Table of Contents

fitting Connection 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.

Air Cylinder

MB1 D-B59W 15 20 75 20 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-G39A Note 4) D-K39A D-A3lA D-A44A 10 35 100 35 + 30 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 3, 4, 5) CA2 CS1 CS2 Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

10

7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 JCM CM2 CM3

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Applicable Auto Switch Model

H HW C 44 52 64 78 92 H' T T' Z Actuator series 50 63 80 100 D-A3lC-4, D-A44C-4 D-A3lC-5, D-A44C-5 D-A3lC-6, D-A44C-6 D-A3lC-8, D-A44C-8 D-A3lC-10, D-A44C-10 58(67.5) 50.5(60) CDA1, CDBA1, CDV3, CDVS, CDLA, CDL1, CNA 69 77 91 107 121 6.5 6.5 7.5 9.5 9.5 40 50 63 80 100 7.5 8.5 10.5 12.5 15.5 M5 X 0.8 X 16 9 10 11 11 11 59(68.5) 51.5(61) 61.5(71) 53(62.5) M5 X 0.8 X 20 65(74.5) 54.5(64) Note

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Applicable solenoid valves: Series 10-SY3 0, 10-SY5 0, 10-SY7 0, 10-SY9 0 2 4 6 2 4 6 2 4 6 2 4 20 40 45 60 3 5 7 9 X90 10 SY Model no. Entry is the same as standard products. Specifications and performance are the same as standard products.

C95

20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n-2)/2 n = 2, 4, 6, 8 160 10 10 + 55(n-2)/2 n = 2, 4, 6, 8 A5 A6 2 A59W n 15

Table of Contents

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 8, 10 Metric size 6, 8, 10 3.2, 4 4 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8" 5/32" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 230 180 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 3.5 2.7 4 6 7 10 12 14 24 26 Effective area (mm2) Note)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Auto switch model Bore size (mm) Operating Range 100 20 25 32 40 50 63 80 D-C7/C80 D-C73C/C80C D-B5/B64 11 10 10 9 10 8 11 17 10 14 10 14 9 14 10 13 8 13 11 16 11 18 D-B59W D-H7/H7W D-H7NF/H7BAL 6.5 6 5 4.5 4 4 D-H7C 10.5 9.5 10 9 8.5 7 D-G5/G5W/G59F D-G5BAL/K59/K59W 7 6.5 D-G5NBL D-G5NTL 7 50 6.5 45 6.5 45 6 45 5 45 4.5 40 4 40 4 35 Since this is a guideline including hysteresis,

Integrated Controller

W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

100 D-A3lC D-G39C D-K39C Different surfaces 20 + 35 (n 2) (n = 2, 3, 4, ) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) n Same surface 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 10

MB

n2) n = 2, 4, 6, 8 85 + 30 (n2) n = 2, 4, 6, 8 95 + 100 (n2) n = 2, 4, 6, 8 100 + 100 (n2) n = 2, 4, 6, 8 105 + 100 (n2) n = 2, 4, 6, 8 110 + 100 (n2) n = 2, 4, 6, 8 90 + 30 (n2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) 90 + 100 (n2) n = 2, 4, 6, 8 125 + 100 (n2) n = 2, 4, 6, 8 n (Same side) 1 60 65 75 80 85 90 90 90 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 70

LEC-OM02704CN

[0][1][F][F] (16)10 8 (8) ([5][4]) [5][4] [0][1][F][F] (16)10 8 (9) ([5][8]) [5][8] [0][1][F][F] (16)10 8 (10)(DWELL)([6][0]) [6][0] [0][1][F][F] (DWELL) (16)10 8 (11)([6][4]) [6][4] [0][1][F][F] (16)10 8 (12)([1][F]) [1][F] [0][0] 4 (13) ([0][0]) [0][0] [1][2] 0() 0001JOG 0002 0003 0004(DO) 00051 4 14 14 14 (14) [0][2] [9][0] 8 [9][1] 8 [7][0] 16 14.4.2 (1) ([8][1]) [8][1] [0]

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces) 90 + 100 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 125 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 With n pcs. (Same surface) 60 65 75 80 85 90 10 With 1 pc. With 2 pcs. (Different surfaces) 70 75 80 85 90 35 With 2 pcs.

MGP

MGP 5 4 3 10 MGQ 5 10 100 200 20 30 40 50 1 100 10 200 20 30 40 50 2 3 4 5 MGG Eccentric distance l (mm) Eccentric distance l (mm) MGC Over 75 stroke Over 125 stroke MGF 100 100 63 200 P=0.5MPa P=0.5MPa CY1 80 100 50 Load weight m (kg) Load weight m (kg) MY1 50 40 40 50 30 40 30 32 20 20 10 10 100 10 10 100 200 20 30 40 50 20 30 40 50 200 Eccentric distance l (mm) Eccentric distance l (mm

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

) VQ4 57.5 52.5 51 VQ5 3(R) 1(P) 3(R) 1(P) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 16 32 VQZ 17 4 VQD 10 4 10 P = 11 L2 36.5 41.5 L1 45 M plug connector (M) D side U side Stations 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 4(A), 2(B) port

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 1/8 8 N3 N7 N9 6 4 Top M5 x 0.8 10-SYJ300 Body ported Base mounted 10-SYJ500 Top 1/8 1/8 10-SYJ700 Top 1/4 M5 x 0.8 10-SYJ300 Side 1/8 Bottom 10-SYJ500 1/8 Side 1/8 Bottom 10-SYJ700 1/4 Side 1/4 Series 10-SYJ300 Series 10-SYJ500 Series 10-SYJ700 658 Series 10-SYJ300 Rubber seal 3 Port / Pilot operated solenoid valve Air cylinder Rotary actuator Air gripper Directional control valve

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

CJ2

71 70 71.5 89 88 87.5 47 46 47.5 D-A7 D-A80 101 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F 10 17.5 100 D-A7/A80 16 20.5 101.5 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL D-F7BAVL 10 23.5 D-A73C D-A80C 10 3.5 10 17.5 29.5 41.5 16 26.5 D-F7V/F7BAVL 10 16 10 16 10 16 20 23 23 26 19 22 D-F7WV 16 4 9.5 18 30 42 72 48 90 102 D-J79C 10 16 0.5 1 7 6.5 14.5 15 26.5

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 100 100 110 120 10 D-A5, A6 D-F5, J59 10 + 55 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 55 120 + 55 100 + 55 (n = 4, 8, 12, 16 )Note 2) 100 + 55 "n" pcs. (same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) 2 pcs.