Size: 32, Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: CL1 (IO-Link), Mounting: 7 (Screw Mounting)

Size: 32, Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: None, Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 32, Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: RB (15m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 32, Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: RB (15m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 32, Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Parallel I/O Type: 6 (PNP), Mounting: 8 (DIN Rail Mounting), Cable Connector: None, Actuator: LEY, Type: None, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting, Lead: A (25: 12mm; 32, 40: 16mm), Stroke: 150mm

Parallel I/O Type: 6 (PNP), Mounting: 8 (DIN Rail Mounting), Cable Connector: None, Actuator: LEY, Type: None, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting, Lead: A (25: 12mm; 32, 40: 16mm), Stroke: 200mm

Parallel I/O Type: 6 (PNP), Mounting: 8 (DIN Rail Mounting), Cable Connector: 3 (3), Actuator: LEY, Type: None, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting, Lead: A (25: 12mm; 32, 40: 16mm), Stroke: 500mm

Secondary Batteries

Mounting style B F Basic style Front mounting flange style Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Long stroke (mm) Bore size 20 25 32 40 50 20 mm 20 75, 100, 125, 150, 200 250, 300, 350, 400 25 mm 25 350, 400, 450, 500 32 mm 350, 400, 450, 500, 600 32 40 mm 50 mm 75, 100, 125, 150, 200 250, 300 350, 400, 450, 500, 600, 700, 800 40 350, 400, 450, 500, 600, 700, 800, 900,

2

Applicable air dryer IDF100F IDF125F, 150F IDF190D, 240D IDF370D Capacity Type 360 400 400 400 7 kVA 9 kVA 14 kVA 18 kVA 540 650 650 650 400 450 450 450 260 300 300 300 300 350 350 350 11 13 13 13 30 40 40 40 94 kg Three220, 240, 380, 400, 415, 440 V (50/60 Hz) phase 109 kg 200V (50/60 Hz) D 4 x F A Double152 kg turn (mm) 179 kg 43 Optional Accessories Series IDF/IDU Air Preparation Equipment

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa

TABLE OF CONTENTS

MANIFOLD MOUNTING FLANGE MOUNTING Option H Option E .350 (8.9) .340 (8.6) x .047-.052 DEEP (1.2) (1.3) 2 PLACES .350 (8.9) .340 (8.6) x .047-.052 DEEP (1.2) (1.3) 2 PLACES 9/32 (7.14) DIA. 3 HOLES EQUALLY SPACED on 2 3/8 (60.3) B.C.

SQ1000/2000

450 Station 3 Station 15 230 470 Station 4 Station 16 250 490 Station 5 Station 17 270 510 Station 6 Station 18 For double wiring SSQ1000 P 41A 350 290 530 Station 7 Station 19 310 550 Station 8 Station 20 330 570 Station 9 Station 21 350 590 Station 10 Station 22 L 370 610 Station 11 Station 23 390 630 Station 12 Station 24 410 Station 13 108 Series SQ1000/2000 How to Add Manifold Stations

Compact

250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 48 20 1000 Page 170 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 10 25 LEMH Linear guide single axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000),

Table of Contents

C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve. Note 2) Drain piping, or piping for a stop valve, like a ball valve, is required. 850 size comes with a ball valve. substitute with (Symbol: A).

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175