Thermo-chiller/Rack Mount Type

Contact output signal 3 Output Alarm signal (N.C. type) 15 9 D-sub 15-pin female (socket) type Contact input/output signal connector 30 HRR Series For details, refer to the Operation Manual on the SMC website.

NCA1

/16 2 1/4 200 (2") 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2 1/2 0.3 3/8 1.26 1.06 7/16 5/16-18 1.84 1 1.71 3 5/8 2.4 4 3/4 7/8 1 15/16 2 1/4 CS1 250 (2.5") 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 1.3 1.06 19/32 3/8-16 2.19 1 1.75 3 3/4 2.48 4 7/8 1 1/4 1 15/16 2 3/8 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-15-15 15 Series NCA1K Non-rotating Rod-Foot Style: NCA1KL (MS1 mounting

NCA1

/16 2 1/4 200 (2") 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2 1/2 0.3 3/8 1.26 1.06 7/16 5/16-18 1.84 1 1.71 3 5/8 2.4 4 3/4 7/8 1 15/16 2 1/4 CS1 250 (2.5") 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 1.3 1.06 19/32 3/8-16 2.19 1 1.75 3 3/4 2.48 4 7/8 1 1/4 1 15/16 2 3/8 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-15-15 15 Series NCA1K Non-rotating Rod-Foot Style: NCA1KL (MS1 mounting

CXS

When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.

CXS

When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.

JXCx-OMU0004

16 15 L 11 30.7 64 No.JXC-OMU0004-A 12.

CQS

5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 1*

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

15 18.3 15 6 6 9 9 With air cushion Air cushion type is not available for 21-/22-CJ2.

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

SV

L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17

LEC-OM07605CN

0 250 350 40 0 300 0 50 150 250 350 350 (1,2 [%]) (1,2 [%]) b a 1. ()30r/min100% 2. 300%350%LE-T10.1 10 3 10. 10.2 (1) 10.1 10.1 1 (1) (2) [W] 2] [m [kVA] LECSS2-T5 LE-T50.3 25 15 0.5 LE-T60.3 25 15 0.5 LECSS2-T7 LE-T70.5 25 15 0.5 LECSS2-T8 LE-T80.9 35 15 0.7 LECSS2-T9 LE-T91.3 50 15 1.0 1. . 2

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Tie-rod Type Hydraulic Cylinder

(same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) 1 pc. 100 100 110 120 15 1 or 2 pcs. (different surfaces/same surface) 120 120 130 140 D-F5W, J59W D-F5BA D-F59F D-F5NT 15 140 + 55 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 (n 2) 2 120 + 55 120 + 55 130 + 55 "n" pcs.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Applicable Auto Switch Model

17 17 17 17 17 17 13 13 13 14 14 15 Note) Average value at normal temperature including hysteresis.

•

.:) zpno 10 12 171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 . ZPT25 (8.5) (8) (17) (16)I,S.5) (81 1 17l (16) (10) (10) (18) (17) (S.S) (8) (171 (16) ZPT~2 . 1(29) (27) (25) (30)1129) (27) (29),(27) (25) * On parentheses. 1 are figures fOf female thread connecllons.

Thermo-chiller

Applicable model Min. operating flow rate [L/min] HRL-BP002 HRLE050-m-m CH1: 15/15 (50/60 Hz) CH2: 1/1 (50/60 Hz) HRL-BP001 HRLE090-m-m CH1: 25/35 (50/60 Hz) CH2: 1/1 (50/60 Hz) CH1 Circulating fluid return port Applicable hose I.D.: 19: HRL-BP001 Applicable hose I.D.: 15: HRL-BP002 u q r t i !0 CH2 Circulating fluid return port Applicable hose I.D.: 15 o u !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port