Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

flange style: CBQ2G/CDBQ2G With head end lock With rod end lock Standard stroke Bore size (mm) A B L L1 A B L L1 10, 15, 20, 25 73.5 61 4.5 18.5 67 54.5 4.5 18.5 FV 20 50, 75, 100 88.5 66 14.5 28.5 88.5 66 14.5 28.5 10, 15, 20, 25 77 64 5 22.5 70.5 57.5 5 22.5 25 50, 75, 100 92 69 15 32.5 92 69 15 32.5 2-FD A + Stroke B + Stroke L FX FZ FT Standard stroke Bore size (mm) FD FT FV FX FZ 20

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

B B B B 103.2[107.6] P R R P 21 7 35 17.5 A A A A A 20.9 (DIN: 22.1) 3.5 1/8 (P, R port) 5.5 (DIN: 6.7) (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) MAX.13.5 47.5 (Light/surge voltage suppressor) 52.6[59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN Terminal (D) M8 connector (WO) 85.4 77.9 52.6

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

5

+ l l f K A AL CX F N N CT MQ CB C H L RR S + Stroke RHC ZZ1 + l + Stroke ZZ + Stroke Z + Stroke RZQ Double clevis: CS2YD With rod boot Port G G V W Width across flats KA 4 x J 2 x P (Rc, NPT, G) CD hole H10 Axis d9 MM Cushion valve B D E e U Z1 + l + Stroke h + l l f K A AL CX N N CT F CZ L H S + Stroke C ZZ1 + l + Stroke RR ZZ + Stroke Z + Stroke CB (mm) Bore size (mm) A AL lB lC lCB CDH10

MY1

B A 10 16 20 Mounting position A 31 24 39 B 129 86 161 Operating range l Note) 4 3 5 MY1M (Slide bearing type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1C (Cam follower guide type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1H (High precision guide type) B A Mounting position 10 16 20 A 31 24 39 B 129 86 161

Battery-less

Absolute (Step Motor 24 VDC) LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 Model Lead Pushing speed [mm/s] Pushing force (Setting input value) LEYG16M L mE A/B/C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80

SQ1000/2000

B RATE PWR L RUN PWR PWR COM ERR ON ON L ERR.

Electric Actuator/Slider Type

C L A B C L 25 32 63 25 32 63 Rod ange: LEY F Head ange: LEY G Head ange is not available for the LEY32/LEY63.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Air Slide Table

A B C D1 E F G M (Fine pitch) P2 MXQ6(L, A) MXQA-AS8-X2202 41.5 2.5 3 M3 x 12 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ8(L, A, C, CL) MXQ6B(L) MXQ12(L, A, C, CL) MXQ8B(L) MXQA-AS12-X2202 46.5 2.5 4 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-AS16-X2202 51.5 3 5 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-AS20-X2202 58.5 4 6 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A)

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: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

Hydraulic

GA R J H MM D E e Width across flats G l 10 f CX Air release NB -0.1 -0.4 Air release SS + Q + l + Stroke C NA T B U ZZ + Q + l + Stroke K F MA S + Stroke L A RR SS + Stroke ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) l e CX J B C F GA GB NA NB P R S T CD RR SS U L f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 25 to 1400 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 22

1

: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1

smcmaintenancepartslist

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

B B B B 16.5 6-Rc(PT)1/8 (P, R port) 9 Manual override L2 Depress and turn to operate and lock override L1 Manual override (Non-locking) 50 [56.5] Built-in speed controller 37.6 31 20 2n-M5 X 0.8 (A, B port) B B 12 24 5.5 43.5 A A MAX: 13.5 23 (Pitch) P=16 [ ] for AC L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 103.8 [106.4] 87.8 [90.4] 69 [70.3

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

&snac

f o r a i r t u b e s i z e a n d i e n g t n s h o u l d b e 5 m a n d b e l o w ' F o r o u r s i n g a i r t u b e 5 r n a n o a D o v e ' p l e a s e d o n o t i n s t a t l v a l v e i f t u b e i s b e n d o r c o n s t f u c t e d ' l f t h e d e h u n r i d i f t l i n s p e r f 0 r m a n c e w i t t l o w e r . o f m e m b r a n e a i r d r Y e r T a b l e c 0 n d i t 4 i o n color