Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

160 258 100 50 185 75 308 125 (Z) 4-M4 x 0.7 thread depth 6 6 (30) (30) 210 358 100 150 2-M6 x 1 thread depth 10 235 408 175 125 260 458 150 200 285 508 225 175 0.2 310 200 558 250 Only the CXSW20-10 has a groove cut out for installing auto switches.

Series VQ Metal Seal/Rubber Seal Body Ported

175 185.5 5 77.5 88 162.5 173 4 67 77.5 150 160.5 3 56.5 67 150 160.5 2 46 56.5 137.5 148 VQ4 25 35.5 112.5 123 L1 L2 L3 L4 VQZ Dimensions/Top entry connector [FU] (mm) VQD n L 1 100 110.5 16 15 250 260.5 14 237.5 248 13 237.5 248 12 225 235.5 11 212.5 223 10 200 210.5 9 187.5 198 8 175 185.5 7 162.5 173 6 162.5 173 5 150 160.5 4 137.5 148 3 125 135.5 2 112.5 123 L3 L4 100 110.5 VZS How

CHKD/CHKG

) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100

7

knuckle joint Press-fit spring pin 3 x 22 L 10 +0.022 H8 0 13 Press-fit spring pin 3 x 22 L Shaft: 10 Hole: 10 13 0.040 d9 0.076 +0.022 H8 0 24 24 C7 C7 30 +0.5 +0.2 12 0.1 0.3 12 41.2 26 24 18 36 36 D48 48 Please contact SMC for details of the CKGA32 series.

IDG

/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 S With dew point indicator R Flow direction (Right Left) 5 Standard equipment 10 20 30 50 60 75 100 Note) In the case of two or more options, indicate them alphabetically.

Air Cylinder Series MB

50 75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 37.5 50 75 100 125 101 114 126 139 164 189 214 56 29 12.5 25 150 239 175 200 264 289 37.5 50 75 100 125 101 114 126 139 164 189 214 61 29 12.5 25 150 239 175 200 264 289 125 10 75 27 20 30 40 60 80 100 120 130 140 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket Refer to Basic/(B) for other dimensions

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-3 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 100 VAC (50 Hz) 110 VAC (60 Hz) 15 kg IDF-TR1000-3 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 1 kVA Singlephase Singleturn 230 207 190 210 160 9 IDF-TR500-4 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10

JIS Standard Hydraulic Cylinder

8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F

Series AK1000

Refer to gauge guide (P.94, 95). qIN wOUT erGauge port (Outlet) Specifications AK9202 1 to 30 psig (0.007 to 0.2 MPa) Ak9215 5 to 150 psig (0.034 to 1.0 MPa) Select compatible materials of construction for the gas Vacuum to 300 psig (2.1 MPa) 450 psig (3.1 MPa) 1500 psig (10.3 MPa) 40 to 160F (40 to 71C) (No freezing) 1.6 1 x 10-10 Pam3/sec NPT 3/4 inch 7 psig (0.048 MPa) rise in delivery

LEC-OM02704CN

10 .2 10.1 .2 10.2 .3 10.3 CC-Link .3 10.4 .4 10.4.1 .4 10.4.2 .5 10.4.3 .14 10.5 .16 10 1 10 10 10.1 MR Configurator 1 LED LED CN6CN2CN3 1. 2.

AZ1000

MPa) 5 to 150 psig (0.034 to 1.0 MPa) (Source pressure 1000 psig or less) 1) Preset to 250 psig (1.7 MPa) 2) 2 to 100 psig (0.014 to 0.7 MPa) Delivery pressure Select compatible materials of construction for the gas Gas Vacuum to 1700 psig (11.7 MPa) Source pressure 2550 psig (17.6 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 3) 0.65 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec

CJ2X/CUX/CQSX/CQ2X/CM2X

MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

-32 UNF 0.625 0.75 1.12 0.38 0.88 0.34 0.62 0.81 0.12 1.00 1/8 1.00 0.093 0.22 1/4-28 10-32 UNF 1/4-20 0.250 106 (1 1/16") 10-32 UNF 0.750 0.75 1.47 0.62 1.22 0.47 0.81 0.24 1.12 1.25 1/8 1.25 0.093 0.25 3/16-24 10-32 UNF 1/4-20 0.312 150 (1 1/2") 1/4-20 NUC 1.00 1.25 1.93 0.88 1.57 0.38 1.12 1.56 0.25 1.75 1/4 1.75 0.125 0.38 7/16-20 1/4-20 NUC 5/16-18 0.437 Block Mounting Type (in) ZB2

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

REA/REB

Speed 600 mm/s REAS25 8 4 7 10 11 6.5 26.4 16 8.5 70 54 40 20 14 REAS32 8 5 7 12.5 14 8 33.6 20 9.5 86 66 46 24 16 REAS40 10 5 10 12.5 14 8 41.6 25 10.5 104 76 57 25 20 J x K HP HS HT L LD M MM N NN Model REAS15 M8 x 1.0 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5 x 0.8 7.5 REAS20 M10 x 1.0 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 REAS25 M14 x 1.5 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0

Lightweight and Compact

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling

HRL

Cooling Capacity HRL100-Am-20 (CH1)1 HRL200-Am-20 (CH1)1 14 30 12 Technical Data HRS-R HRS HRS090 HRS 100/150 HRS200 HRSH090 HRSH HRSE HRR HRL HRZ HRZD HRW HECR HEC HED HEB 25 Ambient temperature 32C Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 20 8 15 6 10 Ambient temperature 45C 4 Ambient temperature 45C 5 2 0 0 15 20 25 15 20 25 Circulating fluid temperature [