C95Series

0.8 V or less 3 V or less 14 Vorless Leak current 24 VDC: 10).1A or less 24 VDC 10).1A or less 24 VDC: lmA or less 100 VAC: 1mA or less 200 VAC: 1.5mA or less Indlcetor lamp.

Environment

VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Profile Design ISO/VDMA Air Cylinder Series CP95

See page 11 for dimensions Mounting accessories, rod GKM KJ JA Rod clevis DIN 71752 Piston rod ball joint DIN 648 Floating joint bore Supplied with bolts and safety devices 32 40 50 63 80 100 GKM 10-20 GKM12-24 GKM16-32 GKM16-32 GKM20-40 GKM20-40 KJ10 D KJ12 D KJ16 D KJ16 D KJ20D KJ20D JA30-10-125 JA40-12-125 JA50-16-150 JA50-16-150 JAH50-20-150 JAH50-20-150 See page 18 for dimensions See

53

kW Input signal Rated load voltage 48 VAC or less/30 VDC or less Maximum load current 500 mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (not usable for inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting

Vacuum Unit

circuit Main circuit White OUT 2 OUT2 OUT1 White OUT 2 Main circuit Main circuit Black OUT 1 Black OUT 1 Load 12 VDC to 24 VDC Load 12 VDC to 24 VDC 12 VDC to 24 VDC ack OUT + Load Load Coil alog output) Load Load + + Load 12 VDC to 24 VDC OUT2 White OUT 2 Load White OUT 2 Red Load COM (+, ) 12 VDC to 24 VDC FUNC Blue DC() Blue DC() Load Red U U Load 24 VDC 24 VDC FUNC Blue DC() Coil

VQZ1000/2000/3000

stations) 21.5 L n 1 2 7.5 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5 137.5 150 175 60.5 73 85.5 98 110.5 123 135.5 135.5 173 148 160.5 185.5 n L L1 L2 L3 13 14 16 17 18 21 22 24 15 19 20 23 163 174 196 207 218 251 262 284 185 229 240 273 187.5 187.5 212.5 225 237.5 262.5 275 300 200 250 250 287.5 198 198 223 235.5

LJ1H

Applicable strokes:150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LJ1S2021SC-150-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Mounting orientation Load movement direction Model Pitching Rolling Yawing 5.5 6.0 8.5 a = 500 LJ1S20 150 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a a = 1000 L1 (mm) L2 (mm) L3 (mm) 100 a = 2000 Pitching Rolling

V

83.1 75.6 81.1 73.6 52.8 45.3 30.7 26.7 19 21 39 ASV410F-01-10S 10 R(PT)1/8 12 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 30.7 26.7 21 23 41 T H R E A D ASV410F-02-08S 8 R(PT)1/4 14 19.3 15.2 24 83.1 75.6 81.1 73.6 52.8 45.3 34.7 28.7 19 21 47 ASV410F-02-10S 10 R(PT)1/4 14 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 34.7 28.7 21 23 49 PT* Remove (N) when ordering N NPT ASV410F-03-08S 8 R(

LEC-OM07605CN

DC24V1 3 23 3. 3.8.2 3.5(I/O) (1) DI-1 () 3.8.3 EM2 5 mA 6.2k TR DICOM VCES10V ICEO100A DC24V 10% 300mA (2) DO-1 ON (D) (R) (:40mA:50mA:100mA) 2.6V 3.8.3 ALM ALM DOCOM () DC 24 V 10% ()DC24V10% 300 mA 300mA . (2.6V)( 26.4V) 3 24 3. (3)DO-2() (a) 35mA LA (LB LZ) L A (LB LZ) 100 Am26LS32 150 LAR (LBR LZR) LAR (LBR LZR) LG SD SD (b) CCW LA (T)[Pr. PA15][Pr.

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

0.5

Ground the F.G. cable with a resistance of 100 or less +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V 0 V 0 V DC/DC Power supply 24 VDC Power supply 24 VDC Blue (2 pcs.) 0 V 0 V 0 V DC/DC 0 V Blue (2 pcs.) 0 V 0 V F . G. F . G.

SMC

10.5 24 H B A 10.5 10.5 5.1 9.5 26 1 5H9 depth 4 +0.030 0 6 NN-M6 x 1 thread depth 12 B A 5H9 depth 4 +0.030 0 Section AA Section BB GA HA (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 NA 2 2 2 2 2 4 4 4

Nozzle Type Ionizer

Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.

IDG

(Refer to page 14-19-24.)

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

LEC-OM02904

UL/C-ULK5 2. 80ms 11 24 11 11.7 (1) (a) () SD 1 (3.12) (b) ( ) (c) () 11 25 11 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1.()(FR-BIF-(H)) 2.

Lightweight and Compact

100/150 Rated load voltage 48 VAC or less/30 VDC or less Maximum load current 500 mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal HRSH 090 HRSH To the thermo-chiller Users equipment side HRSE 7 24 VDC 6 24 VDC output (500 mA MAX) 5 HRZ 15 14 HRZD 24 VCOM output 13 24 VCOM HRW Signal description Default

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222