PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

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Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Air Cylinder NCA1 Series

Female Rod End B .

Series IDG

Accessories Nil B None (standard) With bracket Note) When symbol B is indicated, a bracket assembly with a part number shown in the table below is included as an accessory.

VDW Series

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

Microspeed Cylinder

B Through hole/ Double end tap common (standard) Number of auto switches Bore size 12 16 20 25 2 pcs. 1 pc.

F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.

7ND9071en

Fax +55 15 2102 9748 Asia Pacific, 238B Thomson Road, #17-01 Novena Square Tower B, Singapore 307685. Tel. +65 6511 1011. Fax +65 6250 0830 China, 11/F, China Youth Plaza, No.19 North Rd of East 3rd Ring Rd, Chaoyang District, Beijing 100020, China. Tel. +86 10 6566 6600. Fax +86 10 6566 2583 Middle East, Roundabout 8, Unit AB-07, P.O.

PFxx-OMO0004CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

NVEPA|VEFseies

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Pressure Range: 0 to 1 MPa, Piping: Rc 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1 MPa, Piping: Rc 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1 MPa, Piping: Rc 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket B, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1 MPa, Piping: Rc 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration Certificate: None

Pressure Range: 0 to 1 MPa, Piping: Rc 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1 MPa, Piping: Rc 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: None, Operation Manual/Calibration Certificate: None