0.4

C6 (SUP port) 6 One-touch fitting D side U side 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) X X D side U side SUP block plate 1(P) 2(B) (A)4 2(B) (A)4 (A)4 2(B) (A)4 2(B) Individual EXH spacer VVQ1000-R-1C6 N7 Description/Model Stations 1 2 3 4 5 6 7 When valve exhaust affects other stations due to the circuit configuration, this spacer is used for individual valve exhaust.

Modular F.R.L. Units

High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

VQ5000

S ] Interface regulator ARBQ5000-00-1 A B P D U Refer to pages 2-6-34 to 2-6-38 for detailed dimensions of each option.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Type 2-Port Solenoid Valve JSXM Series p. 39 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Glossary of Terms Bracket Options p. 23 How to Order p. 39 Flow Rate Characteristics, Common Specifications p. 40 Construction p. 41 Dimensions p. 42 Modular Connection Examples p. 44 Spacer / Spacer with Bracket

Battery-less

To SI To MOT Provided by the customer To PWR Power supply for controller 24 VDC Step data input type JXC51/61 Communication cable (3 m) p. 171 Power supply plug p. 171 p. 165 (Accessory) Options VCommunication cable for controller setting VConversion cable*2 VTeaching box p. 171 p. 171 p. 171 P5062-5 (0.3 m) Communication cable : JXC-W2A-C USB cable : LEC-W2-U (With 3 m cable) LEC-T1-3mGm

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

Smooth Cylinder/Low Speed Cylinder

: Change this to a smooth cylinder (CS2). 1 1 DCQSY CQ2Y CM2Y CG1Y CA2Y CQSX CQ2X CM2X CJ2X CUX CS2Y -X P. 1168 P. 1176 P. 1189 P. 1203 P. 1214 P. 1228 P. 1261 P. 1268 P. 1280 P. 1246 P. 1256 1165 Series CY/CX Smooth Cylinder/Low Speed Cylinder Added compact type foot brackets. Compact foot bracket has the same width as the cylinder. Overall width reduced by up to 43% (for 12).

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Aluminum High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Magnet (Option) Pilot port (pressurize to close) P-2 Heater (Option) q Bonnet assembly (Maintenance parts) (Including w, t, y, u) Port 5(R) (Exhaust port) Plate Pilot port (pressurize to open) P-1 R1 P Port 1(P) (Pressure port) u Bellows holder (Material: Stainless steel 304) R2 Port 3(R) (Exhaust port) e Exterior seal (Maintenance part) Solenoid

Air Cylinder

Rod Trunnion (U) CM2U Bore size P Stroke 20 20 25 P P (Head side pressure port) (Head side pressure port) P P Width across flats B2 Width across flats B1 (Rod side pressure port) (Rod side pressure port) 32 to 40 NN Width across flats KA 0.025 0.061 P (Head side pressure port) H1 I TD G G NA TY D Q TT N K A AL TX TZ MM QY NA P H Z N (Rod side pressure port) S + Stroke ZZ + Stroke (mm) Bore

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !

Electric Actuator/Slider Type

U U Motor V U Motor V L3 L3 V V W M N() W M N() W W P3 P1 PE PE P4 P2 CNP2 CNP2 P(+) P(+) Regeneration option Regeneration option C C D D Encoder Encoder CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 240 VAC, power supply should be connected to L1 and L3 terminals, with nothing connected to L2.

Made to Order

P.1729 P.1731 P.1732 P.1733 P.1738 P.1739 P.1742 P.1743 P.1744 P.1747 P.1748 P.1752 P.1755 P.1756 P.1760 P.1765 P.1766 P.1769 P.1770 P.1776 P.1781 P.1786 P.1794 P.1796 P.1801 P.1802 P.1803 P.1804 P.1806 P.1806 P.1807 P.1809 P.1817 P.1818 P.1819 P.1820 P.1822 P.1823 P.1829 P.1829 P.1830 P.1831 P.1832 P.1832 P.1833 P.1836 P.1838 P.1839 P.1839 P.1841 P.1844 P.1844 P.1845 P.1848 P.1849 P.1850

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

REA/REB

x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)

REA/REB

F2 D 1.6 x ---P F3 D 1.6 x ---P F1 D 1.6 x ---P WB Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable Driving Force (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos + sin) Inclined (For vertical operation, refer to page 10-2-18.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAL D-F7BAVL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-M9 D-M9V D-F9W D-F9WV D-A7 D-A80 D-F7V D-F7WV D-F7BAVL D-A7 D-A80 D-A9 D-A9V D-M9V D-F9WV D-A73C D-A80C Bore size (mm) D-A9V D-J79C D-F9BAL D-P5DWL D-A79W D-A79W D-P5DWL D-F9BAL A B A B A B A B A B A B A B U U U U U U U U U U 32 9.5 10 7 8.5 12.5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

B 2 2(B) 4(A) C 1(P) 5(EA) 3(EB) 404 Cassette Type Manifold 10-SZ3000 Dimensions: 10-SZ3000 for EX510 Gateway-type Serial Transmission System 10-SS5Z3-60S6B DStations U[With External Pilot Specifications] (Pitch) M5 x 0.8 P = 10.5 13.3 24 13.3 24 16.2 16.2 17 36.7 34 34 2 B 2 B 2 B 2 B 2 B PE 2 B 2 R R 3 3 P P 1 1 X 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing