CG1-OM0227

PTFE X446 GR-F-005(5g) 1) 25 2) () 5. 11. 26 6. 12. 27 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

IR1000/2000/3000

Example 1) 0.4MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2MPa setting 2pcs., 0.4MPa setting 2pcs., 0.8MPa setting 1pc. with 5 stations IRM20-5G-021221 Copper-free specifications Ozone Resistant Specifications 3 Accessory (pressure gauge) Nil None Fluoro rubber is used for rubber seal materials.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5G (Tube O.D. 1/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

This is a legacy product, and replaced byVFS2420R-5G-02T, VALVE SOL/PILOT 24VDC1/4 *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, EG, VFS2000 BODY PT 1/4NPT (F), 0.88844 lb

This is a legacy product, and replaced byVFS3120-5G-03T, VALVE SOL/PILOT 24VDC *LQA, VALVE, VFS3000 SOL VALVE 4/5 PORT, GD, VFS3000 BODY PT 3/8NPT (F), .72600 lb

This is a legacy product, and replaced byVFS1120-5G-01T, VALVE SOL/PILOT 24VDC *LQA, VALVE, VFS1000 SOL VALVE 4/5 PORT, CD, VFS1000 BODY PT 1/8NPT (F), 0.396 lb

This is a legacy product, and replaced byVFS2120-5G-02T, VALVE SOL/PILOT 24VDC *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, ED, VFS2000 BODY PT 1/4NPT (F), 0.572 lb

This is a legacy product, and replaced bySYJ3120-5G-M3-F

Size: 2 (20), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 302 (Orifice Diameter: ø3.2mm; Port Size: 1/4), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Coil Orientation: U (Downward), Blow Port Position: F (Front)

Size: 40, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø4mm; Port Size: 3/8, Thread Type: G, Rated Voltage: 24 VDC, Electrical Entry: DIN Terminal w/Light, w/Surge Voltage Suppressor, Coil Orientation: Downward, Blow Port Position: Coil Orientation Upward: Bottom; Coil Orientation Downward: Top, Oil-free Option: Oil-free

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: F (G), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor), Coil Orientation: U (Downward), Blow Port Position: Coil Orientation Upward: Bottom; Coil Orientation Downward: Top, Oil-free Option: D (Oil-free)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 402 (Orifice Diameter: ø4mm; Port Size: 1/4), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor), Coil Orientation: U (Downward), Blow Port Position: Coil Orientation Upward: Bottom; Coil Orientation Downward: Top, Oil-free

Size: 20, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø3.2mm; Port Size: 1/8, Thread Type: Rc, Rated Voltage: 24 VDC, Electrical Entry: Grommet, Coil Orientation: Downward, Blow Port Position: Front, Oil-free Option: Oil-free

Size: 2 (20), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 301 (Orifice Diameter: ø3.2mm; Port Size: 1/8), Thread Type: R (Rc), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Coil Orientation: U (Downward), Blow Port Position: F (Front), Oil-free Option: D (Oil-free)

MODULAR MOUNTING 2 PORT VALVE, MODULAR 2 PORT SOLENOID VALVE, P93, 680.00000 lb

MODULAR 2 PORT SOLENOID VALVE. MODULAR MOUNTING 2 PORT VALVE. 680.00000 lb. P93.

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D