MQQ

to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

CNS

weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 3000 3000 2000 2000 160 140 125 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 160 600 600 140 500 500

VM

VR2110-01 Model Supply pressure 0.1 to 1.0 MPa Signal pressure 0.25 to 0.8 MPa SA 0.5 to 60 s Time delay Repeatability 10% F.S.

Table of Contents

500 Maximum speed (mm/s) 2.

ZR

With surge voltage suppressor S S and Z are not available for grommet style (DC). S is not available for AC. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged.

JIS Standard Hydraulic Cylinder

+ Stroke H + Stroke A SS FT ZZ + 2 strokes (mm) Stroke range (mm) Bore size (mm) C B FT FY FD F J FX FZ GA M NA R T P S SS 32 25 to 800 40 88 109 21 M10 x 1.25 37 136 30 11 11 11 11 3/8 16 38 58 39 0.13 0.18 40 25 to 800 46 95 118 21 M10 x 1.25 36 136 30 11 11 11 11 3/8 45 12 65 42 0.2 50 25 to 800 58 115 145 27 M10 x 1.25 43 150 30 13 11 13 14 1/2 15 52 76 46 0.15 63 25 to 800 65 132 165

IDG

pressure dew point (C) P1 = 0.5 MPa 10 10 P1 = 0.5 MPa P1 = 0.7 MPa 20 20 P1 = 0.7 MPa 30 30 40 40 50 0 400 800 1200 1600 50 0 200 400 600 800 1000 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

High Vacuum Angle Valve

The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

m s m s Type of impact s m Kinetic energy E1 1 2 m2 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbol : Speed of impact object (m/s) m: Weight of impact object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impact object is measured at the moment of impact with the shock absorber. 8-12-11 12 Series

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Free mount type MSU Without auto switch 20 90 S M SUA CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 20 90 S D SUA L T79 M With auto switch CRQ2 Number of auto switches S Nil 1 pc. MSQ With auto switch unit 2 pcs.

Prevents Micro-Bubbles

S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

VZS

Other dimensions are the same as the grommet type. 3-7-12 13 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center

mb1

FY Up to 600 Up to 600 Up to 800 Up to 800 FT FE FX FZ 6-7-16 17 Square Tube Type Cylinder: Non-rotating Rod Double acting, Single Rod Series MB1K 32, 40, 50, 63, 80, 100 How to Order CJ1 MB1K L 32 50 CJP Without auto switch CJ2 MDB1K L 32 50 Y7BW With auto switch CM2 Number of auto switches CG1 Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

LEF-OM006xx

15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500, (600) (700), 800, (900), (1000) 50 60 (kg) ) 23 (mm/s) 2) 20500 10250 (mm/s 2) 3,000 (mm) 0.02 (mm) 20 10 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 56.4 (DC24V) A/B 800 / (

REA/REB

speed of 600mm/s.

ITV

Count AF Supply pressure: 1.0 MPa Pressure Characteristics Flow Characteristics Set pressure: 0.45 MPa AR 1000 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 900 kPa 900 Output deviation factor (% F .S.) 800 kPa IR 800 0.5 700 kPa Set pressure (kPa) 700 600 kPa

CRQ2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S W Single shaft Double shaft Rotating angle 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Suffix symbol S W Rotating angle Single shaft Double shaft Air cushion None Size 90 80 to 100 170 to 190 180 Attached C Size 10, 15 20, 30, 40 Nil

MK

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A Series MK RZQ MI W S CEP1 CE1 Maximum operating pressure: 1 MPa CE2 ML2B C J G5-S Ideal for machine designs with small space requirements Series MK2 CV Suited for electronic parts inspection clamps.