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Type 42 (5 Port/Base mounted) How to Order SS5YJ742 05 C6 Applicable interface regulator ARBYJ7000-00-P Thread type A, B port size Stations C6 Nil F N T 02 Rc G NPT NPTF One-touch fitting for 6 2 stations + + P port 1/4 C8 : One-touch fitting for 8 : B R P R N7 20 One-touch fitting for 1/4" 20 stations A, B port A N9 One-touch fitting for 5/16" R port 1/4 B Note) For more than stations,

0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa Inlet pressure MPa AW40 AW20 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 58 AW10 to 40

(mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!

Air Operating pressure -6 -3oinHq C150 760mmHq) Applicable adsorption nozzle diamelr (smil) 00.G00.7 (re'er 10 grapn 1)l 00.5^01.2 (rete'to oraph 2l Hystaresis 0.'

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

VY1200-00-N VEX3222-5M Description E-P HYREG valve 3 position valve No. q w VE VY Exclusive controller VYU5-D G Rotary switch, Trimmer container 4-4.5 AL STOP START SEL. SW RESET RUN2 RUN1 OV SET UP 68 0.2 SET UP 7 31 BALANCE CONTROLLER VYU5-D 80 56 ERR.

Air Operating pressure -6 -3oinHq C150 760mmHq) Applicable adsorption nozzle diamelr (smil) 00.G00.7 (re'er 10 grapn 1)l 00.5^01.2 (rete'to oraph 2l Hystaresis 0.'

NPT M5 x 0.8, C4 P port P port T NPTF A port size A 1/8 1/8 M5 M5 x 0.8 R port Applicable blanking plate assembly Refer to page 610. 1/8 A port M5 x 0.8, C4 C4 4 One-touch fitting N3 5/32" One-touch fitting Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port. 611 3 Port Pilot Solenoid Valve 10-SYJ300 Type 20 Manifold: Top Ported/10-SS3YJ3-20Stations -00

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

Parameter Setting Hardware Configuration (GSDML file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

(P.12) ) 84 - 21. 1byte 2byte 4byte 2byte 4byte (1)2byte 2byte Output Byte6,Byte7 100mm/s IO Output 12byte 100mm/s 16 0064h 00 64 h (2)4byte 64h 00h Byte6 Byte7 Bit7 Bit0 4byte Output Byte8Byte11 700.00mm IO Output 12byte 0.01mm 700.00mm 10 7016 00011170h 00 01 11 70 h (3) 11h 70h Byte8 Byte9 (6) 01h 00h Byte10 Byte11 ALM Bit7 Bit0 4byte Output Byte8Byte11 -700.00mm IO

COMBINATION UNITS MODULAR TYPE (N)AC1000(N)AC6000 M51" C o m b i n a t i o n o f f i l t e r, re g u l a t o r a n d l u b r i c a t o r i n c l u d i n g mounting bracket and pressure gauge H O W T O O R D E R FILTER/REGULATOR/LUBRICATOR (N)AC 00 G T E C H N I C A L SPECIFICATIONS D R A I N Manual drain D Auto drain Japanese N North American Model NAC1000 NAC2000 NAC3000 NAC4000 NAC5000

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M