Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CJ1 Specifications Specifications Type Air-hydro 20, 25, 32, 40, 50, 63 Double acting Turbine oil 1.5 MPa 1.0 MPa 0.18 MPa 15 to 300 mm/s None 5 to 60C JIS Class 2 Up to 1000 mm, Up to 1200 mm Bore size (mm) 20, 25, 32, 40, 50, 63, 80, 100 Double acting Air 1.0 MPa 0.08 MPa With rubber bumper With air cushion 50 to 1000 mm/s 50 to 700 mm/s CJP Bore size (mm) Action Fluid Proof pressure Max

2/3 Port Valve

Cv Effective area (mm2) Model Construction/Components AC AC, DC 1.0 0.5 0.3 1.0 0.5 0.3 VX311 -01 0 2 4 VX312 -01 0 2 4 VX313 -01 VX311 -02 1.5 2.2 3 1.5 0.08 0.16 0.24 0.08 0.16 1.4 2.8 4.3 1.4 2.8 0.6 0.3 0.2 0.6 0.3 0.6 1.0 0.2 0.3 0.6 0.15 0.3 0.6 1.0 0.3 0.6 0.15 0.3 1 8 (6A) 0 2 4 0 2 4 0 2 4 VX312 -02 330 2.2 VX3224-02 VX3324-02 550 700 330 550 700 550 700 550 700 550 700 550 700

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100

CC

Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MI W S CEP1 CE1 CE2 No load No load Load ratio Load ratio ML2B C J G5-S Bore size (mm) Bore size (mm) Bore size (mm) CCVL10/11/12/13 4.

Basic Type/Direct Mount Type

Direct mount type CY3R Series Basic type CY3B Series Series Variations Standard stroke (mm) Individual Made-to-Order products Bore size 1000 900 800 700 600 500 450 400 350 300 250 200 150 100 50 Series Heat resistant specifications (XB6) Low speed specifications (15 to 50 mm/s) (XB9) 6 10 Long stroke (XB11) 15 Low speed specifications (7 to 50 mm/s) (XB13) 20 CY3B Hydro specifications (X116

Electric Actuator Triple Axis P&P Unit

1600 kg mm/s mm 250 500 250 500 0.05 When axes are combined, select each axis considering the weight of the work piece and the body.

CC

92 125 139 11/4 3/4 7 20 2 46 185 0 29 93 60 183 180 144 185 202.5 L dimension 600 700 800 Effective oil level stroke (mm) 50 100 200 300 400 500 CCT63-l 228.5 278.5 378.5 503.5 603.5 728.5 s s s CCT100-l 286 386 511 611 736 836 s s s CCT160-l 399 524 624 749 849 949 1049 s s * Hexagon socket head cap screw is used for mounting.

CLS

: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100 100 Without auto switch M9B CDLS Y7BW L

Electric Actuator / Slider Type 《 AC Servo Motor 》

700 420 210 930 620 310 1410 940 470 Maximum Speed Note3) [mm/s] Actuator specification Stroke range [mm] 701 800 550 330 160 750 500 250 1140 760 380 801 900 610 410 200 930 620 310 901 1000 510 340 170 780 520 260 1001 1100 500 440 220 1101 1200 500 380 190 Acceleration/deceleration [mm/s2] 20 (Refer catalog about limit according to work load and duty rate.)

CNS

weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 3000 3000 2000 2000 160 140 125 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 160 600 600 140 500 500

VQ7-6/7-8

700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-RA02 0 1000 900 800 700 600 500 400 300 200 100 0 VQ7-6-FG-S-RA03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

100

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.

Cylinder with Lock Series CLS

0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 125 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Gragh 7 Gragh 4 0.5MPaP 0.5MPaP 3000 3000 2000 2000 160 140 125 1000 1000 700 800 900 700 800 900 Load weight:

Guide Cylinder Series MGG

, 1000 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Ionizer

Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Installation height of sensor: 10 mm 3 Electrostatic potential [kV] 20 With sensor Ionizer 2 Without sensor Without sensor Discharge time [s] 15 1 With sensor L 0 10 1 Workpiece Without sensor 5 2 With sensor 3 0 500 1000 1500 2000 Installation distance L [mm] 1 2 3 4 Time [s] Run mode after static neutralization (electrostatic potential

Vacuum Filter AFJ Series

m AFJ20-02-40-S/AFJ30-03-40-S/AFJ40-04-40-S AFJ20-02-40-T/AFJ30-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Compact Electric Actuator Series LG1

P Ground ball screw Rolled ball screw Sliding screw S N Table 1: Feed Screw and Stroke Combination Correspondence Table Stroke (mm) Model 500 600 700 800 900 1000 1200 100 200 300 400 LG1H212PAStroke Screw combination LG1H212NAStroke LG1H212PCStroke LG1H212NCStroke LG1H212SCStroke Please note that combinations other than those shown above cannot be produced.

Cylinder with Lock Series MNB

B2 H S + Stroke ??