LEC-OM07605CN

/60Hz [A] 0.9 1.5 2.6 3.8 AC170V264V 5% [kVA] 10.2 [A] 10.5 AC200V240V50Hz/60Hz [A] 0.2 AC170V264V 5% [W] 30 [A] 10.5 DC24V10% [A] (1) 0.3(CN8) PWM SSCNET/H(5) 0.222ms0.444ms0.888ms USB ((MR Configurator2)) (ABZ) 2 () STO(IEC/EN 61800-5-2) EN ISO 13849-1 3 PL dEN 61508 SIL 2 EN 62061 SIL CL2EN 61800-5-2 SIL 2 8ms(STOOFF) (3) (STO) 1Hz25Hz OFF1ms (MTTFd) 100 (DC) (90%99%

Air Preparation Equipment

How to Order Elements EJ T S 701 002 Element seal T PTFE Element classification EJ HEPO2 Filtration accuracy (Filtration efficiency 99%) Element size symbol 002 004 006 013 701 801 901 2 m 4 m 6 m 13 m For FGH100 For FGH200 For FGH300 Specifications Membrane Element for Series FGH Series ED EDS-X40 Model EDS-X20 Filtration accuracy(Filtration efficiency 99.9%) Note 1) 0.4 0.2 6,200 4,000

REA/REB

MK(2) 25 to 40 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model RS Q G D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) RS H A 25 18 99 43 74 74 99 43 18 32 RZQ 21.5 46.5 46.5 83.5 83.5 108.5 108.5 21.5 40 23.5 48.5 48.5 99.5 99.5 124.5 124.5 23.5 MI W S Operating Range CEP1 Bore size (mm) Auto switch model

Vacuum

How to Order Zprseriesf willill,'-,"J".1.. ... .. ... .3i ZpF Seriesf Withor.]t_Buffer. .99 ' w r r n H U e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i 0 0 Zpyseriesf willilr?

SQ1000/2000

Note) Indicate "LO" when ordering centralized wiring type manifolds, F, P, and J kits, since the lead wire will be attached to the manifold side. 80 Series SQ2000 Manifold Options Labeling plate (-N) SSQ2000-N3-n External pilot specification (-R) Blanking plate SSQ2000-10A-4 Individual SUP/EXH spacer SSQ2000-PR1-4P. 98 P. 99 P. 101 P. 102 C8 L8 External pilot port SUP/EXH block SSQ2000-PR

MGP

FB 50 Stroke 66 67.5 109 109 117.5 117.5 121 141 51 Stroke or more 97.5 99 114 114 129 129 148 166 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 * Other dimensions are same as standard.

Vacuum

How to Order Zprseriesf willill,'-,"J".1.. ... .. ... .3i ZpF Seriesf Withor.]t_Buffer. .99 ' w r r n H U e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i 0 0 Zpyseriesf willilr?

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Up to 2000 38 163 30 9 5 4 4 105 16 16 37.5 35 M6 x 1 13 24 G 1/4 14 6.5 M12 x 1.25 54 Up to 1000 Up to 2000 46.5 179 37 10.5 6 4 4 106 16 20 37.5 40 M8 x 1.25 17 32 G 1/4 15.5 8 M16 x 1.5 66 Up to 1000 Up to 2000 56.5 194 37 12 9 4 4 121 16 20 45 45 M8 x 1.25 17 32 G 3/8 16.5 8 M16 x 1.5 77 Up to 1000 Up to 2000 72 218 46 14 11.5 4 4 128 17 25 45 45 M10 x 1.5 22 40 G 3/8 19 10 M20 x 1.5 99

Stroke Reading Cylinder and Counter

Settings can be made from 00 to 99. Store the setting with the SET key. DOWN FUNC. FUNC. 3-9 SEL. key Digital filter Select ON or OFF with the UP/DOWN key. Store the setting with the SET key. DNote) When the digital filter setting (ON/OFF) is changed, an error count will occur. Reset the count value.

39

PD0.05 VB0.1 PC0.05 PA0.02 VC0.1 VD0.05 GC K +0.1 0 VF LA0.1 GB GA VE N9 L VA0.02 2 x V H7 Depth I C 4 x NN Depth S 2 x 2 x PH7 Depth D 2 x 2 x MM Depth J Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc E RB B (mm) Bore size (mm) B C D E GA GC I J K L LA LB MM GB N NA NB NC NN P 50 63 92 48 12 13.7 95 166 10 12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99

3 Port Air Operated Valve

N.O. 40 12 NC 51.5 115.1 107.1 107.1 115.1 86 24 1P 51.5 NO 12 1/2 1(P) port 1/8 12(PA) port (Pitch) P = 41 8 37 M5 x 0.8 (Breathing hole) L1 L2 (Station n) (Station 1) 1/8 12(PA) port 12 127 94.5 78.2 2A 2A 63 19 1/2 2(A) port (Pitch) P = 41 37 2 stations 115 99 156 140 197 181 238 222 279 263 320 304 361 345 402 386 443 427 484 468 525 509 566 550 607 591 648 632 689 673 730 714 771 755

0.4

129 118.5 108 97.5 87 76.5 66 55.5 364.5 354 343.5 333 322.5 312 301.5 291 280.5 270 259.5 249 238.5 228 217.5 207 196.5 186 175.5 165 VFR 387.5 375 375 362.5 350 337.5 325 312.5 300 300 287.5 275 262.5 250 237.5 237.5 225 212.5 200 187.5 398 385.5 385.5 373 360.5 348 335.5 323 310.5 310.5 298 285.5 273 260.5 248 248 235.5 223 210.5 198 VQ7 (L4) (L3) VV5QC21 (5.25) L2 L1 P = 16 38.5 1 1 99

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage Seal material Leakage rate (Water) Note) Fluid temperature (C) Ambient temperature (C) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 1 to 99 20 to 60 EPDM 0.2 cm3/min or less 1 cm3/min or less Note) No freezing External Leakage Seal material Leakage rate (Water) Note) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 0.1

CRB2/CRBU2/CRB1

Do not apply loads to the shaft exceeding the values shown on page 99. Applying loads exceeding the allowable values to the actuator can cause the actuator to malfunction and leading to bodily injury and damage to equipment and machinery.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications Through the adoption of an element that is used exclusively for removing water drops and the provision of ample housing interior space, a 99% water removal rate has been achieved.

REA/REB

D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 32 10 28 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25 to 40 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 18 97 99

Rotary Cylinder Series MRQ Size: 32, 40 1

. + 5 95 (mm) E Mounting screw Y Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

89.5 49 74 39.5 64.5 49 74 39.5 64.5 27.5 27.5 15.5 124 124 25 25 114.5 114.5 24 99 89.5 49 74 39.5 64.5 49 74 39.5 64.5 30 30 15.5 D-B5 D-B6 D-B5 D-B6 125 125 32 32 115.5 115.5 25 100 90.5 50 75 40.5 65.5 50 75 40.5 65.5 33.5 33.5 15.5 129.5 129.5 40 40 117.5 117.5 29.5 104.5 92.5 54.5 79.5 42.5 67.5 54.5 79.5 42.5 67.5 38 38 19 20 20 25.5 100.5 91 50.5 75.5 41 66 50.5 75.5 41 66 27.5 27.5

CQS

Stroke range Stroke range Bore size Bore size Long stroke 31 to 99 31 to 99 12, 16 12, 16 Stroke range 51 to 199 51 to 199 20 20 51 to 299 51 to 299 25 25 Part no.: CQSB25-47D-XB10 Makes 47 stroke tube. B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside. B dimension is 72.5 mm.