2 (VAC. port) KJS23-M5 Applicable tubing O.D.: 4 (VAC. port) KJS04-M5 Applicable tubing O.D.: 6 (VAC. port) KJS06-M5 16.5 15.5 16.38 15.3 15.6 KJL23-M5 KJL04-M5 8.4 9.3 Applicable tubing O.D.: 3.2 (VAC. port) Applicable tubing O.D.: 4 (VAC. port) 10.6 10 P port (for ejector) Applicable tubing O.D.: 4 (P. port) KJS04-M5 Applicable tubing O.D.: 6 (P. port) KJS06-M5 16.38 15.5 Applicable
Bellows Bellows ZX Hexagon width across flats 12 Hexagon width across flats 10 ZR (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 ZM ZH ZU ZL D G: M4 x 0.7 G: M5 x 0.8 G: M5 x 0.8 G: M6 x 1 G: M8 x 1.25 ZY A B Y Model C D E K A B K L Y Model C L F F F D ZPY20B ZPY25B ZPY06B ZPY08B 25 28 18.9 37 14 10.5 10.5 20
N1 N3 N7 N9 N11 NM Note 1) M5 01 02 Symbol Nil N T F Rc 1/8" 5/32" 1/4" 5/16" 3/8" Mixed M5 thread 1/8 thread 1/4 thread NPT P P P P P VQZ100 NPTF Cylinder port P P P P P VQZ200 G P P P P P VQZ300 Note 1) Except VQZ100, mixing one-touch fittings and thread types is impossible. Note 2) Metric size one-touch fittings (Cl) are also available.