VQ5000

System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

AC Servo Motor Driver (Pulse input type)

(Note) The value will be -1500 to 1500 kpulse/s when kpulse/ -9 s 9 inputting command pulse.

MK

CC Graph 2 Note) Be sure to use a flat washer to mount cylinders via through holes. 3 MK2l50/63 2 MK2l32/40 102 When arm's moment of inertia is 5 X 103kg/m2, cylinder speed should be less than MK2l32/40: 66mm/s MK2l50/63: 120mm/s Refer to p.4.1-21 for calculating moment of inertia.

3

VXS VXS VXB VXE (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + T When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + T Conversion with sonic conductance C: VXP VXR VXH VXF VX3 VXA S = 5.0 x C(5) Q : Air flow rate[L/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

NqD)y2sIE-Ix'u' IIHcvaall_I xars High spsed driye wilh a pislon speed of 1500mm/s (basic type) is possible. (When without load) **I-I-xBi3 Specifications Basic type, Slider type Basic type NCY2B6-40 Basic 2 60 in/s {50 lsooommis) Not 1)Whn operaling thlscylindffat high sp6d, b.6ur to provi(b a shock absoftor.

NCY2 series

NqD)y2sIE-Ix'u' IIHcvaall_I xars High spsed driye wilh a pislon speed of 1500mm/s (basic type) is possible. (When without load) **I-I-xBi3 Specifications Basic type, Slider type Basic type NCY2B6-40 Basic 2 60 in/s {50 lsooommis) Not 1)Whn operaling thlscylindffat high sp6d, b.6ur to provi(b a shock absoftor.

CHKD/CHKG

CH2 Mounting bracket type CHA Symbol Port position Note) Type Basic type B Number of auto switches Related Products Top Nil S n 2 pcs. 1 pc. n pcs. DL Foot bracket Without auto switch Nil Auto switch type Foot type Right LB Select applicable auto switch models from the table below.

3

(15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

•

Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

KT10

Code Material Viton (Standard) Polyurethane Buna-N Ethylene propylene No code UE BN EP Relieving Relieving Code Self Relieving (Standard) Non relieving 1 0 Main valve seat material Material Ports Material Vespel (Standard) PEEK Code Pressure gauge unit 4) Body material Code Brass 300 SS series 316 SS Material Code S No code PK B C S Ports Code Unit psig/bar MPa B V C V No code MPA 4P 4PN

PSxx-OMV0003CN

1028 0x0404 0 R/W dtL2 (OFF ) U16 0 Y OUT2 OFF 0.01 s 0x0x0BB8 (03000) 0.01 s 1030 0x0406 0 R/W FiL () U16 0 Y 5R.D. 0.1 1060 0x0424 0 R/W FSC () S16 0 Y -5050 -68No.PS-OMV0003CN-G () 1 3 dec hex 2 0Std 1dUAL(2 ) 2o1Lv(OUT1 ) 3o2Lv(OUT2 ) 4LinE() 5oFF() 1100 0x044C 0 R/W U8 0 Y std 1101 0x044D 0 R/W Std U8 0 Y 2 1102 0x044E 0 R/W U8 0 Y 2 2 1103 0x044F 0 R/W U8 1 Y Line

PSxx-OMV0008CN

1027 0x0403 0 R/W dtH2 (ON ) U16 0 Y 0x0x1770 (06000) 1028 0x0404 0 R/W dtL2 (OFF ) U16 0 Y OUT2 OFF 0.01 s 0x0x0BB8 (03000) 0.01 s 1030 0x0406 0 R/W FiL () U16 0 Y 5R.D. 0.1 1060 0x0424 0 R/W FSC () S16 0 Y -5050 -72No.PS-OMV0008CN-E () 1 3 dec hex 2 0Std 1dUAL(2 ) 2o1Lv(OUT1 ) 3o2Lv(OUT2 ) 4LinE(Line ) 5oFF() 1100 0x044C 0 R/W U8 0 Y 1101 0x044D 0 R/W Std U8 0 Y std 2 1102

SMC Electronic Switch Series Variations

Gap too small Green 2 a Place the gap gauge on the detection nozzle for precise adjustment. s Confirm applied air pressure.

BP1000

: 1/4 inch NPT) -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa Material Code S, SH V V 0 No code MPA Ports B V3 1 2 10 -30 in.Hg to 30 psig 2P 4PL Please refer to the following porting configurations. 2) Pressure gauge unit MPa or psig/bar selectable.

Compact Hydraulic Cylinder

Mounting: Basic type Number of auto switches Bore size Nil S n 2 pcs. 1 pc. n pcs. 20 32 40 50 63 80 100 20 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Without auto switch Nil Auto switch type Select applicable auto switch models from the table below. Cylinder stroke (mm) Refer to the standard stroke table on page 243.

Compact Electric Actuator Series LG1

P Ground ball screw Rolled ball screw Sliding screw S N Table 1: Feed Screw and Stroke Combination Correspondence Table Stroke (mm) Model 500 600 700 800 900 1000 1200 100 200 300 400 LG1H212PAStroke Screw combination LG1H212NAStroke LG1H212PCStroke LG1H212NCStroke LG1H212SCStroke Please note that combinations other than those shown above cannot be produced.

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.