Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

CA2

D-B5/B64 D-B59W D-G5/K59 Sliding Resistance of the Low Friction Side D-G5W/K59W BA-04 BA-05 BA-06 BA-08 BA-10 D-G59F D-G5NTL D-A3C/A44C Sliding resistance f (MPa) (Converted into resistance pressure for each cylinder) BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL Bore size 40 50 63 BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 80

Shock Absorbers and Rate Controls

{l$odell D T G H JA t8 JH HPt | 0tt-l 8.5 r-t2 ut{F .31 .88 5.45 .88 .19 HPt t0tr-2 0-) l-12 tJlt t . J l .88 5.45 .88 .81 1.30 t.r3 l 0 HPt l0tf-3 8.5 l.l2 uilt .31 .88 5.45 .88 .81 1.30 .19 A[ d]mer Usable Adjustment Settings Sizing Graph 2eo 260 ?l 240 cff: E 180 160 o 140 q 120 i 1oo 240 260 ^ 244 E o d F{ o. E 20o > 180 o F 100 ?

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

G H C4,N3 C6,N7 4 3.5 19.5 3.5 B A P R1 16 15 10.6 R2 One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" 32.3 (3.2) 21 M5 x 0.8 (P, R1, R2 port) (2.3) L plug connector (L): 10-SYJ5123-L-M5(-F) M plug connector (M): 10-SYJ5123-M-M5(-F) DIN Terminal (D): 10-SYJ5123-D-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

[Option] Light/Surge voltage suppressor Electrical entry for G, H, L, M, W Electrical entry for D, Y Directional Control Valves Air Grippers Modular F. R.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

0.4

(D-sub connector) y u @0 i o !

Series SV

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

REA/REB

D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 103 103 47 47 78 78 22

REA/REB

/J79 D-J79C D-F7V D-F7NTL D-F7W/J79W D-F7WV D-F7BAL D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7LF D-F79F Bore size (mm) B A 10 6 3 4.5 (mm) 15 6 4 4.5 Dimension A Dimension B 20 6 3 4.5 Auto switch model D-A72 D-A72 25 6 3 4.5 D-F7W/J79W D-F7WV D-F7LF Note 1) D-F7W/J79W D-F7WV D-F7LF Note 1) D-F79F D-F7BAL D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V

CV/MVGQ

(Not mountable after the time of shipment) RHC MK(2) Auto Switch Mounting Height RS Q G D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7lWV D-A44 D-A44C D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W RS H A RZQ Bore size (mm) Hs Ht Hs Hs Hs Ht Hs Hs Ht Hs Ht Hs Hw Hs Hw MI W S

CV/MVGQ

(Not mountable after the time of shipment) RHC MK(2) Auto Switch Mounting Height RS Q G D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7lWV D-A44 D-A44C D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W RS H A RZQ Bore size (mm) Hs Ht Hs Ht Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw MI W S

Air Cylinder

Rod flange G Head flange U* Rod trunnion T* Head trunnion D Clevis Nil 2 pcs.

REA/REB

MK(2) 25 to 40 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model RS Q G D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) RS H A 25 18 99 43 74 74 99 43 18 32 RZQ 21.5 46.5 46.5 83.5 83.5 108.5 108.5 21.5 40 23.5 48.5 48.5 99.5 99.5 124.5 124.5 23.5 MI W S Operating Range CEP1 Bore size (mm) Auto switch model

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Table of Contents

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

2 Phase Stepper Motor/Without Motor Brake Series LXS

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.