Ionizer

Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Installation height of sensor: 10 mm 3 Electrostatic potential [kV] 20 With sensor Ionizer 2 Without sensor Without sensor Discharge time [s] 15 1 With sensor L 0 10 1 Workpiece Without sensor 5 2 With sensor 3 0 500 1000 1500 2000 Installation distance L [mm] 1 2 3 4 Time [s] Run mode after static neutralization (electrostatic potential

CE2

C J G5-S Auto Switch Mounting Bracket Part No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

IDG

If the membrane air dryer,s body is cooled by the surrounding air, water drops may accumulate inside and reduce its dehumidification capacity. 14-19-8 5 Membrane Air Dryer Series IDG Precautions Be sure to read before handling.

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

ML1

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

Sine Rodless Cylinder Series REA

Sine Rodless Cylinder Series REA High Speed Cylinder Up To 12in/s Smooth Deceleration Construction Designed To Transport Delicate Workpieces Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products Glass products Allows rapid transport o Major improvement of throughput Rapid transport has been achieved with a maximum drive speed of 300mm/s (12in/s).

Series IDG

Order 1l/min = 0.035SCFM IDG 10 H 03 Optional specifications Flow rate by size Symbol Contents Size Outlet air flow rate Purge air flow rate l/min (ANR) Size 5 10 20 30 3 50 60 75 100 50/6 3 25/3 Nil P R None (standard) With fitting for purge air discharge Flow direction (rightleft) With dew point indicator 5 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 10 20 30 50 60 75 100 S

Air Cylinder Series MB

See the intersection of lateral axis 500mm/s and 63 line, and extend the intersection to left.

D. P. Lube ALD600/900 Series

Lube ALD600/900 Series D.P.

Brake mechanism added

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N Symbol Electroless nickel plated Control type If more than one option is required, write option part numbers in the order of S, N.

CEx-OMQ0010

(mm/s) 24

Thermo-con/Rack Mount Type

Deionized water (with an electric conductivity of approximately 1 S/cm) can be used, but may lose its electric conductivity. Also, if a facility supplying deionized water is used, the thermocon may be damaged by static electricity. When installing the product into a rack, it should be designed that the product weight is held with the bottom surface of the product.

CEx-OMQ0013

AC500V1 (12E ) DC500V50M (12E ) 33.3Hz6.8G XY 2 Z 4 JIS D1061 30G XYZ 3 IP65 () 5m10m15m20m R03-R8F 1CEU2 14 4. 4-1 () CE2 B 40 100 J 2 B 1 L n F G C D () T J 50 50mm K 63 63mm 80 80mm N 100 100mm R H Z mm mm mm 40 25~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN