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D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)

Except with auto switch Except with auto switch Except with auto switch w-1 From P. 1070 w-1 From P. 1468 w-3 From P. 389 w-2 From P. 432 w-2 From P. 520 w-2 From P. 538 w-2 From P. 578 w-2 From P. 737 w-2 From P. 749 Magnetically coupled rodless cylinder Rotary clamp Compact guide cylinder Compact guide cylinder Guide cylinder Guide cylinder Dual rod cylinder Note 1) Operate without lubrication

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Enclosure IP67*1 Pitch width [mm] Different pressures Reverse pressure Negative common Positive common 6.5 9 V G G V V v p. 132 v p. 132 v p. 132 v p. 133 v p. 133 v p. 133 v Individual SUP V External pilot External pilot 11.5 V 16 V *1 Refer to Manifold Specifications on pages 17 and 18 for details on IP67.

P P P P P P Rc1/8 NPT1/8 G1/8 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P Through-hole (Std.)

12 V Solid state auto switches marked with p are produced upon receipt of order.

Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

LEFS v v E339743 v v v v 11-LEFS v v E339743 v v v v 25A-LEFS v v E339743 v v v v LEFB v v E339743 v v v v LEJS v v E339743 v v v v 11-LEJS v v E339743 v v v v 25A-LEJS v v E339743 v v v v LEJB v v E339743 v v v v LEY25/32/63 v v E339743 v v v v LEY100 v LEYG v v E339743 v v v v LESYH v v AC servo motor Compatible

Load weight W (kg) MX 3. Operating pressure P (MPa) P 0.7 MPa MTS 4.

Cushion adjustment screw 4 x J GA Air release GA V V Width across flats G Width across flats G MM MM R (max.) d W W D d E E D M MA a a M MA F NA NA F K A A K mC H + Stroke S + Stroke H mB ZZ + 2 strokes (mm) Bore size (mm) mB mC A a d E D F G GA J K M MA MM NA P R S T V W H ZZ 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40

-m For three phase 200 VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Three phase 200 to 230 VAC Single phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Exhaust port Rc 1 25 Vacuum pressure gauge Exhaust port With vacuum pressure gauge ZL212-G P V Exhaust port Vacuum adapter Rc 1/8 7 With vacuum adapter ZL212-GN P V Vacuum pressure switch Exhaust port With digital vacuum pressure switch ZL212-E P V RESETSET ~ = ~ = 500 (L

Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type q w e r t y u i Deep type t Buffer stroke q Vacuum inlet direction w Pad diameter Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral (With barb fitting) 10 10 16 16 25 25 40 40 Stroke [mm] Pad diameter [mm] 10 16 25 40 10 V V V V 20 V V V V 30 V V V V 40 V V V 50 V V V V e Material N NBR S Silicone

Series AWmK Series p. 76 p. 76 p. 94 p. 94 Port size Port size Port size Port size 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 Size 20 V V V V V V V V Size 30 V V V V V V V V Size 40 V V V V V V V V V V V V Size 40-06 V V V V Size 50 V V V V Size 60 V V V V V V Lubricator New Spacer p. 48 AL Series p. 87 Port size 1/8 1/4 3/8 1/2 3/4 1 Size 20

50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet 4/25/3 (A/BEA/EB) Double 5 V Single { } 3 V SJ P.108 SY3 20 0.65 SY Body ported Base mounted Body ported Base mounted SY5 20 2.4 SV SY7 20 3.3 SYJ SY9 20 SZ 8.6 P

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161 Sine Rodless Cylinder/Direct Mount Type Series REAR 10, 15 Replacement Procedure is P.316 Construction @2 @3 @6 @7 !

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,